SE0300240D0 - SLM addressing method - Google Patents
SLM addressing methodInfo
- Publication number
- SE0300240D0 SE0300240D0 SE0300240A SE0300240A SE0300240D0 SE 0300240 D0 SE0300240 D0 SE 0300240D0 SE 0300240 A SE0300240 A SE 0300240A SE 0300240 A SE0300240 A SE 0300240A SE 0300240 D0 SE0300240 D0 SE 0300240D0
- Authority
- SE
- Sweden
- Prior art keywords
- deflectable
- addressing method
- electrode
- mirror element
- modulating elements
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0300240A SE0300240D0 (sv) | 2003-01-31 | 2003-01-31 | SLM addressing method |
KR1020057012246A KR20050089083A (ko) | 2003-01-31 | 2004-01-30 | Slm 어드레싱 방법 |
PCT/SE2004/000124 WO2004068210A1 (en) | 2003-01-31 | 2004-01-30 | Slm addressing method |
CNB2004800032115A CN100492095C (zh) | 2003-01-31 | 2004-01-30 | 空间光调制器寻址方法 |
JP2006502787A JP2006520920A (ja) | 2003-01-31 | 2004-01-30 | Slmアドレス指定方法 |
EP04706912A EP1588205A1 (en) | 2003-01-31 | 2004-01-30 | Slm addressing method |
US11/188,876 US7369291B2 (en) | 2003-01-31 | 2005-07-26 | SLM addressing methods and apparatuses |
US11/980,433 US7535623B2 (en) | 2003-01-31 | 2007-10-31 | SLM addressing methods and apparatuses |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0300240A SE0300240D0 (sv) | 2003-01-31 | 2003-01-31 | SLM addressing method |
Publications (1)
Publication Number | Publication Date |
---|---|
SE0300240D0 true SE0300240D0 (sv) | 2003-01-31 |
Family
ID=20290259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE0300240A SE0300240D0 (sv) | 2003-01-31 | 2003-01-31 | SLM addressing method |
Country Status (7)
Country | Link |
---|---|
US (2) | US7369291B2 (xx) |
EP (1) | EP1588205A1 (xx) |
JP (1) | JP2006520920A (xx) |
KR (1) | KR20050089083A (xx) |
CN (1) | CN100492095C (xx) |
SE (1) | SE0300240D0 (xx) |
WO (1) | WO2004068210A1 (xx) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE0300240D0 (sv) * | 2003-01-31 | 2003-01-31 | Micronic Laser Systems Ab | SLM addressing method |
EP1489449A1 (en) | 2003-06-20 | 2004-12-22 | ASML Netherlands B.V. | Spatial light modulator |
JP4758443B2 (ja) * | 2005-01-28 | 2011-08-31 | エーエスエムエル ホールディング エヌ.ブイ. | 大域的最適化に基づくマスクレスリソグラフィ・ラスタライゼーション技術の方法、装置およびコンピュータ読取可能媒体 |
WO2006085860A1 (en) * | 2005-02-04 | 2006-08-17 | Hewlett-Packard Development Company, L.P. | Mem devices having charge induced via focused beam to enter different states |
US7528932B2 (en) * | 2005-12-21 | 2009-05-05 | Micronic Laser Systems Ab | SLM direct writer |
US7936445B2 (en) * | 2006-06-19 | 2011-05-03 | Asml Netherlands B.V. | Altering pattern data based on measured optical element characteristics |
US8975195B2 (en) * | 2013-02-01 | 2015-03-10 | GlobalFoundries, Inc. | Methods for optical proximity correction in the design and fabrication of integrated circuits |
CN106647214B (zh) * | 2017-03-17 | 2019-02-12 | 京东方科技集团股份有限公司 | 空间光调制器的寻址方法、全息显示装置及其控制方法 |
CN106873340B (zh) | 2017-03-17 | 2019-07-05 | 京东方科技集团股份有限公司 | 空间光调制器的寻址方法、全息显示装置及其控制方法 |
CN113820850B (zh) * | 2021-08-23 | 2023-08-11 | 中国科学院光电技术研究所 | 一种集成球面反射镜的mems微快门阵列器件 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3746911A (en) * | 1971-04-13 | 1973-07-17 | Westinghouse Electric Corp | Electrostatically deflectable light valves for projection displays |
US4954789A (en) * | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
US5671083A (en) * | 1995-02-02 | 1997-09-23 | Texas Instruments Incorporated | Spatial light modulator with buried passive charge storage cell array |
SE0100336L (sv) * | 2001-02-05 | 2002-08-06 | Micronic Laser Systems Ab | Adresseringsmetod och apparat som använder densamma tekniskt område |
US6788981B2 (en) * | 2001-02-07 | 2004-09-07 | Movaz Networks, Inc. | Multiplexed analog control system for electrostatic actuator array |
SE0300240D0 (sv) * | 2003-01-31 | 2003-01-31 | Micronic Laser Systems Ab | SLM addressing method |
-
2003
- 2003-01-31 SE SE0300240A patent/SE0300240D0/xx unknown
-
2004
- 2004-01-30 JP JP2006502787A patent/JP2006520920A/ja active Pending
- 2004-01-30 CN CNB2004800032115A patent/CN100492095C/zh not_active Expired - Fee Related
- 2004-01-30 WO PCT/SE2004/000124 patent/WO2004068210A1/en active Application Filing
- 2004-01-30 KR KR1020057012246A patent/KR20050089083A/ko not_active Application Discontinuation
- 2004-01-30 EP EP04706912A patent/EP1588205A1/en not_active Withdrawn
-
2005
- 2005-07-26 US US11/188,876 patent/US7369291B2/en not_active Expired - Fee Related
-
2007
- 2007-10-31 US US11/980,433 patent/US7535623B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN100492095C (zh) | 2009-05-27 |
KR20050089083A (ko) | 2005-09-07 |
US7369291B2 (en) | 2008-05-06 |
US20050270615A1 (en) | 2005-12-08 |
CN1745326A (zh) | 2006-03-08 |
WO2004068210A1 (en) | 2004-08-12 |
US7535623B2 (en) | 2009-05-19 |
JP2006520920A (ja) | 2006-09-14 |
EP1588205A1 (en) | 2005-10-26 |
US20080062504A1 (en) | 2008-03-13 |
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