SE422510B - Anordning i med laddningsberstralar arbetande elektriska vakuumapparater - Google Patents

Anordning i med laddningsberstralar arbetande elektriska vakuumapparater

Info

Publication number
SE422510B
SE422510B SE7709301A SE7709301A SE422510B SE 422510 B SE422510 B SE 422510B SE 7709301 A SE7709301 A SE 7709301A SE 7709301 A SE7709301 A SE 7709301A SE 422510 B SE422510 B SE 422510B
Authority
SE
Sweden
Prior art keywords
breathers
charging
vacuum devices
electrical vacuum
working electrical
Prior art date
Application number
SE7709301A
Other languages
English (en)
Swedish (sv)
Other versions
SE7709301L (sv
Inventor
U Maixner
D Milferstedt
Original Assignee
Geesthacht Gkss Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Geesthacht Gkss Forschung filed Critical Geesthacht Gkss Forschung
Publication of SE7709301L publication Critical patent/SE7709301L/
Publication of SE422510B publication Critical patent/SE422510B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/40—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
SE7709301A 1976-08-30 1977-08-18 Anordning i med laddningsberstralar arbetande elektriska vakuumapparater SE422510B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2639033A DE2639033C3 (de) 1976-08-30 1976-08-30 Bauteil in mit Ladungsträgerstrahlen arbeitenden elektrischen Vakuumgeräten und Verfahren zu dessen Herstellung

Publications (2)

Publication Number Publication Date
SE7709301L SE7709301L (sv) 1978-03-01
SE422510B true SE422510B (sv) 1982-03-08

Family

ID=5986722

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7709301A SE422510B (sv) 1976-08-30 1977-08-18 Anordning i med laddningsberstralar arbetande elektriska vakuumapparater

Country Status (7)

Country Link
US (1) US4123655A (nl)
JP (1) JPS5329793A (nl)
DE (1) DE2639033C3 (nl)
FR (1) FR2363183A1 (nl)
GB (1) GB1592573A (nl)
NL (1) NL186281C (nl)
SE (1) SE422510B (nl)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205232A (en) * 1977-08-24 1980-05-27 Gesellschaft Fur Kernenergieverwertung In Schiffbau Und Schiffahrt Mbh Arrangement for preventing the alteration of the primary beam by unwanted particles, such as sputter products, charged ions and electrons and their secondary processes
DE2831791C2 (de) * 1978-07-19 1982-09-09 Gkss - Forschungszentrum Geesthacht Gmbh, 2000 Hamburg Bauteil aus metallischem Werkstoff mit aufladungsgefährdeter Oberfläche und Verwendung hierfür
DE2848538C2 (de) * 1978-11-09 1986-10-09 Leybold-Heraeus GmbH, 5000 Köln Elektronen- oder ionenoptische Einrichtung
US20060196853A1 (en) * 2005-03-04 2006-09-07 The Regents Of The University Of California Micro-joining using electron beams
CN1988052B (zh) * 2006-12-14 2010-05-19 上海交通大学 粒子束流截面直径控制器件及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL152898B (nl) * 1950-04-12 Grace Gmbh Microporeuze, plaatvormige kunstharsvoorwerpen, alsmede werkwijze voor de vervaardiging hiervan.
FR1087364A (fr) * 1953-07-24 1955-02-23 Radio Ind Perfectionnements aux tubes à vide
NL7009601A (nl) * 1970-06-30 1972-01-03
FR2162065B1 (nl) * 1971-11-30 1977-08-26 Hitachi Ltd
IT1009545B (it) * 1974-01-07 1976-12-20 Getters Spa Struttura a trappola per intercet tare elettroni e particelle elet tricamente cariche

Also Published As

Publication number Publication date
SE7709301L (sv) 1978-03-01
DE2639033A1 (de) 1978-03-02
NL186281C (nl) 1990-10-16
GB1592573A (en) 1981-07-08
DE2639033B2 (de) 1980-10-16
NL186281B (nl) 1990-05-16
NL7708846A (nl) 1978-03-02
FR2363183B1 (nl) 1982-11-05
FR2363183A1 (fr) 1978-03-24
JPS6342225B2 (nl) 1988-08-22
US4123655A (en) 1978-10-31
JPS5329793A (en) 1978-03-20
DE2639033C3 (de) 1981-07-23

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