RU94023871A - Method of preparing silicides of refractory metals - Google Patents

Method of preparing silicides of refractory metals

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Publication number
RU94023871A
RU94023871A RU94023871/26A RU94023871A RU94023871A RU 94023871 A RU94023871 A RU 94023871A RU 94023871/26 A RU94023871/26 A RU 94023871/26A RU 94023871 A RU94023871 A RU 94023871A RU 94023871 A RU94023871 A RU 94023871A
Authority
RU
Russia
Prior art keywords
refractory metals
reactor
disilicides
silicium
atomic
Prior art date
Application number
RU94023871/26A
Other languages
Russian (ru)
Other versions
RU2076065C1 (en
Inventor
Е.Ю. Беляев
Г.В. Голубкова
О.И. Ломовский
Original Assignee
Институт химии твердого тела и переработки минерального сырья
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Институт химии твердого тела и переработки минерального сырья filed Critical Институт химии твердого тела и переработки минерального сырья
Priority to RU94023871/26A priority Critical patent/RU2076065C1/en
Publication of RU94023871A publication Critical patent/RU94023871A/en
Application granted granted Critical
Publication of RU2076065C1 publication Critical patent/RU2076065C1/en

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  • Ceramic Products (AREA)
  • Powder Metallurgy (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)

Abstract

FIELD: powder metallurgy and electronics. SUBSTANCE: monophase disilicides of refractory metals (Mo, W, Ta, Ti, Fe) in the powder state, suitable for use in fabricating workpieces, applying protective coverages and manufacturing conducting and resisting elements of the integral schemes, are prepared as follows. A mixture of silicium and an appropriate metal powders containing 23-38 atomic % metal and 62-77 atomic % silicium is ground in a mechanical-chemical reactor for 20-30 min under centrifugal acceleration of grinding bodies 400- 1000 v/sand filling degree of the reactor with grinding bodies from 0.3 to 0.6 in respect to reactor volume. EFFECT: simplified and accelerated process.

Claims (1)

Изобретение относится к порошковой металлургии и к электронной промышленности. Может быть использовано при изготовлении из силицидов тугоплавких металлов деталей изделий методами порошковой металлургии, при нанесении защитных покрытий и для изготовления токопроводящих и резистивных элементов интегральных схем. Целью изобретения является получение монофазных дисилицидов тугоплавких металлов в порошкообразном состоянии при упрощении способа получения, ускорении процесса синтеза и расширении концентрационной области образования монофазных дисилицидов металлов.The invention relates to powder metallurgy and to the electronics industry. It can be used in the manufacture of refractory metal silicides of product parts by powder metallurgy methods, in the application of protective coatings and for the manufacture of conductive and resistive elements of integrated circuits. The aim of the invention is to obtain monophasic disilicides of refractory metals in a powdered state while simplifying the production method, accelerating the synthesis process and expanding the concentration region of the formation of monophasic disilicides of metals.
RU94023871/26A 1994-06-24 1994-06-24 Method of preparing refractory metal silicides RU2076065C1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU94023871/26A RU2076065C1 (en) 1994-06-24 1994-06-24 Method of preparing refractory metal silicides

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU94023871/26A RU2076065C1 (en) 1994-06-24 1994-06-24 Method of preparing refractory metal silicides

Publications (2)

Publication Number Publication Date
RU94023871A true RU94023871A (en) 1996-07-27
RU2076065C1 RU2076065C1 (en) 1997-03-27

Family

ID=20157676

Family Applications (1)

Application Number Title Priority Date Filing Date
RU94023871/26A RU2076065C1 (en) 1994-06-24 1994-06-24 Method of preparing refractory metal silicides

Country Status (1)

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RU (1) RU2076065C1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2460706C2 (en) * 2010-07-15 2012-09-10 Государственное образовательное учреждение высшего профессионального образования "Пермский государственный технический университет" Method of producing titanium carbosilicide-based powdered composition

Also Published As

Publication number Publication date
RU2076065C1 (en) 1997-03-27

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Legal Events

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MM4A The patent is invalid due to non-payment of fees

Effective date: 20040625