SE9804398L - Measuring instruments and method for measuring the degree of dust and dirt coating on a surface - Google Patents

Measuring instruments and method for measuring the degree of dust and dirt coating on a surface

Info

Publication number
SE9804398L
SE9804398L SE9804398A SE9804398A SE9804398L SE 9804398 L SE9804398 L SE 9804398L SE 9804398 A SE9804398 A SE 9804398A SE 9804398 A SE9804398 A SE 9804398A SE 9804398 L SE9804398 L SE 9804398L
Authority
SE
Sweden
Prior art keywords
measurement
dust
intended
measuring
test film
Prior art date
Application number
SE9804398A
Other languages
Unknown language ( )
Swedish (sv)
Other versions
SE9804398D0 (en
SE521948C2 (en
Inventor
Ari Kouvonen
Original Assignee
Act Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Act Ab filed Critical Act Ab
Priority to SE9804398A priority Critical patent/SE521948C2/en
Publication of SE9804398D0 publication Critical patent/SE9804398D0/en
Priority to PCT/SE1999/002405 priority patent/WO2000039566A1/en
Priority to JP2000591416A priority patent/JP2002533717A/en
Priority to EP99964901A priority patent/EP1147404A1/en
Priority to AU30931/00A priority patent/AU3093100A/en
Publication of SE9804398L publication Critical patent/SE9804398L/en
Publication of SE521948C2 publication Critical patent/SE521948C2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The invention relates to a measurement instrument and a method for measuring the degree of covering of dust and dirt on a surface (30), for example in order to monitor cleaning quality, comprising a holder (2) by means of which a measurement object in the form of a test film (3) is held, during measurement, in a plane in a measurement zone (4) defined by the measurement instrument, the said test film (3) being coated with an adhesive layer (5) which, during testing on the surface (30), is intended to pick up any dust and dirt particles (31) from the said surface, the measurement instrument being distinguished in particular by: a light source (6) intended to illuminate the adhesive layer (5) of the test film (3) with obliquely incident light; a photodetector (8) intended to register the light intensity of the light reflected from the test film (3); and a processor (14) intended to compare the light intensity registered by the photodetector (8) with a predetermined calibration value, and to present a measurement value based on the said comparison, which measurement value represents the degree of covering of dust and dirt on the surface (30).
SE9804398A 1998-12-17 1998-12-17 Measuring instruments and method for measuring the degree of dust and dirt coating on a surface SE521948C2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE9804398A SE521948C2 (en) 1998-12-17 1998-12-17 Measuring instruments and method for measuring the degree of dust and dirt coating on a surface
PCT/SE1999/002405 WO2000039566A1 (en) 1998-12-17 1999-12-17 An instrument and a method for measuring the degree of dust and dirt on a surface
JP2000591416A JP2002533717A (en) 1998-12-17 1999-12-17 Apparatus and method for measuring the degree of dust and dirt on surfaces
EP99964901A EP1147404A1 (en) 1998-12-17 1999-12-17 An instrument and a method for measuring the degree of dust and dirt on a surface
AU30931/00A AU3093100A (en) 1998-12-17 1999-12-17 An instrument and a method for measuring the degree of dust and dirt on a surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9804398A SE521948C2 (en) 1998-12-17 1998-12-17 Measuring instruments and method for measuring the degree of dust and dirt coating on a surface

Publications (3)

Publication Number Publication Date
SE9804398D0 SE9804398D0 (en) 1998-12-17
SE9804398L true SE9804398L (en) 2000-06-18
SE521948C2 SE521948C2 (en) 2003-12-23

Family

ID=20413725

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9804398A SE521948C2 (en) 1998-12-17 1998-12-17 Measuring instruments and method for measuring the degree of dust and dirt coating on a surface

Country Status (5)

Country Link
EP (1) EP1147404A1 (en)
JP (1) JP2002533717A (en)
AU (1) AU3093100A (en)
SE (1) SE521948C2 (en)
WO (1) WO2000039566A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10145985C2 (en) * 2001-09-18 2003-11-13 Fkfs Forschungsinstitut Fuer K Methods and devices for determining the quantitative contamination of surfaces
ES2295749T3 (en) * 2004-09-10 2008-04-16 Cognis Ip Management Gmbh PROCEDURE FOR THE QUANTITATIVE MEASURE OF DEPOSITS ON SOLID SURFACES.
WO2008140321A1 (en) 2007-05-11 2008-11-20 Argos Solutions As Apparatus for characterizing a surface structure
EP2410317A1 (en) * 2010-07-13 2012-01-25 Krämer AG Bassersdorf Method for assessing particles attached to a body
SE1250056A1 (en) 2012-01-27 2013-07-28 Spaarab Produkter Ab Detection of contaminated areas
KR101582461B1 (en) * 2014-10-22 2016-01-05 주식회사 제덱스 Test film for detecting surface particles in clean room
KR101809009B1 (en) * 2017-08-02 2017-12-15 주식회사 제덱스 Apparatus for detecting materials on transparent or translucent film
CN110108536B (en) * 2019-06-18 2021-10-01 中国计量大学 A standard plate manufacturing method for heliostat area grayscale detection and comparison
DE102020212563A1 (en) 2020-10-05 2022-04-07 Carl Zeiss Smt Gmbh Procedure for determining the particle load on a surface
CN116202911A (en) * 2022-12-26 2023-06-02 安徽立光电子材料股份有限公司 AR glass surface testing device and testing method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3579119D1 (en) * 1984-11-30 1990-09-13 Kawasaki Steel Co METHOD FOR DETERMINING THE SURFACE GLOSS OF A BODY.
US5083161A (en) * 1989-08-25 1992-01-21 Xerox Corporation Densitometer for measuring developability
DK163538C (en) * 1990-03-22 1992-08-03 Abk Bygge & Miljoeteknik PROCEDURE AND CLEANING CONTROL MEASUREMENT
US5461481A (en) * 1992-12-29 1995-10-24 Research Technology International Company System, apparatus and/or method for analyzing light intensities of light reflected from a surface of a sample
US5412221A (en) * 1994-04-26 1995-05-02 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Particle fallout/activity sensor
NO307675B1 (en) * 1997-04-18 2000-05-08 Lasse Leirfall Use of a measuring device to indicate a contaminated, soiled or flammable state

Also Published As

Publication number Publication date
EP1147404A1 (en) 2001-10-24
SE9804398D0 (en) 1998-12-17
JP2002533717A (en) 2002-10-08
SE521948C2 (en) 2003-12-23
WO2000039566A1 (en) 2000-07-06
AU3093100A (en) 2000-07-31

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Legal Events

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