GB8518083D0 - Surface diagnostics - Google Patents

Surface diagnostics

Info

Publication number
GB8518083D0
GB8518083D0 GB858518083A GB8518083A GB8518083D0 GB 8518083 D0 GB8518083 D0 GB 8518083D0 GB 858518083 A GB858518083 A GB 858518083A GB 8518083 A GB8518083 A GB 8518083A GB 8518083 D0 GB8518083 D0 GB 8518083D0
Authority
GB
United Kingdom
Prior art keywords
surface diagnostics
diagnostics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB858518083A
Other versions
GB2160014B (en
GB2160014A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SRI International Inc
Original Assignee
SRI International Inc
Stanford Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SRI International Inc, Stanford Research Institute filed Critical SRI International Inc
Publication of GB8518083D0 publication Critical patent/GB8518083D0/en
Publication of GB2160014A publication Critical patent/GB2160014A/en
Application granted granted Critical
Publication of GB2160014B publication Critical patent/GB2160014B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
GB08518083A 1983-12-23 1984-09-20 Method and apparatus for surface diagnostics Expired GB2160014B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US56494983A 1983-12-23 1983-12-23
PCT/US1984/001509 WO1985002907A1 (en) 1983-12-23 1984-09-20 Method and apparatus for surface diagnostics

Publications (3)

Publication Number Publication Date
GB8518083D0 true GB8518083D0 (en) 1985-08-21
GB2160014A GB2160014A (en) 1985-12-11
GB2160014B GB2160014B (en) 1987-12-16

Family

ID=24256568

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08518083A Expired GB2160014B (en) 1983-12-23 1984-09-20 Method and apparatus for surface diagnostics

Country Status (10)

Country Link
EP (1) EP0167561B1 (en)
JP (1) JP2640935B2 (en)
AU (1) AU570531B2 (en)
CA (1) CA1220879A (en)
DE (2) DE3490595T (en)
DK (1) DK161858C (en)
FI (1) FI83463C (en)
GB (1) GB2160014B (en)
SE (1) SE452676B (en)
WO (1) WO1985002907A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2211020A (en) * 1987-10-10 1989-06-21 Wallach Eric Robert Microprobe mass analyser
US4920264A (en) * 1989-01-17 1990-04-24 Sri International Method for preparing samples for mass analysis by desorption from a frozen solution
US5019208A (en) * 1990-03-23 1991-05-28 Air Products And Chemicals, Inc. Method for determining the depth of permeation of a modifier into the interior of a thermoplastic article
DE4036115C2 (en) * 1990-11-13 1997-12-11 Max Planck Gesellschaft Method and device for quantitative non-resonant photoionization of neutral particles and use of such a device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3727047A (en) * 1971-07-22 1973-04-10 Avco Corp Time of flight mass spectrometer comprising a reflecting means which equalizes time of flight of ions having same mass to charge ratio
FR2279093A1 (en) * 1974-06-28 1976-02-13 Anvar METHOD AND DEVICE FOR LOCAL CHEMICAL ANALYSIS OF SOLIDS
JPS54123163A (en) * 1978-03-16 1979-09-25 Mitsuboshi Belting Ltd Acrylic rubber composition
DE3015352A1 (en) * 1980-04-22 1981-11-05 Kernforschungsanlage Jülich GmbH, 5170 Jülich METHOD AND DEVICE FOR SPECTOSCOPICALLY DETECTING ELEMENTS ON THE SURFACE OF A SOLID
JPS58119148A (en) * 1982-01-09 1983-07-15 Jeol Ltd Ion source of mass spectrograph
US4442354A (en) * 1982-01-22 1984-04-10 Atom Sciences, Inc. Sputter initiated resonance ionization spectrometry
JPS5981854A (en) * 1982-10-31 1984-05-11 Shimadzu Corp Mass spectrometer for secondary ion
JPS60114753A (en) * 1983-11-25 1985-06-21 ジー・サムエル　ハースト Quantitative analysis method of constituent and device thereof

Also Published As

Publication number Publication date
SE452676B (en) 1987-12-07
DK381385A (en) 1985-08-22
DE3490595C2 (en) 1995-10-26
GB2160014B (en) 1987-12-16
EP0167561A1 (en) 1986-01-15
DE3490595T (en) 1985-11-28
FI83463C (en) 1991-07-10
CA1220879A (en) 1987-04-21
SE8503901D0 (en) 1985-08-21
DK161858C (en) 1992-01-20
JP2640935B2 (en) 1997-08-13
GB2160014A (en) 1985-12-11
WO1985002907A1 (en) 1985-07-04
JPS61500866A (en) 1986-05-01
DK381385D0 (en) 1985-08-22
AU570531B2 (en) 1988-03-17
FI853242L (en) 1985-08-22
AU3744785A (en) 1985-07-12
DK161858B (en) 1991-08-19
FI853242A0 (en) 1985-08-22
SE8503901L (en) 1985-08-21
FI83463B (en) 1991-03-28
EP0167561B1 (en) 1989-12-06

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20000920