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Priority claimed from DE1965O0011115external-prioritypatent/DE1283958B/de
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Publication of BE685036ApublicationCriticalpatent/BE685036A/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
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Physics & Mathematics
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Engineering & Computer Science
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Plasma & Fusion
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Chemical & Material Sciences
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Analytical Chemistry
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Other Investigation Or Analysis Of Materials By Electrical Means
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Testing Resistance To Weather, Investigating Materials By Mechanical Methods
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