SE309072B - - Google Patents
Info
- Publication number
- SE309072B SE309072B SE1568766A SE1568766A SE309072B SE 309072 B SE309072 B SE 309072B SE 1568766 A SE1568766 A SE 1568766A SE 1568766 A SE1568766 A SE 1568766A SE 309072 B SE309072 B SE 309072B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
- H01J17/066—Cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
- H01J2893/0065—Electrode systems
- H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US50831465A | 1965-11-17 | 1965-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE309072B true SE309072B (no) | 1969-03-10 |
Family
ID=24022250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE1568766A SE309072B (no) | 1965-11-17 | 1966-11-16 |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1589006B1 (no) |
| FR (1) | FR1506614A (no) |
| GB (1) | GB1171175A (no) |
| SE (1) | SE309072B (no) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013223517A1 (de) | 2013-11-19 | 2015-06-03 | Siemens Aktiengesellschaft | Elektronenkanone und Strahlungserzeugungsanlage |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE896533C (de) * | 1939-04-12 | 1953-11-12 | Aeg | Einrichtung zur Erzeugung eines Strahles von positiven Ionen oder von Elektronen |
-
1966
- 1966-11-16 GB GB5139866A patent/GB1171175A/en not_active Expired
- 1966-11-16 SE SE1568766A patent/SE309072B/xx unknown
- 1966-11-17 DE DE1966U0013268 patent/DE1589006B1/de active Pending
- 1966-11-17 FR FR83927A patent/FR1506614A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR1506614A (fr) | 1967-12-22 |
| DE1589006B1 (de) | 1970-07-23 |
| GB1171175A (en) | 1969-11-19 |