JPS531204B1 - - Google Patents
Info
- Publication number
- JPS531204B1 JPS531204B1 JP11885770A JP11885770A JPS531204B1 JP S531204 B1 JPS531204 B1 JP S531204B1 JP 11885770 A JP11885770 A JP 11885770A JP 11885770 A JP11885770 A JP 11885770A JP S531204 B1 JPS531204 B1 JP S531204B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- H10P14/24—
-
- H10P14/3411—
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702048155 DE2048155A1 (de) | 1970-09-30 | 1970-09-30 | Anordnung zum Abscheiden von kri stallinem Halbleitermaterial |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS531204B1 true JPS531204B1 (cg-RX-API-DMAC10.html) | 1978-01-17 |
Family
ID=5783855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11885770A Pending JPS531204B1 (cg-RX-API-DMAC10.html) | 1970-09-30 | 1970-12-26 |
Country Status (12)
| Country | Link |
|---|---|
| JP (1) | JPS531204B1 (cg-RX-API-DMAC10.html) |
| AT (1) | AT321992B (cg-RX-API-DMAC10.html) |
| BE (1) | BE764761A (cg-RX-API-DMAC10.html) |
| CA (1) | CA960551A (cg-RX-API-DMAC10.html) |
| CH (1) | CH561081A5 (cg-RX-API-DMAC10.html) |
| CS (1) | CS166293B2 (cg-RX-API-DMAC10.html) |
| DE (1) | DE2048155A1 (cg-RX-API-DMAC10.html) |
| FR (1) | FR2108381A5 (cg-RX-API-DMAC10.html) |
| GB (1) | GB1332583A (cg-RX-API-DMAC10.html) |
| NL (1) | NL7108122A (cg-RX-API-DMAC10.html) |
| SE (1) | SE363978B (cg-RX-API-DMAC10.html) |
| SU (1) | SU493954A3 (cg-RX-API-DMAC10.html) |
-
1970
- 1970-09-30 DE DE19702048155 patent/DE2048155A1/de active Pending
- 1970-12-26 JP JP11885770A patent/JPS531204B1/ja active Pending
-
1971
- 1971-03-24 BE BE764761A patent/BE764761A/xx unknown
- 1971-06-14 NL NL7108122A patent/NL7108122A/xx unknown
- 1971-06-15 CH CH867771A patent/CH561081A5/xx not_active IP Right Cessation
- 1971-07-26 GB GB3490371A patent/GB1332583A/en not_active Expired
- 1971-07-30 AT AT668071A patent/AT321992B/de not_active IP Right Cessation
- 1971-09-01 SU SU1693800A patent/SU493954A3/ru active
- 1971-09-22 FR FR7134014A patent/FR2108381A5/fr not_active Expired
- 1971-09-28 CS CS6893A patent/CS166293B2/cs unknown
- 1971-09-29 CA CA123,971A patent/CA960551A/en not_active Expired
- 1971-09-30 SE SE12419/71A patent/SE363978B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SU493954A3 (ru) | 1975-11-28 |
| CS166293B2 (cg-RX-API-DMAC10.html) | 1976-02-27 |
| CH561081A5 (cg-RX-API-DMAC10.html) | 1975-04-30 |
| NL7108122A (cg-RX-API-DMAC10.html) | 1972-04-05 |
| FR2108381A5 (cg-RX-API-DMAC10.html) | 1972-05-19 |
| DE2048155A1 (de) | 1972-04-06 |
| AT321992B (de) | 1975-04-25 |
| CA960551A (en) | 1975-01-07 |
| GB1332583A (en) | 1973-10-03 |
| SE363978B (cg-RX-API-DMAC10.html) | 1974-02-11 |
| BE764761A (fr) | 1971-08-16 |