SE8503901D0 - PROCEDURES AND DEVICE FOR EXAMINATION - Google Patents

PROCEDURES AND DEVICE FOR EXAMINATION

Info

Publication number
SE8503901D0
SE8503901D0 SE8503901A SE8503901A SE8503901D0 SE 8503901 D0 SE8503901 D0 SE 8503901D0 SE 8503901 A SE8503901 A SE 8503901A SE 8503901 A SE8503901 A SE 8503901A SE 8503901 D0 SE8503901 D0 SE 8503901D0
Authority
SE
Sweden
Prior art keywords
laser
sample
directed
spectral analysis
mass spectral
Prior art date
Application number
SE8503901A
Other languages
Swedish (sv)
Other versions
SE8503901L (en
SE452676B (en
Inventor
C H Becker
K T Gillen
Jr S E Buttrill
Original Assignee
Stanford Res Inst Int
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanford Res Inst Int filed Critical Stanford Res Inst Int
Publication of SE8503901L publication Critical patent/SE8503901L/en
Publication of SE8503901D0 publication Critical patent/SE8503901D0/en
Publication of SE452676B publication Critical patent/SE452676B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking

Abstract

Method and apparatus for mass spectral analysis of unknown species of matter present on a surface in extremely low concentrations. A probe beam such as an ion beam, electron beam or laser is directed to the surface under examination to remove a sample of material. An untuned, high-intensity laser is directed to a spatial region proximate to the surface. The laser has sufficient intensity to induce a high degree of nonresonant, and hence non-selective, photoionization of the sample of material within the laser beam. The non-selectively ionized sample is then subjected to mass spectral analysis to determine the nature of the unknown species.
SE8503901A 1983-12-23 1985-08-21 PROCEDURE AND DEVICE FOR ANALYSIS OF A SURFACE INCLUDING SUBJECTS SE452676B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US56494983A 1983-12-23 1983-12-23

Publications (3)

Publication Number Publication Date
SE8503901L SE8503901L (en) 1985-08-21
SE8503901D0 true SE8503901D0 (en) 1985-08-21
SE452676B SE452676B (en) 1987-12-07

Family

ID=24256568

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8503901A SE452676B (en) 1983-12-23 1985-08-21 PROCEDURE AND DEVICE FOR ANALYSIS OF A SURFACE INCLUDING SUBJECTS

Country Status (10)

Country Link
EP (1) EP0167561B1 (en)
JP (1) JP2640935B2 (en)
AU (1) AU570531B2 (en)
CA (1) CA1220879A (en)
DE (2) DE3490595C2 (en)
DK (1) DK161858C (en)
FI (1) FI83463C (en)
GB (1) GB2160014B (en)
SE (1) SE452676B (en)
WO (1) WO1985002907A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2211020A (en) * 1987-10-10 1989-06-21 Wallach Eric Robert Microprobe mass analyser
US4920264A (en) * 1989-01-17 1990-04-24 Sri International Method for preparing samples for mass analysis by desorption from a frozen solution
US5019208A (en) * 1990-03-23 1991-05-28 Air Products And Chemicals, Inc. Method for determining the depth of permeation of a modifier into the interior of a thermoplastic article
DE4036115C2 (en) * 1990-11-13 1997-12-11 Max Planck Gesellschaft Method and device for quantitative non-resonant photoionization of neutral particles and use of such a device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3727047A (en) * 1971-07-22 1973-04-10 Avco Corp Time of flight mass spectrometer comprising a reflecting means which equalizes time of flight of ions having same mass to charge ratio
FR2279093A1 (en) * 1974-06-28 1976-02-13 Anvar METHOD AND DEVICE FOR LOCAL CHEMICAL ANALYSIS OF SOLIDS
JPS54123163A (en) * 1978-03-16 1979-09-25 Mitsuboshi Belting Ltd Acrylic rubber composition
DE3015352A1 (en) * 1980-04-22 1981-11-05 Kernforschungsanlage Jülich GmbH, 5170 Jülich METHOD AND DEVICE FOR SPECTOSCOPICALLY DETECTING ELEMENTS ON THE SURFACE OF A SOLID
JPS58119148A (en) * 1982-01-09 1983-07-15 Jeol Ltd Ion source of mass spectrograph
US4442354A (en) * 1982-01-22 1984-04-10 Atom Sciences, Inc. Sputter initiated resonance ionization spectrometry
JPS5981854A (en) * 1982-10-31 1984-05-11 Shimadzu Corp Mass spectrometer for secondary ion
JPS60114753A (en) * 1983-11-25 1985-06-21 ジー・サムエル　ハースト Quantitative analysis method of constituent and device thereof

Also Published As

Publication number Publication date
SE8503901L (en) 1985-08-21
DK381385A (en) 1985-08-22
JP2640935B2 (en) 1997-08-13
EP0167561A1 (en) 1986-01-15
WO1985002907A1 (en) 1985-07-04
GB2160014A (en) 1985-12-11
SE452676B (en) 1987-12-07
AU570531B2 (en) 1988-03-17
CA1220879A (en) 1987-04-21
DE3490595T (en) 1985-11-28
DK381385D0 (en) 1985-08-22
GB8518083D0 (en) 1985-08-21
DK161858B (en) 1991-08-19
EP0167561B1 (en) 1989-12-06
FI853242A0 (en) 1985-08-22
GB2160014B (en) 1987-12-16
AU3744785A (en) 1985-07-12
FI853242L (en) 1985-08-22
JPS61500866A (en) 1986-05-01
DK161858C (en) 1992-01-20
FI83463B (en) 1991-03-28
DE3490595C2 (en) 1995-10-26
FI83463C (en) 1991-07-10

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