SE356139B - - Google Patents

Info

Publication number
SE356139B
SE356139B SE08358/68A SE835868A SE356139B SE 356139 B SE356139 B SE 356139B SE 08358/68 A SE08358/68 A SE 08358/68A SE 835868 A SE835868 A SE 835868A SE 356139 B SE356139 B SE 356139B
Authority
SE
Sweden
Application number
SE08358/68A
Inventor
F Genovese
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of SE356139B publication Critical patent/SE356139B/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/50—Projection printing apparatus, e.g. enlarger, copying camera with slit or like diaphragm moving over original for progressive exposure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Systems Of Projection Type Copiers (AREA)
  • Variable Magnification In Projection-Type Copying Machines (AREA)
SE08358/68A 1967-06-26 1968-06-19 SE356139B (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64876967A 1967-06-26 1967-06-26

Publications (1)

Publication Number Publication Date
SE356139B true SE356139B (xx) 1973-05-14

Family

ID=24602152

Family Applications (1)

Application Number Title Priority Date Filing Date
SE08358/68A SE356139B (xx) 1967-06-26 1968-06-19

Country Status (7)

Country Link
US (1) US3538828A (xx)
CH (1) CH470687A (xx)
DE (1) DE1772681A1 (xx)
FR (1) FR1571722A (xx)
GB (1) GB1236816A (xx)
NL (1) NL6808524A (xx)
SE (1) SE356139B (xx)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2413551C2 (de) * 1974-03-21 1985-03-21 Western Electric Co., Inc., New York, N.Y. Einrichtung zum Korrigieren der Lage einer lichtempfindlichen Fläche in einer Masken-Projektionsvorrichtung
US4940641A (en) * 1988-02-17 1990-07-10 The Gerber Scientific Instrument Company Aperture disc and method of making the same
US4924257A (en) * 1988-10-05 1990-05-08 Kantilal Jain Scan and repeat high resolution projection lithography system
US5477304A (en) * 1992-10-22 1995-12-19 Nikon Corporation Projection exposure apparatus
EP0614124A3 (en) * 1993-02-01 1994-12-14 Nippon Kogaku Kk Exposure device.
US6078381A (en) 1993-02-01 2000-06-20 Nikon Corporation Exposure method and apparatus
US5854671A (en) 1993-05-28 1998-12-29 Nikon Corporation Scanning exposure method and apparatus therefor and a projection exposure apparatus and method which selectively chooses between static exposure and scanning exposure
KR100296778B1 (ko) 1993-06-11 2001-10-24 오노 시게오 노광장치및그장치를사용하는소자제조방법
US5777724A (en) * 1994-08-24 1998-07-07 Suzuki; Kazuaki Exposure amount control device

Also Published As

Publication number Publication date
NL6808524A (xx) 1968-12-27
US3538828A (en) 1970-11-10
GB1236816A (en) 1971-06-23
FR1571722A (xx) 1969-06-20
DE1772681A1 (de) 1971-05-27
CH470687A (de) 1969-03-31

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