SE331866B - - Google Patents

Info

Publication number
SE331866B
SE331866B SE07597/65A SE759765A SE331866B SE 331866 B SE331866 B SE 331866B SE 07597/65 A SE07597/65 A SE 07597/65A SE 759765 A SE759765 A SE 759765A SE 331866 B SE331866 B SE 331866B
Authority
SE
Sweden
Prior art keywords
lenses
electron
microscope
specimen
strong
Prior art date
Application number
SE07597/65A
Other languages
English (en)
Inventor
Poole B Le
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of SE331866B publication Critical patent/SE331866B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
SE07597/65A 1964-06-11 1965-06-09 SE331866B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL646406599A NL142277B (nl) 1964-06-11 1964-06-11 Elektronenmicroscoop.

Publications (1)

Publication Number Publication Date
SE331866B true SE331866B (de) 1971-01-18

Family

ID=19790277

Family Applications (1)

Application Number Title Priority Date Filing Date
SE07597/65A SE331866B (de) 1964-06-11 1965-06-09

Country Status (8)

Country Link
US (1) US3389252A (de)
AT (1) AT256198B (de)
BE (1) BE665330A (de)
CH (1) CH445665A (de)
DE (1) DE1285636B (de)
GB (1) GB1108366A (de)
NL (1) NL142277B (de)
SE (1) SE331866B (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3869611A (en) * 1969-09-19 1975-03-04 Siemens Ag Particle-beam device of the raster type
US4042801A (en) * 1974-08-31 1977-08-16 British Aircraft Corporation Limited Electron beam apparatus
NL7812540A (nl) * 1978-12-27 1980-07-01 Philips Nv Kathodestraalbuis.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL53538C (de) * 1937-02-18
US2330930A (en) * 1941-04-30 1943-10-05 Rca Corp Scanning type of electron microscope
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens

Also Published As

Publication number Publication date
DE1285636B (de) 1968-12-19
NL142277B (nl) 1974-05-15
CH445665A (de) 1967-10-31
BE665330A (de) 1965-12-13
AT256198B (de) 1967-08-10
GB1108366A (en) 1968-04-03
NL6406599A (de) 1965-12-13
US3389252A (en) 1968-06-18

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