JPS513631B1 - - Google Patents
Info
- Publication number
- JPS513631B1 JPS513631B1 JP46034183A JP3418371A JPS513631B1 JP S513631 B1 JPS513631 B1 JP S513631B1 JP 46034183 A JP46034183 A JP 46034183A JP 3418371 A JP3418371 A JP 3418371A JP S513631 B1 JPS513631 B1 JP S513631B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/943—Movable
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/945—Special, e.g. metal
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US5123770A | 1970-06-30 | 1970-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS513631B1 true JPS513631B1 (ja) | 1976-02-04 |
Family
ID=21970124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46034183A Pending JPS513631B1 (ja) | 1970-06-30 | 1971-05-21 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3661436A (ja) |
| JP (1) | JPS513631B1 (ja) |
| CA (1) | CA939548A (ja) |
| DE (1) | DE2123887A1 (ja) |
| FR (1) | FR2095598A5 (ja) |
| GB (1) | GB1330915A (ja) |
| SE (1) | SE359688B (ja) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3816223A (en) * | 1971-12-27 | 1974-06-11 | Ibm | Fabrication mask using rare earth orthoferrites |
| US3895147A (en) * | 1971-12-27 | 1975-07-15 | Ibm | Fabrication mask using divalent rare earth element |
| US3857689A (en) * | 1971-12-28 | 1974-12-31 | Nippon Selfoc Co Ltd | Ion exchange process for manufacturing integrated optical circuits |
| US3815978A (en) * | 1972-06-20 | 1974-06-11 | Ibm | Durable see-through photoresist mask |
| US4600481A (en) * | 1982-12-30 | 1986-07-15 | Eltech Systems Corporation | Aluminum production cell components |
| US4884870A (en) * | 1988-10-17 | 1989-12-05 | Chrysler Motors Corporation | Lens structure for a vehicle radio or the like |
| US4884872A (en) * | 1988-10-27 | 1989-12-05 | Chrysler Motors Corporation | Lens structure for a combined radio/audio tape cassette player or the like |
| EP1373151A1 (en) * | 2001-02-24 | 2004-01-02 | Corning Incorporated | Oxygen doping of silicon oxyfluoride glass |
| US7818875B2 (en) * | 2005-12-07 | 2010-10-26 | Hitachi Global Storage Technologies Netherlands B.V. | Method of manufacturing a magnetic head with integration of a small flash field, zero bias, and non-reactive ion milling for pole tip uniformity |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1549926A (ja) * | 1967-01-03 | 1968-12-13 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3135823A (en) * | 1960-06-28 | 1964-06-02 | Pritikin Nathan | Metallic element embedding process and product |
| US3498833A (en) * | 1966-07-08 | 1970-03-03 | Fairchild Camera Instr Co | Double masking technique for integrated circuit |
| US3510371A (en) * | 1967-01-25 | 1970-05-05 | Itt | Method of making an ultraviolet sensitive template |
-
1970
- 1970-06-30 US US51237A patent/US3661436A/en not_active Expired - Lifetime
-
1971
- 1971-05-06 FR FR7118047A patent/FR2095598A5/fr not_active Expired
- 1971-05-13 GB GB1482471*[A patent/GB1330915A/en not_active Expired
- 1971-05-14 DE DE19712123887 patent/DE2123887A1/de active Granted
- 1971-05-21 CA CA113,584A patent/CA939548A/en not_active Expired
- 1971-05-21 JP JP46034183A patent/JPS513631B1/ja active Pending
- 1971-06-30 SE SE08448/71A patent/SE359688B/xx unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1549926A (ja) * | 1967-01-03 | 1968-12-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2123887B2 (ja) | 1979-01-11 |
| DE2123887A1 (de) | 1972-01-05 |
| GB1330915A (en) | 1973-09-19 |
| FR2095598A5 (ja) | 1972-02-11 |
| US3661436A (en) | 1972-05-09 |
| DE2123887C3 (ja) | 1979-09-06 |
| CA939548A (en) | 1974-01-08 |
| SE359688B (ja) | 1973-09-03 |