SE9700256D0 - Magnet-stored high-speed vacuum pump - Google Patents

Magnet-stored high-speed vacuum pump

Info

Publication number
SE9700256D0
SE9700256D0 SE9700256A SE9700256A SE9700256D0 SE 9700256 D0 SE9700256 D0 SE 9700256D0 SE 9700256 A SE9700256 A SE 9700256A SE 9700256 A SE9700256 A SE 9700256A SE 9700256 D0 SE9700256 D0 SE 9700256D0
Authority
SE
Sweden
Prior art keywords
rotor
pump
vacuum pump
magnet
stator
Prior art date
Application number
SE9700256A
Other languages
Swedish (sv)
Other versions
SE508445C2 (en
SE9700256L (en
Inventor
Torbjoern Lembke
Original Assignee
Magnetal Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Magnetal Ab filed Critical Magnetal Ab
Priority to SE9700256A priority Critical patent/SE508445C2/en
Publication of SE9700256D0 publication Critical patent/SE9700256D0/en
Priority to PCT/SE1998/000101 priority patent/WO1998032973A1/en
Priority to AU57882/98A priority patent/AU5788298A/en
Priority to EP98901651A priority patent/EP0960277A1/en
Priority to US09/013,601 priority patent/US6050782A/en
Publication of SE9700256L publication Critical patent/SE9700256L/en
Publication of SE508445C2 publication Critical patent/SE508445C2/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/0408—Passive magnetic bearings
    • F16C32/0436—Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/0408—Passive magnetic bearings
    • F16C32/0436—Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part
    • F16C32/0438—Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part with a superconducting body, e.g. a body made of high temperature superconducting material such as YBaCuO
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Abstract

High velocity vacuum pump, such as turbomolecular pump, drag pump, centrifugal pump or the like, comprising a stator (10) and a rotor (18,43,53), which is axially and radially suspended with respect to the stator (10) by magnetic bearings (27). The vacuum pump may comprise two at the same rotor provided, parallelly acting pump portions, each one comprising two pumping steps. The rotor may be cylindrical and rotates around an inner stator shaft and within an outer stator portion. In that way, one pumping step (22) is formed between the inner stator shaft and the rotor and another pumping step (24) between the outer stator portion (10) and the rotor. The magnet bearing comprises at least one rotation symmetric magnet (27) and is disposed to give rise to a rotation symmetric magnetic field which is centered around the rotational axis. When and only when the rotor tends to leave the predetermined path, the magnetic field generates induced eddy currents in the rotor, which give rise to restoring stabilizing forces.
SE9700256A 1997-01-28 1997-01-28 High speed vacuum pump SE508445C2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE9700256A SE508445C2 (en) 1997-01-28 1997-01-28 High speed vacuum pump
PCT/SE1998/000101 WO1998032973A1 (en) 1997-01-28 1998-01-23 Magnetically suspended high velocity vacuum pump
AU57882/98A AU5788298A (en) 1997-01-28 1998-01-23 Magnetically suspended high velocity vacuum pump
EP98901651A EP0960277A1 (en) 1997-01-28 1998-01-23 Magnetically suspended high velocity vacuum pump
US09/013,601 US6050782A (en) 1997-01-28 1998-01-26 Magnetically suspended high velocity vacuum pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9700256A SE508445C2 (en) 1997-01-28 1997-01-28 High speed vacuum pump
US09/013,601 US6050782A (en) 1997-01-28 1998-01-26 Magnetically suspended high velocity vacuum pump

Publications (3)

Publication Number Publication Date
SE9700256D0 true SE9700256D0 (en) 1997-01-28
SE9700256L SE9700256L (en) 1998-07-29
SE508445C2 SE508445C2 (en) 1998-10-05

Family

ID=26662855

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9700256A SE508445C2 (en) 1997-01-28 1997-01-28 High speed vacuum pump

Country Status (5)

Country Link
US (1) US6050782A (en)
EP (1) EP0960277A1 (en)
AU (1) AU5788298A (en)
SE (1) SE508445C2 (en)
WO (1) WO1998032973A1 (en)

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DE19718791A1 (en) * 1997-05-03 1998-11-05 Mannesmann Vdo Ag Conveyor unit
US6419461B2 (en) * 1997-08-13 2002-07-16 Seiko Instruments Inc. Turbo molecular pump
JP3079367B2 (en) * 1997-10-03 2000-08-21 セイコー精機株式会社 Turbo molecular pump
US6416215B1 (en) 1999-12-14 2002-07-09 University Of Kentucky Research Foundation Pumping or mixing system using a levitating magnetic element
US6412173B1 (en) 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
US6422813B1 (en) * 1999-09-03 2002-07-23 Hood Technology Corporation Apparatus for producing vibration in turbo-machinery blades
US6758593B1 (en) * 2000-10-09 2004-07-06 Levtech, Inc. Pumping or mixing system using a levitating magnetic element, related system components, and related methods
FR2804476B1 (en) * 2000-01-31 2002-04-12 Cit Alcatel DAMPING SYSTEM AND BEARING CENTER FOR VACUUM PUMP ON MAGNETIC BEARING
DE10149366A1 (en) * 2001-10-06 2003-04-17 Leybold Vakuum Gmbh Axial friction vacuum pump has two concentric rotor components with drives, rotating in opposite directions to improve relative speed of pumping structures
US6641378B2 (en) * 2001-11-13 2003-11-04 William D. Davis Pump with electrodynamically supported impeller
DE10211134C1 (en) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolecular pump for low pressure applications has coaxial central opening providing free access to center
AU2003241444A1 (en) * 2003-05-15 2005-01-21 William Davis Pump with magnetic bearings
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
CN108397399A (en) * 2018-03-21 2018-08-14 绵阳科大久创科技有限公司 A kind of ultra-clean gas conveying of magnetic drive and shifting pump
JP6999485B2 (en) 2018-04-20 2022-01-18 エドワーズ株式会社 Vacuum pump and vacuum pump control device

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
US3399827A (en) * 1967-05-19 1968-09-03 Everett H. Schwartzman Vacuum pump system
US3779618A (en) * 1971-02-26 1973-12-18 Comitato Naz Per I Engergia Nu Self-centering magnetic suspension
US3811740A (en) * 1971-04-24 1974-05-21 Cnen Self-centering rotary magnetic suspension device
DE2349033C3 (en) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbo molecular pump
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE2825400C2 (en) * 1978-06-09 1984-02-02 Omya Gmbh, 5000 Koeln Cutting machine
JPS58109719A (en) * 1981-12-23 1983-06-30 Hitachi Ltd Magnetic bearing
JPH0646036B2 (en) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 Axial flow molecular pump
FR2611818B1 (en) * 1987-02-26 1991-04-19 Cit Alcatel ROTARY MOLECULAR VACUUM PUMP OF THE GAEDE CHANNEL TYPE
JPH03222895A (en) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd Thread-grooved vacuum pump
FR2659396B1 (en) * 1990-03-07 1992-05-15 Cit Alcatel VACUUM PUMP FOR CLEAN MOLECULAR VACUUM.
US5470208A (en) * 1990-10-05 1995-11-28 Kletschka; Harold D. Fluid pump with magnetically levitated impeller
US5250865A (en) * 1992-04-30 1993-10-05 Avcon - Advanced Controls Technology, Inc. Electromagnetic thrust bearing for coupling a rotatable member to a stationary member
FR2715442B1 (en) * 1994-01-26 1996-03-01 Lorraine Carbone Centrifugal pump with magnetic drive.
DE4410656A1 (en) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Friction pump
CN1115362A (en) * 1994-07-06 1996-01-24 储继国 Multiple dragging face molecular pump
FR2723767B1 (en) * 1994-08-19 1997-01-03 Cit Alcatel TURBOMOLECULAR VACUUM PUMP

Also Published As

Publication number Publication date
SE508445C2 (en) 1998-10-05
SE9700256L (en) 1998-07-29
EP0960277A1 (en) 1999-12-01
US6050782A (en) 2000-04-18
AU5788298A (en) 1998-08-18
WO1998032973A1 (en) 1998-07-30

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Legal Events

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