SE414833B - Anordning foer att detektera platsen foer en elektronstrole i foerhallande till inraettningsmarkeringar pa t ex en halvledarskiva - Google Patents

Anordning foer att detektera platsen foer en elektronstrole i foerhallande till inraettningsmarkeringar pa t ex en halvledarskiva

Info

Publication number
SE414833B
SE414833B SE7707933-3A SE7707933A SE414833B SE 414833 B SE414833 B SE 414833B SE 7707933 A SE7707933 A SE 7707933A SE 414833 B SE414833 B SE 414833B
Authority
SE
Sweden
Prior art keywords
facilitation
markings
presentation
site
detecting
Prior art date
Application number
SE7707933-3A
Other languages
English (en)
Swedish (sv)
Other versions
SE7707933L (sv
Inventor
D E Davis
M A Habegger
H S Yourke
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of SE7707933L publication Critical patent/SE7707933L/xx
Publication of SE414833B publication Critical patent/SE414833B/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/39—Scanning a visible indication of the measured value and reproducing this indication at the remote place, e.g. on the screen of a cathode ray tube

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Beam Exposure (AREA)
SE7707933-3A 1976-07-12 1977-07-07 Anordning foer att detektera platsen foer en elektronstrole i foerhallande till inraettningsmarkeringar pa t ex en halvledarskiva SE414833B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US70460576A 1976-07-12 1976-07-12

Publications (2)

Publication Number Publication Date
SE7707933L SE7707933L (sv) 1978-01-13
SE414833B true SE414833B (sv) 1980-08-18

Family

ID=24830188

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7707933-3A SE414833B (sv) 1976-07-12 1977-07-07 Anordning foer att detektera platsen foer en elektronstrole i foerhallande till inraettningsmarkeringar pa t ex en halvledarskiva

Country Status (3)

Country Link
JP (1) JPS539475A (enExample)
BR (1) BR7704576A (enExample)
SE (1) SE414833B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54107677A (en) * 1978-02-10 1979-08-23 Jeol Ltd Rotation error detection method of apperture in electronic ray exposure and its unit
JPS5512784A (en) * 1978-07-14 1980-01-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Location mark for electron beam exposure

Also Published As

Publication number Publication date
JPS539475A (en) 1978-01-27
SE7707933L (sv) 1978-01-13
JPS5343023B2 (enExample) 1978-11-16
BR7704576A (pt) 1978-04-04

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