SE7908083L - Forstoftningsapparat med effektmatning via ett flertal net - Google Patents
Forstoftningsapparat med effektmatning via ett flertal netInfo
- Publication number
- SE7908083L SE7908083L SE7908083A SE7908083A SE7908083L SE 7908083 L SE7908083 L SE 7908083L SE 7908083 A SE7908083 A SE 7908083A SE 7908083 A SE7908083 A SE 7908083A SE 7908083 L SE7908083 L SE 7908083L
- Authority
- SE
- Sweden
- Prior art keywords
- power supply
- supply via
- via several
- spray appliance
- several net
- Prior art date
Links
- 239000007921 spray Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3444—Associated circuits
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/066,917 US4284490A (en) | 1978-09-28 | 1979-08-21 | R.F. Sputtering apparatus including multi-network power supply |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE7908083L true SE7908083L (sv) | 1981-02-22 |
Family
ID=22072548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE7908083A SE7908083L (sv) | 1979-08-21 | 1979-09-28 | Forstoftningsapparat med effektmatning via ett flertal net |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS56108875A (sv) |
| CA (1) | CA1143005A (sv) |
| DE (1) | DE2939167A1 (sv) |
| FR (1) | FR2464009A1 (sv) |
| GB (1) | GB2058470A (sv) |
| NL (1) | NL7907241A (sv) |
| SE (1) | SE7908083L (sv) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0633452B2 (ja) * | 1985-06-25 | 1994-05-02 | 株式会社シンクロン | スパツタ装置 |
| JP2831961B2 (ja) * | 1988-01-11 | 1998-12-02 | 忠弘 大見 | 薄膜形成装置のスパッタリング制御装置 |
| JPH02156081A (ja) * | 1988-12-09 | 1990-06-15 | Tokuda Seisakusho Ltd | スパッタ装置 |
| EP1023771B1 (en) * | 1997-09-17 | 2007-01-17 | Tokyo Electron Limited | Electrical impedance matching system and method |
| DE10015699B4 (de) * | 2000-03-27 | 2004-03-18 | Forschungs- Und Applikationslabor Plasmatechnik Gmbh Dresden | Schaltungsanordnung zur Impedanzkompensation |
| DE602005022221D1 (de) * | 2004-11-12 | 2010-08-19 | Oerlikon Trading Ag | Impedanzanpassung eines kapazitiv gekoppelten hf-plasmareaktors mit eignung für grossflächige substrate |
| DE202008006477U1 (de) * | 2008-05-06 | 2008-07-24 | Forschungs- Und Applikationslabor Plasmatechnik Gmbh Dresden | Vorrichtung zur Modifizierung von Substratoberflächen |
| CN117004917B (zh) * | 2023-08-14 | 2025-08-15 | 天津吉兆源科技有限公司 | 一种均匀性调节装置及磁控溅射真空镀膜机 |
-
1979
- 1979-09-27 DE DE19792939167 patent/DE2939167A1/de not_active Withdrawn
- 1979-09-28 GB GB7933758A patent/GB2058470A/en not_active Withdrawn
- 1979-09-28 FR FR7924317A patent/FR2464009A1/fr not_active Withdrawn
- 1979-09-28 NL NL7907241A patent/NL7907241A/nl not_active Application Discontinuation
- 1979-09-28 CA CA000336679A patent/CA1143005A/en not_active Expired
- 1979-09-28 SE SE7908083A patent/SE7908083L/sv unknown
- 1979-09-28 JP JP12424679A patent/JPS56108875A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2939167A1 (de) | 1981-04-02 |
| JPS56108875A (en) | 1981-08-28 |
| FR2464009A1 (fr) | 1981-02-27 |
| CA1143005A (en) | 1983-03-15 |
| NL7907241A (nl) | 1981-02-24 |
| GB2058470A (en) | 1981-04-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| SE7801940L (sv) | Energiforsorjningsanordning | |
| IT1123165B (it) | Dispositivo di alimentazione costante | |
| NL191341C (nl) | Voedingseenheid. | |
| SE7908083L (sv) | Forstoftningsapparat med effektmatning via ett flertal net | |
| JPS53105936A (en) | Power supply | |
| DD129972A1 (de) | Stromversorgungseinheit | |
| BR7802977A (pt) | Dispositivo de alimentacao | |
| DK417480A (da) | Halvleder stroemforsyning | |
| DK384080A (da) | Styret dc-energiforsyning | |
| SE7811993L (sv) | Elektroniskt styrd stromforsorjningsskena | |
| DD136445A5 (de) | Schaltregler | |
| IT1130047B (it) | Dispositivo per determinare il rifornimento di energia | |
| JPS5425426A (en) | Power supply | |
| DK417580A (da) | Halvleder stroemforsyning | |
| JPS53128933A (en) | Power supply with timer | |
| AT362458B (de) | Viersystem-stromversorgungseinrichtung | |
| BR7705078A (pt) | Alimentacao de corrente | |
| ATA113779A (de) | Energieversorgungseinheit | |
| SE7809973L (sv) | Vermeanleggning | |
| SE7706534L (sv) | Vermeanleggning | |
| SE8006109L (sv) | Spenningsforsorjningskrets | |
| JPS53101990A (en) | Power supply | |
| JPS541857A (en) | Power supply | |
| JPS5430426A (en) | Power supply | |
| IT1159134B (it) | Alimentatore perfezionato |