SE362015B - - Google Patents

Info

Publication number
SE362015B
SE362015B SE09510/71A SE951071A SE362015B SE 362015 B SE362015 B SE 362015B SE 09510/71 A SE09510/71 A SE 09510/71A SE 951071 A SE951071 A SE 951071A SE 362015 B SE362015 B SE 362015B
Authority
SE
Sweden
Application number
SE09510/71A
Inventor
R L Meek
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of SE362015B publication Critical patent/SE362015B/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3063Electrolytic etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/914Doping
    • Y10S438/924To facilitate selective etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
  • Drying Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
SE09510/71A 1970-07-31 1971-07-23 SE362015B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US5997770A 1970-07-31 1970-07-31

Publications (1)

Publication Number Publication Date
SE362015B true SE362015B (de) 1973-11-26

Family

ID=22026542

Family Applications (1)

Application Number Title Priority Date Filing Date
SE09510/71A SE362015B (de) 1970-07-31 1971-07-23

Country Status (11)

Country Link
US (1) US3642593A (de)
JP (1) JPS517980B1 (de)
AU (1) AU432312B2 (de)
BE (1) BE770538A (de)
CH (1) CH530093A (de)
ES (1) ES394152A1 (de)
FR (1) FR2099721B1 (de)
GB (1) GB1307030A (de)
IE (1) IE35540B1 (de)
NL (1) NL152705B (de)
SE (1) SE362015B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4554059A (en) * 1983-11-04 1985-11-19 Harris Corporation Electrochemical dielectric isolation technique
EP0309782B1 (de) * 1987-09-30 1994-06-01 Siemens Aktiengesellschaft Verfahren zum Ätzen von (100) Silizium
US5136344A (en) * 1988-11-02 1992-08-04 Universal Energy Systems, Inc. High energy ion implanted silicon on insulator structure
US5702586A (en) * 1994-06-28 1997-12-30 The United States Of America As Represented By The Secretary Of The Navy Polishing diamond surface

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USB421061I5 (de) * 1964-12-24
NL153947B (nl) * 1967-02-25 1977-07-15 Philips Nv Werkwijze voor het vervaardigen van halfgeleiderinrichtingen, waarbij een selectief elektrolytisch etsproces wordt toegepast en halfgeleiderinrichting verkregen met toepassing van de werkwijze.
US3523042A (en) * 1967-12-26 1970-08-04 Hughes Aircraft Co Method of making bipolar transistor devices

Also Published As

Publication number Publication date
DE2137423B2 (de) 1973-10-31
DE2137423A1 (de) 1972-02-03
ES394152A1 (es) 1974-04-01
AU3165371A (en) 1973-02-01
FR2099721A1 (de) 1972-03-17
CH530093A (de) 1972-10-31
GB1307030A (en) 1973-02-14
FR2099721B1 (de) 1977-08-05
US3642593A (en) 1972-02-15
IE35540B1 (en) 1976-03-18
NL152705B (nl) 1977-03-15
NL7110572A (de) 1972-02-02
IE35540L (en) 1972-01-31
AU432312B2 (en) 1973-02-22
JPS517980B1 (de) 1976-03-12
BE770538A (fr) 1971-12-01

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