FR2108381A5 - - Google Patents

Info

Publication number
FR2108381A5
FR2108381A5 FR7134014A FR7134014A FR2108381A5 FR 2108381 A5 FR2108381 A5 FR 2108381A5 FR 7134014 A FR7134014 A FR 7134014A FR 7134014 A FR7134014 A FR 7134014A FR 2108381 A5 FR2108381 A5 FR 2108381A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7134014A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Application granted granted Critical
Publication of FR2108381A5 publication Critical patent/FR2108381A5/fr
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • H10P14/24
    • H10P14/3411

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
FR7134014A 1970-09-30 1971-09-22 Expired FR2108381A5 (cg-RX-API-DMAC10.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702048155 DE2048155A1 (de) 1970-09-30 1970-09-30 Anordnung zum Abscheiden von kri stallinem Halbleitermaterial

Publications (1)

Publication Number Publication Date
FR2108381A5 true FR2108381A5 (cg-RX-API-DMAC10.html) 1972-05-19

Family

ID=5783855

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7134014A Expired FR2108381A5 (cg-RX-API-DMAC10.html) 1970-09-30 1971-09-22

Country Status (12)

Country Link
JP (1) JPS531204B1 (cg-RX-API-DMAC10.html)
AT (1) AT321992B (cg-RX-API-DMAC10.html)
BE (1) BE764761A (cg-RX-API-DMAC10.html)
CA (1) CA960551A (cg-RX-API-DMAC10.html)
CH (1) CH561081A5 (cg-RX-API-DMAC10.html)
CS (1) CS166293B2 (cg-RX-API-DMAC10.html)
DE (1) DE2048155A1 (cg-RX-API-DMAC10.html)
FR (1) FR2108381A5 (cg-RX-API-DMAC10.html)
GB (1) GB1332583A (cg-RX-API-DMAC10.html)
NL (1) NL7108122A (cg-RX-API-DMAC10.html)
SE (1) SE363978B (cg-RX-API-DMAC10.html)
SU (1) SU493954A3 (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
SU493954A3 (ru) 1975-11-28
CS166293B2 (cg-RX-API-DMAC10.html) 1976-02-27
CH561081A5 (cg-RX-API-DMAC10.html) 1975-04-30
JPS531204B1 (cg-RX-API-DMAC10.html) 1978-01-17
NL7108122A (cg-RX-API-DMAC10.html) 1972-04-05
DE2048155A1 (de) 1972-04-06
AT321992B (de) 1975-04-25
CA960551A (en) 1975-01-07
GB1332583A (en) 1973-10-03
SE363978B (cg-RX-API-DMAC10.html) 1974-02-11
BE764761A (fr) 1971-08-16

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Legal Events

Date Code Title Description
ST Notification of lapse