SE439376B - Forfarande och anordning for metning av en egenskap hos en tunn film - Google Patents

Forfarande och anordning for metning av en egenskap hos en tunn film

Info

Publication number
SE439376B
SE439376B SE7703750A SE7703750A SE439376B SE 439376 B SE439376 B SE 439376B SE 7703750 A SE7703750 A SE 7703750A SE 7703750 A SE7703750 A SE 7703750A SE 439376 B SE439376 B SE 439376B
Authority
SE
Sweden
Prior art keywords
seating
property
procedure
thin film
thin
Prior art date
Application number
SE7703750A
Other languages
English (en)
Swedish (sv)
Other versions
SE7703750L (sv
Inventor
P Williams
J F Pugh
Original Assignee
Accuray Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Accuray Corp filed Critical Accuray Corp
Publication of SE7703750L publication Critical patent/SE7703750L/
Publication of SE439376B publication Critical patent/SE439376B/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/86—Investigating moving sheets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
SE7703750A 1976-04-05 1977-03-31 Forfarande och anordning for metning av en egenskap hos en tunn film SE439376B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/673,534 US4027161A (en) 1976-04-05 1976-04-05 Minimizing wave interference effects on the measurement of thin films having specular surfaces using infrared radiation

Publications (2)

Publication Number Publication Date
SE7703750L SE7703750L (sv) 1977-10-06
SE439376B true SE439376B (sv) 1985-06-10

Family

ID=24703045

Family Applications (2)

Application Number Title Priority Date Filing Date
SE7703750A SE439376B (sv) 1976-04-05 1977-03-31 Forfarande och anordning for metning av en egenskap hos en tunn film
SE8104527A SE447164B (sv) 1976-04-05 1981-07-24 Anordning for metning av en egenskap hos en tunn film

Family Applications After (1)

Application Number Title Priority Date Filing Date
SE8104527A SE447164B (sv) 1976-04-05 1981-07-24 Anordning for metning av en egenskap hos en tunn film

Country Status (7)

Country Link
US (1) US4027161A (xx)
CA (1) CA1080504A (xx)
DE (1) DE2714397A1 (xx)
FR (1) FR2347677A1 (xx)
GB (1) GB1573263A (xx)
IT (1) IT1076132B (xx)
SE (2) SE439376B (xx)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2016678B (en) * 1978-03-10 1982-09-15 Asahi Dow Ltd Infrared multilayer film thickness measuring method and apparatus
JPS5535214A (en) * 1978-09-04 1980-03-12 Asahi Chem Ind Co Ltd Method and device for film-thickness measurement making use of infrared-ray interference
GB2046432B (en) * 1979-04-09 1983-05-11 Infrared Eng Ltd Apparatus for determining the thickness moisture content or other parameter of a film or coating
JPS57101709A (en) * 1980-12-17 1982-06-24 Fuji Electric Co Ltd Film thickness gauge with infrared ray
US4422766A (en) * 1981-07-27 1983-12-27 Ppg Industries, Inc. Method of and device for reducing apparatus response time during the testing for moisture content in moving spaced plastic sheets
FI69370C (fi) * 1981-08-18 1986-01-10 Topwave Instr Oy Foerfarande foer maetning av egenskaperna hos ett plastskikt med hjaelp av infraroed straolning
US4631408A (en) * 1984-09-24 1986-12-23 Kollmorgen Technologies Corporation Method of simultaneously determining gauge and orientation of polymer films
JPS62232506A (ja) * 1986-04-01 1987-10-13 Chugai Ro Kogyo Kaisha Ltd 表面層厚測定装置
US4733078A (en) * 1986-08-25 1988-03-22 Accuray Corporation Measurement of moisture-stratified sheet material
US4823008A (en) * 1987-11-05 1989-04-18 Process Automation Business, Inc. Apparatus and methods employing infrared absorption means to measure the moisture content of heavy grades of paper
CA2038704C (en) * 1990-04-26 1996-01-30 Ryuji Chiba Infrared ray moisture meter
US5506407A (en) * 1993-12-21 1996-04-09 Minnesota Mining & Manufacturing Company High resolution high speed film measuring apparatus and method
US5705804A (en) * 1996-01-23 1998-01-06 Science Applications International Corporation Quadrant light detector
US6238077B1 (en) 1996-01-23 2001-05-29 Advanced Optical Technologies, L.L.C. Apparatus for projecting electromagnetic radiation with a tailored intensity distribution
US5773819A (en) * 1996-01-23 1998-06-30 Advanced Optical Technologies, Llc. Single element light detector
US5733028A (en) * 1996-01-23 1998-03-31 Advanced Optical Technologies, Llc. Apparatus for projecting electromagnetic radiation with a tailored intensity distribution
US6043873A (en) * 1997-01-10 2000-03-28 Advanced Optical Technologies, Llc Position tracking system
US6960769B2 (en) * 2002-10-03 2005-11-01 Abb Inc. Infrared measuring apparatus and method for on-line application in manufacturing processes
DE102006057727A1 (de) * 2006-12-07 2008-06-12 Brückner Maschinenbau GmbH Verfahren zur Messung der Doppelbrechung und/oder der Retardation, insbesondere an zumindest teiltransparenten Folien sowie zugehörige Vorrichtung
DE102015102997A1 (de) * 2015-03-02 2016-09-08 BST ProControl GmbH Verfahren und Vorrichtung zum Messen von im Wesentlichen in zwei Dimensionen ausgedehntem Messgut

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2821103A (en) * 1952-10-30 1958-01-28 Centre Nat Rech Scient Micro-photometry
US3455637A (en) * 1964-08-07 1969-07-15 Giannini Controls Corp Method and apparatus for measuring the opacity of sheet material
US3476482A (en) * 1967-09-27 1969-11-04 Conrac Corp Opacimeter for comparing light from different areas of sample sheet
US3631526A (en) * 1969-11-05 1971-12-28 Brun Sensor Systems Inc Apparatus and methods for eliminating interference effect errors in dual-beam infrared measurements
GB1382081A (en) * 1972-03-14 1975-01-29 Ici Ltd Transmission spectra
US3863071A (en) * 1972-06-08 1975-01-28 Infra Systems Inc Infrared measuring system with channel spectra negation
US3793524A (en) * 1972-09-05 1974-02-19 Measurex Corp Apparatus for measuring a characteristic of sheet materials
US3870884A (en) * 1973-08-24 1975-03-11 Infra Systems Inc Apparatus for negating effect of scattered signals upon accuracy of dual-beam infrared measurements

Also Published As

Publication number Publication date
FR2347677B1 (xx) 1982-01-29
SE8104527L (sv) 1981-07-24
CA1080504A (en) 1980-07-01
SE447164B (sv) 1986-10-27
US4027161A (en) 1977-05-31
DE2714397A1 (de) 1977-10-13
SE7703750L (sv) 1977-10-06
IT1076132B (it) 1985-04-24
FR2347677A1 (fr) 1977-11-04
GB1573263A (en) 1980-08-20

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