SE0300240D0 - SLM addressing method - Google Patents
SLM addressing methodInfo
- Publication number
- SE0300240D0 SE0300240D0 SE0300240A SE0300240A SE0300240D0 SE 0300240 D0 SE0300240 D0 SE 0300240D0 SE 0300240 A SE0300240 A SE 0300240A SE 0300240 A SE0300240 A SE 0300240A SE 0300240 D0 SE0300240 D0 SE 0300240D0
- Authority
- SE
- Sweden
- Prior art keywords
- deflectable
- addressing method
- electrode
- mirror element
- modulating elements
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0300240A SE0300240D0 (sv) | 2003-01-31 | 2003-01-31 | SLM addressing method |
JP2006502787A JP2006520920A (ja) | 2003-01-31 | 2004-01-30 | Slmアドレス指定方法 |
EP04706912A EP1588205A1 (en) | 2003-01-31 | 2004-01-30 | Slm addressing method |
CNB2004800032115A CN100492095C (zh) | 2003-01-31 | 2004-01-30 | 空间光调制器寻址方法 |
KR1020057012246A KR20050089083A (ko) | 2003-01-31 | 2004-01-30 | Slm 어드레싱 방법 |
PCT/SE2004/000124 WO2004068210A1 (en) | 2003-01-31 | 2004-01-30 | Slm addressing method |
US11/188,876 US7369291B2 (en) | 2003-01-31 | 2005-07-26 | SLM addressing methods and apparatuses |
US11/980,433 US7535623B2 (en) | 2003-01-31 | 2007-10-31 | SLM addressing methods and apparatuses |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0300240A SE0300240D0 (sv) | 2003-01-31 | 2003-01-31 | SLM addressing method |
Publications (1)
Publication Number | Publication Date |
---|---|
SE0300240D0 true SE0300240D0 (sv) | 2003-01-31 |
Family
ID=20290259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE0300240A SE0300240D0 (sv) | 2003-01-31 | 2003-01-31 | SLM addressing method |
Country Status (7)
Country | Link |
---|---|
US (2) | US7369291B2 (xx) |
EP (1) | EP1588205A1 (xx) |
JP (1) | JP2006520920A (xx) |
KR (1) | KR20050089083A (xx) |
CN (1) | CN100492095C (xx) |
SE (1) | SE0300240D0 (xx) |
WO (1) | WO2004068210A1 (xx) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE0300240D0 (sv) * | 2003-01-31 | 2003-01-31 | Micronic Laser Systems Ab | SLM addressing method |
EP1489449A1 (en) | 2003-06-20 | 2004-12-22 | ASML Netherlands B.V. | Spatial light modulator |
KR20070104444A (ko) * | 2005-01-28 | 2007-10-25 | 에이에스엠엘 홀딩 엔.브이. | 전체적 최적화에 기초한 무마스크 리소그래피래스터라이제이션 기술을 위한 방법 및 시스템 |
EP1846795A1 (en) * | 2005-02-04 | 2007-10-24 | Hewlett-Packard Development Company, L.P. | Mem devices having charge induced via focused beam to enter different states |
US7528932B2 (en) * | 2005-12-21 | 2009-05-05 | Micronic Laser Systems Ab | SLM direct writer |
US7936445B2 (en) * | 2006-06-19 | 2011-05-03 | Asml Netherlands B.V. | Altering pattern data based on measured optical element characteristics |
US8975195B2 (en) * | 2013-02-01 | 2015-03-10 | GlobalFoundries, Inc. | Methods for optical proximity correction in the design and fabrication of integrated circuits |
CN106873340B (zh) | 2017-03-17 | 2019-07-05 | 京东方科技集团股份有限公司 | 空间光调制器的寻址方法、全息显示装置及其控制方法 |
CN106647214B (zh) * | 2017-03-17 | 2019-02-12 | 京东方科技集团股份有限公司 | 空间光调制器的寻址方法、全息显示装置及其控制方法 |
CN113820850B (zh) * | 2021-08-23 | 2023-08-11 | 中国科学院光电技术研究所 | 一种集成球面反射镜的mems微快门阵列器件 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3746911A (en) * | 1971-04-13 | 1973-07-17 | Westinghouse Electric Corp | Electrostatically deflectable light valves for projection displays |
US4954789A (en) * | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
US5671083A (en) * | 1995-02-02 | 1997-09-23 | Texas Instruments Incorporated | Spatial light modulator with buried passive charge storage cell array |
SE0100336L (sv) * | 2001-02-05 | 2002-08-06 | Micronic Laser Systems Ab | Adresseringsmetod och apparat som använder densamma tekniskt område |
US6788981B2 (en) * | 2001-02-07 | 2004-09-07 | Movaz Networks, Inc. | Multiplexed analog control system for electrostatic actuator array |
SE0300240D0 (sv) * | 2003-01-31 | 2003-01-31 | Micronic Laser Systems Ab | SLM addressing method |
-
2003
- 2003-01-31 SE SE0300240A patent/SE0300240D0/xx unknown
-
2004
- 2004-01-30 EP EP04706912A patent/EP1588205A1/en not_active Withdrawn
- 2004-01-30 WO PCT/SE2004/000124 patent/WO2004068210A1/en active Application Filing
- 2004-01-30 JP JP2006502787A patent/JP2006520920A/ja active Pending
- 2004-01-30 KR KR1020057012246A patent/KR20050089083A/ko not_active Application Discontinuation
- 2004-01-30 CN CNB2004800032115A patent/CN100492095C/zh not_active Expired - Fee Related
-
2005
- 2005-07-26 US US11/188,876 patent/US7369291B2/en not_active Expired - Fee Related
-
2007
- 2007-10-31 US US11/980,433 patent/US7535623B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2006520920A (ja) | 2006-09-14 |
KR20050089083A (ko) | 2005-09-07 |
US20080062504A1 (en) | 2008-03-13 |
EP1588205A1 (en) | 2005-10-26 |
CN100492095C (zh) | 2009-05-27 |
WO2004068210A1 (en) | 2004-08-12 |
US7369291B2 (en) | 2008-05-06 |
US20050270615A1 (en) | 2005-12-08 |
US7535623B2 (en) | 2009-05-19 |
CN1745326A (zh) | 2006-03-08 |
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