SE462717B - Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning - Google Patents

Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning

Info

Publication number
SE462717B
SE462717B SE8402504A SE8402504A SE462717B SE 462717 B SE462717 B SE 462717B SE 8402504 A SE8402504 A SE 8402504A SE 8402504 A SE8402504 A SE 8402504A SE 462717 B SE462717 B SE 462717B
Authority
SE
Sweden
Prior art keywords
tube
auxiliary electrode
wall
pipe
treating
Prior art date
Application number
SE8402504A
Other languages
English (en)
Swedish (sv)
Other versions
SE8402504D0 (sv
SE8402504L (sv
Inventor
E Moll
R Buhl
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Publication of SE8402504D0 publication Critical patent/SE8402504D0/xx
Publication of SE8402504L publication Critical patent/SE8402504L/
Publication of SE462717B publication Critical patent/SE462717B/sv

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Vapour Deposition (AREA)
  • Heat Treatment Of Articles (AREA)
SE8402504A 1983-05-10 1984-05-09 Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning SE462717B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH2544/83A CH659346A5 (de) 1983-05-10 1983-05-10 Vorrichtung zum behandeln der innenwand eines rohres.

Publications (3)

Publication Number Publication Date
SE8402504D0 SE8402504D0 (sv) 1984-05-09
SE8402504L SE8402504L (sv) 1984-11-11
SE462717B true SE462717B (sv) 1990-08-20

Family

ID=4236183

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8402504A SE462717B (sv) 1983-05-10 1984-05-09 Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning

Country Status (10)

Country Link
US (1) US4598663A (el)
JP (1) JPS59226175A (el)
CH (1) CH659346A5 (el)
DE (1) DE3408053A1 (el)
FR (1) FR2546023A1 (el)
GB (1) GB2145434B (el)
IT (1) IT1175473B (el)
NL (1) NL8401160A (el)
SE (1) SE462717B (el)
ZA (1) ZA843411B (el)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663455A5 (de) * 1984-04-19 1987-12-15 Balzers Hochvakuum Rohr mit einer innenbeschichtung.
WO1998011270A1 (de) * 1996-09-13 1998-03-19 Euromat Gmbh Verfahren und vorrichtung zum innenbeschichten metallischer bauteile

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE526527A (el) * 1953-02-17
CH349284A (de) * 1955-11-22 1960-10-15 Berghaus Elektrophysik Anst Verfahren und Vorrichtung zur Behandlung der Oberfläche von Körpern
GB915568A (en) * 1960-09-23 1963-01-16 Gen Electric Co Ltd Improvements in or relating to the formation of thin films
ZA755786B (en) * 1974-10-07 1976-08-25 Baxter Laboratories Inc Diagnostic electrode assembly
AU507748B2 (en) * 1976-06-10 1980-02-28 University Of Sydney, The Reactive sputtering
NL7607473A (nl) * 1976-07-07 1978-01-10 Philips Nv Verstuifinrichting en werkwijze voor het ver- stuiven met een dergelijke inrichting.
DE2820301B2 (de) * 1978-05-10 1980-11-06 Messerschmitt-Boelkow-Blohm Gmbh, 8000 Muenchen Anordnung zur Innenbeschichtung von Rohren
US4262035A (en) * 1980-03-07 1981-04-14 Bell Telephone Laboratories, Incorporated Modified chemical vapor deposition of an optical fiber using an rf plasma
DE3010314C2 (de) * 1980-03-18 1982-01-07 Beerwald, Hans, Dr.Rer.Nat., 5370 Kall Verfahren zur innenbeschichtung von elektrisch nicht leitfähigen Rohren mittels Gasentladungen
US4419202A (en) * 1980-12-22 1983-12-06 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Metal coatings
US4418645A (en) * 1982-03-26 1983-12-06 Xerox Corporation Glow discharge apparatus with squirrel cage electrode
US4508748A (en) * 1983-01-05 1985-04-02 Xis, Incorporated Manufacturing process for selenium photoreceptors

Also Published As

Publication number Publication date
IT8420448A0 (it) 1984-04-09
DE3408053A1 (de) 1984-11-15
GB2145434A (en) 1985-03-27
IT8420448A1 (it) 1985-10-09
ZA843411B (en) 1985-08-28
DE3408053C2 (el) 1988-09-29
CH659346A5 (de) 1987-01-15
FR2546023A1 (fr) 1984-11-16
JPS59226175A (ja) 1984-12-19
IT1175473B (it) 1987-07-01
GB2145434B (en) 1987-01-14
SE8402504D0 (sv) 1984-05-09
GB8411268D0 (en) 1984-06-06
SE8402504L (sv) 1984-11-11
US4598663A (en) 1986-07-08
NL8401160A (nl) 1984-12-03

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