SE343705B - - Google Patents
Info
- Publication number
- SE343705B SE343705B SE13847/67A SE1384767A SE343705B SE 343705 B SE343705 B SE 343705B SE 13847/67 A SE13847/67 A SE 13847/67A SE 1384767 A SE1384767 A SE 1384767A SE 343705 B SE343705 B SE 343705B
- Authority
- SE
- Sweden
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
- G05D3/20—Control of position or direction using feedback using a digital comparing device
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/04—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/04—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam
- G11C13/042—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam using information stored in the form of interference pattern
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Optical Recording Or Reproduction (AREA)
- Light Sources And Details Of Projection-Printing Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US60880967A | 1967-01-12 | 1967-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE343705B true SE343705B (xx) | 1972-03-13 |
Family
ID=24438098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE13847/67A SE343705B (xx) | 1967-01-12 | 1967-10-10 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3541338A (xx) |
| BE (1) | BE703319A (xx) |
| CH (1) | CH476348A (xx) |
| DE (1) | DE1549782C3 (xx) |
| ES (1) | ES345971A1 (xx) |
| FR (1) | FR1538097A (xx) |
| GB (1) | GB1138128A (xx) |
| NL (1) | NL158009B (xx) |
| SE (1) | SE343705B (xx) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3670153A (en) * | 1970-10-08 | 1972-06-13 | Rca Corp | Machine implemented method for positioning and inspecting an object |
| US4259019A (en) * | 1971-03-22 | 1981-03-31 | Kasper Instruments, Inc. | Apparatus for the automatic alignment of two superimposed objects, for example a semiconductor wafer and a transparent mask |
| US3955072A (en) * | 1971-03-22 | 1976-05-04 | Kasper Instruments, Inc. | Apparatus for the automatic alignment of two superimposed objects for example a semiconductor wafer and a transparent mask |
| US4070117A (en) * | 1972-06-12 | 1978-01-24 | Kasper Instruments, Inc. | Apparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and mask |
| DE2114496C3 (de) * | 1971-03-25 | 1981-05-07 | Texas Instruments Deutschland Gmbh, 8050 Freising | Maschine zum Befestigen von Verbindungsdrähten an mehreren Anschlußstellen eines Halbleiterbauelements und an den zugehörigen Anschlußstellen eines das Halbleiterbauelement aufnehmenden Gehäuses |
| US3838274A (en) * | 1973-03-30 | 1974-09-24 | Western Electric Co | Electro-optical article positioning system |
| US3864564A (en) * | 1973-09-26 | 1975-02-04 | Corning Glass Works | Acquisition system for slide analysis |
| US3992099A (en) * | 1973-12-12 | 1976-11-16 | Varo, Inc. | Source discriminator for measuring angle of arrival and wavelength of radiant energy |
| US4123165A (en) * | 1977-05-31 | 1978-10-31 | The United States Of America As Represented By The Secretary Of The Army | Attitude determination using two color, dual-sweeping laser system |
| US4154532A (en) * | 1978-04-20 | 1979-05-15 | The United States Of America As Represented By The Secretary Of The Navy | High precision optical alignment system |
| FR2429447A1 (fr) * | 1978-06-23 | 1980-01-18 | Thomson Csf | Systeme optique de projection muni d'un positionneur de plaque |
| US4383757A (en) * | 1979-04-02 | 1983-05-17 | Optimetrix Corporation | Optical focusing system |
| US4540278A (en) * | 1979-04-02 | 1985-09-10 | Optimetrix Corporation | Optical focusing system |
| FR2472209A1 (fr) * | 1979-12-18 | 1981-06-26 | Thomson Csf | Systeme optique d'alignement automatique de deux motifs comportant des reperes s'alignement du type reseaux, notamment en photo-repetition directe sur silicium |
| JPS58113706A (ja) * | 1981-12-26 | 1983-07-06 | Nippon Kogaku Kk <Nikon> | 水平位置検出装置 |
| US4870289A (en) * | 1987-09-25 | 1989-09-26 | Matsushita Electric Industrial Co., Ltd. | Apparatus for controlling relation in position between a photomask and a wafer |
| US4936655A (en) * | 1988-07-07 | 1990-06-26 | Grumman Aerospace Corporation | Alignment fixture for an optical instrument |
| US4993809A (en) * | 1988-10-07 | 1991-02-19 | Grumman Aerospace Corporation | Mounting fixture for an optical instrument |
| FR2661769B1 (fr) * | 1990-05-02 | 1995-04-21 | Thomson Csf | Systeme d'enregistrement optique de donnees sur disque, et procedes de lecture et ecriture correspondants. |
| GB9125603D0 (en) * | 1991-12-02 | 1992-01-29 | Gec-Marconi Limited | Optical analysis system and positioning apparatus therefor |
| US5666188A (en) * | 1994-11-29 | 1997-09-09 | Napp Systems, Inc. | Printing plate mounting device |
| US5638154A (en) * | 1994-11-29 | 1997-06-10 | Napp Systems, Inc. | Printing plate mounting device |
| US5734476A (en) * | 1996-12-31 | 1998-03-31 | Pitney Bowes Inc. | Method for dimensional weighing with optics |
| JP3159163B2 (ja) | 1998-04-06 | 2001-04-23 | 日本電気株式会社 | 走査露光方法及び走査露光装置 |
| DE102017201794B4 (de) * | 2017-02-06 | 2019-11-07 | Carl Zeiss Smt Gmbh | Prüfvorrichtung als Bestandteil eines Reflektometers zur Bestimmung einer Strahllage eines Lichtstrahls |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2998746A (en) * | 1959-10-13 | 1961-09-05 | Gievers John George | Angular measurement system |
| US3107170A (en) * | 1960-05-31 | 1963-10-15 | Netke Martin | Production of color images in sensitive emulsions |
| DE1477524A1 (de) * | 1963-07-06 | 1969-05-29 | Licentia Gmbh | Verfahren zum selbsttaetigen digitalen Positionieren von Gegenstaenden,insbesondere Maschinenteilen bzw. zu ihrer Lagemessung unter Benutzung von binaeren Codemassstaeben |
| NL301413A (xx) * | 1963-12-05 | |||
| US3403260A (en) * | 1965-03-08 | 1968-09-24 | Bell Telephone Labor Inc | Plural channel optical memory using color to discriminate among channels |
| US3324764A (en) * | 1966-08-15 | 1967-06-13 | Altman Gerald | Photographic documentary storage process and apparatus |
-
1967
- 1967-01-12 US US608809A patent/US3541338A/en not_active Expired - Lifetime
- 1967-08-29 FR FR8675A patent/FR1538097A/fr not_active Expired
- 1967-08-31 BE BE703319D patent/BE703319A/xx unknown
- 1967-09-01 NL NL6712011.A patent/NL158009B/xx unknown
- 1967-09-04 GB GB40317/67A patent/GB1138128A/en not_active Expired
- 1967-10-10 SE SE13847/67A patent/SE343705B/xx unknown
- 1967-10-11 DE DE1549782A patent/DE1549782C3/de not_active Expired
- 1967-10-11 ES ES345971A patent/ES345971A1/es not_active Expired
- 1967-10-12 CH CH1428067A patent/CH476348A/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| FR1538097A (fr) | 1968-08-30 |
| ES345971A1 (es) | 1968-12-01 |
| DE1549782B2 (de) | 1973-11-22 |
| DE1549782A1 (de) | 1971-11-18 |
| NL6712011A (xx) | 1968-07-15 |
| DE1549782C3 (de) | 1974-06-20 |
| US3541338A (en) | 1970-11-17 |
| NL158009B (nl) | 1978-09-15 |
| BE703319A (xx) | 1968-01-15 |
| GB1138128A (en) | 1968-12-27 |
| CH476348A (de) | 1969-07-31 |