SE9803326D0 - Sätt och anordning för interferomtrimätning - Google Patents

Sätt och anordning för interferomtrimätning

Info

Publication number
SE9803326D0
SE9803326D0 SE9803326A SE9803326A SE9803326D0 SE 9803326 D0 SE9803326 D0 SE 9803326D0 SE 9803326 A SE9803326 A SE 9803326A SE 9803326 A SE9803326 A SE 9803326A SE 9803326 D0 SE9803326 D0 SE 9803326D0
Authority
SE
Sweden
Prior art keywords
waves
light
receiver
measured object
wavelengths
Prior art date
Application number
SE9803326A
Other languages
English (en)
Other versions
SE9803326L (sv
SE521927C2 (sv
Inventor
Olov Marklund
Original Assignee
Delsing Jerker
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Delsing Jerker filed Critical Delsing Jerker
Priority to SE9803326A priority Critical patent/SE521927C2/sv
Publication of SE9803326D0 publication Critical patent/SE9803326D0/sv
Priority to EP99954572A priority patent/EP1117973A1/en
Priority to PCT/SE1999/001748 priority patent/WO2000020824A1/en
Publication of SE9803326L publication Critical patent/SE9803326L/sv
Priority to US09/787,550 priority patent/US6493092B1/en
Publication of SE521927C2 publication Critical patent/SE521927C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
SE9803326A 1998-10-01 1998-10-01 Metod och anordning för interferometrimätning SE521927C2 (sv)

Priority Applications (4)

Application Number Priority Date Filing Date Title
SE9803326A SE521927C2 (sv) 1998-10-01 1998-10-01 Metod och anordning för interferometrimätning
EP99954572A EP1117973A1 (en) 1998-10-01 1999-10-01 Method and apparatus for interferometric measurement
PCT/SE1999/001748 WO2000020824A1 (en) 1998-10-01 1999-10-01 Method and apparatus for interferometric measurement
US09/787,550 US6493092B1 (en) 1998-10-01 2001-06-01 Method and apparatus for interferometric measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9803326A SE521927C2 (sv) 1998-10-01 1998-10-01 Metod och anordning för interferometrimätning

Publications (3)

Publication Number Publication Date
SE9803326D0 true SE9803326D0 (sv) 1998-10-01
SE9803326L SE9803326L (sv) 2000-04-02
SE521927C2 SE521927C2 (sv) 2003-12-16

Family

ID=20412781

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9803326A SE521927C2 (sv) 1998-10-01 1998-10-01 Metod och anordning för interferometrimätning

Country Status (4)

Country Link
US (1) US6493092B1 (sv)
EP (1) EP1117973A1 (sv)
SE (1) SE521927C2 (sv)
WO (1) WO2000020824A1 (sv)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7436504B2 (en) * 2003-09-10 2008-10-14 Shear Graphics, Llc Non-destructive testing and imaging
US7187437B2 (en) * 2003-09-10 2007-03-06 Shearographics, Llc Plurality of light sources for inspection apparatus and method
US6934018B2 (en) * 2003-09-10 2005-08-23 Shearographics, Llc Tire inspection apparatus and method
RU2300077C1 (ru) * 2005-11-10 2007-05-27 Научно Исследовательский Институт Радиоэлектроники и лазерной техники (НИИ РЛ) Московского Государственного Технического Университета им. Н.Э. Баумана Дистанционный способ измерения толщины толстых пленок нефтепродуктов на поверхности воды
CN102131813B (zh) 2008-06-24 2014-07-30 科德克希思公司 用于制备基本上立体异构纯的稠合二环脯氨酸化合物的生物催化方法
DE102010006237A1 (de) * 2010-01-26 2011-07-28 Siemens Aktiengesellschaft, 80333 Verfahren und Anordnung zum Messen der Dicke einer Schicht
US20140333936A1 (en) * 2013-05-10 2014-11-13 Industrial Technology Research Institute Thickness measuring system and method for a bonding layer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153669A (en) * 1991-03-27 1992-10-06 Hughes Danbury Optical Systems, Inc. Three wavelength optical measurement apparatus and method
US5159408A (en) * 1991-03-27 1992-10-27 Hughes Danbury Optical Systems, Inc. Optical thickness profiler using synthetic wavelengths
JP3151581B2 (ja) * 1992-12-21 2001-04-03 株式会社トプコン 光波距離計
GB2311600A (en) * 1996-03-29 1997-10-01 Secr Defence Optic Fibre Interferometric sensor

Also Published As

Publication number Publication date
SE9803326L (sv) 2000-04-02
WO2000020824A1 (en) 2000-04-13
EP1117973A1 (en) 2001-07-25
US6493092B1 (en) 2002-12-10
SE521927C2 (sv) 2003-12-16

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Legal Events

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