SE335055B - - Google Patents

Info

Publication number
SE335055B
SE335055B SE14567/64A SE1456764A SE335055B SE 335055 B SE335055 B SE 335055B SE 14567/64 A SE14567/64 A SE 14567/64A SE 1456764 A SE1456764 A SE 1456764A SE 335055 B SE335055 B SE 335055B
Authority
SE
Sweden
Prior art keywords
plate
dec
photo
deviation
grating lines
Prior art date
Application number
SE14567/64A
Other languages
English (en)
Inventor
Lang H De
G Brouwer
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of SE335055B publication Critical patent/SE335055B/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
SE14567/64A 1963-12-05 1964-12-02 SE335055B (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL301413 1963-12-05

Publications (1)

Publication Number Publication Date
SE335055B true SE335055B (enrdf_load_stackoverflow) 1971-05-10

Family

ID=19755272

Family Applications (1)

Application Number Title Priority Date Filing Date
SE14567/64A SE335055B (enrdf_load_stackoverflow) 1963-12-05 1964-12-02

Country Status (5)

Country Link
US (1) US3354806A (enrdf_load_stackoverflow)
DE (1) DE1235725B (enrdf_load_stackoverflow)
GB (1) GB1095703A (enrdf_load_stackoverflow)
NL (1) NL301413A (enrdf_load_stackoverflow)
SE (1) SE335055B (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3541338A (en) * 1967-01-12 1970-11-17 Ibm Positioning system
US3639059A (en) * 1969-02-10 1972-02-01 Matrographics Inc Graphic-processing apparatus
US4445776A (en) * 1980-09-29 1984-05-01 High resistration photomask machine and computerized numerical control system
US3903536A (en) * 1973-11-19 1975-09-02 Gerhard Westerberg Device for generating masks for microcircuits
DE2905636C2 (de) * 1979-02-14 1985-06-20 Censor Patent- Und Versuchs-Anstalt, Vaduz Verfahren zum Kopieren von Masken auf ein Werkstück
US4346987A (en) * 1980-07-18 1982-08-31 Xerox Corporation Printed circuit board projection imaging system
JP4579376B2 (ja) * 2000-06-19 2010-11-10 キヤノン株式会社 露光装置およびデバイス製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1208407A (fr) * 1958-06-10 1960-02-23 Victor Bouzard Et Ses Fils Dispositif de commande automatique pour machines à copier photomécaniques, en particulier pour l'offset
GB1048048A (en) * 1962-11-20 1966-11-09 Rank Organisation Ltd Improvements in or relating to data processing apparatus

Also Published As

Publication number Publication date
NL301413A (enrdf_load_stackoverflow)
GB1095703A (en) 1967-12-20
US3354806A (en) 1967-11-28
DE1235725B (de) 1967-03-02

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