SE363978B - - Google Patents

Info

Publication number
SE363978B
SE363978B SE12419/71A SE1241971A SE363978B SE 363978 B SE363978 B SE 363978B SE 12419/71 A SE12419/71 A SE 12419/71A SE 1241971 A SE1241971 A SE 1241971A SE 363978 B SE363978 B SE 363978B
Authority
SE
Sweden
Application number
SE12419/71A
Inventor
K Reuschel
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of SE363978B publication Critical patent/SE363978B/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • H10P14/24
    • H10P14/3411

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
SE12419/71A 1970-09-30 1971-09-30 SE363978B (cg-RX-API-DMAC10.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702048155 DE2048155A1 (de) 1970-09-30 1970-09-30 Anordnung zum Abscheiden von kri stallinem Halbleitermaterial

Publications (1)

Publication Number Publication Date
SE363978B true SE363978B (cg-RX-API-DMAC10.html) 1974-02-11

Family

ID=5783855

Family Applications (1)

Application Number Title Priority Date Filing Date
SE12419/71A SE363978B (cg-RX-API-DMAC10.html) 1970-09-30 1971-09-30

Country Status (12)

Country Link
JP (1) JPS531204B1 (cg-RX-API-DMAC10.html)
AT (1) AT321992B (cg-RX-API-DMAC10.html)
BE (1) BE764761A (cg-RX-API-DMAC10.html)
CA (1) CA960551A (cg-RX-API-DMAC10.html)
CH (1) CH561081A5 (cg-RX-API-DMAC10.html)
CS (1) CS166293B2 (cg-RX-API-DMAC10.html)
DE (1) DE2048155A1 (cg-RX-API-DMAC10.html)
FR (1) FR2108381A5 (cg-RX-API-DMAC10.html)
GB (1) GB1332583A (cg-RX-API-DMAC10.html)
NL (1) NL7108122A (cg-RX-API-DMAC10.html)
SE (1) SE363978B (cg-RX-API-DMAC10.html)
SU (1) SU493954A3 (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
SU493954A3 (ru) 1975-11-28
CS166293B2 (cg-RX-API-DMAC10.html) 1976-02-27
CH561081A5 (cg-RX-API-DMAC10.html) 1975-04-30
JPS531204B1 (cg-RX-API-DMAC10.html) 1978-01-17
NL7108122A (cg-RX-API-DMAC10.html) 1972-04-05
FR2108381A5 (cg-RX-API-DMAC10.html) 1972-05-19
DE2048155A1 (de) 1972-04-06
AT321992B (de) 1975-04-25
CA960551A (en) 1975-01-07
GB1332583A (en) 1973-10-03
BE764761A (fr) 1971-08-16

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