SE319555BSE943766ASE943766ASE319555BSE 319555 BSE319555 BSE 319555BSE 943766 ASE943766 ASE 943766ASE 943766 ASE943766 ASE 943766ASE 319555 BSE319555 BSE 319555B
Authority
SE
Sweden
Application number
SE943766A
Inventor
R Neuf
Original Assignee
Kabel Metallwerke Ghh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE1965O0011115external-prioritypatent/DE1283958B/de
Application filed by Kabel Metallwerke GhhfiledCriticalKabel Metallwerke Ghh
Publication of SE319555BpublicationCriticalpatent/SE319555B/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
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Physics & Mathematics
(AREA)
Engineering & Computer Science
(AREA)
Plasma & Fusion
(AREA)
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Testing Resistance To Weather, Investigating Materials By Mechanical Methods
(AREA)
Other Investigation Or Analysis Of Materials By Electrical Means
(AREA)