SE359688B - - Google Patents

Info

Publication number
SE359688B
SE359688B SE08448/71A SE844871A SE359688B SE 359688 B SE359688 B SE 359688B SE 08448/71 A SE08448/71 A SE 08448/71A SE 844871 A SE844871 A SE 844871A SE 359688 B SE359688 B SE 359688B
Authority
SE
Sweden
Application number
SE08448/71A
Inventor
R Horwath
V Sadagopan
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of SE359688B publication Critical patent/SE359688B/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/943—Movable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/945—Special, e.g. metal

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
SE08448/71A 1970-06-30 1971-06-30 SE359688B (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US5123770A 1970-06-30 1970-06-30

Publications (1)

Publication Number Publication Date
SE359688B true SE359688B (ja) 1973-09-03

Family

ID=21970124

Family Applications (1)

Application Number Title Priority Date Filing Date
SE08448/71A SE359688B (ja) 1970-06-30 1971-06-30

Country Status (7)

Country Link
US (1) US3661436A (ja)
JP (1) JPS513631B1 (ja)
CA (1) CA939548A (ja)
DE (1) DE2123887A1 (ja)
FR (1) FR2095598A5 (ja)
GB (1) GB1330915A (ja)
SE (1) SE359688B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3895147A (en) * 1971-12-27 1975-07-15 Ibm Fabrication mask using divalent rare earth element
US3816223A (en) * 1971-12-27 1974-06-11 Ibm Fabrication mask using rare earth orthoferrites
US3857689A (en) * 1971-12-28 1974-12-31 Nippon Selfoc Co Ltd Ion exchange process for manufacturing integrated optical circuits
US3815978A (en) * 1972-06-20 1974-06-11 Ibm Durable see-through photoresist mask
US4600481A (en) * 1982-12-30 1986-07-15 Eltech Systems Corporation Aluminum production cell components
US4884870A (en) * 1988-10-17 1989-12-05 Chrysler Motors Corporation Lens structure for a vehicle radio or the like
US4884872A (en) * 1988-10-27 1989-12-05 Chrysler Motors Corporation Lens structure for a combined radio/audio tape cassette player or the like
EP1373151A1 (en) * 2001-02-24 2004-01-02 Corning Incorporated Oxygen doping of silicon oxyfluoride glass
US7818875B2 (en) * 2005-12-07 2010-10-26 Hitachi Global Storage Technologies Netherlands B.V. Method of manufacturing a magnetic head with integration of a small flash field, zero bias, and non-reactive ion milling for pole tip uniformity

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3135823A (en) * 1960-06-28 1964-06-02 Pritikin Nathan Metallic element embedding process and product
US3498833A (en) * 1966-07-08 1970-03-03 Fairchild Camera Instr Co Double masking technique for integrated circuit
US3508982A (en) * 1967-01-03 1970-04-28 Itt Method of making an ultra-violet selective template
US3510371A (en) * 1967-01-25 1970-05-05 Itt Method of making an ultraviolet sensitive template

Also Published As

Publication number Publication date
DE2123887C3 (ja) 1979-09-06
GB1330915A (en) 1973-09-19
DE2123887A1 (de) 1972-01-05
CA939548A (en) 1974-01-08
US3661436A (en) 1972-05-09
JPS513631B1 (ja) 1976-02-04
FR2095598A5 (ja) 1972-02-11
DE2123887B2 (ja) 1979-01-11

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