RU93043191A - METHOD OF LOCALIZATION OF THE AREA OF MOVEMENT OF CATHODE STAGES OF A VACUUM ARC ON THE EXTERNAL CATHODE EVAPORATION SURFACE - Google Patents

METHOD OF LOCALIZATION OF THE AREA OF MOVEMENT OF CATHODE STAGES OF A VACUUM ARC ON THE EXTERNAL CATHODE EVAPORATION SURFACE

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Publication number
RU93043191A
RU93043191A RU93043191/10A RU93043191A RU93043191A RU 93043191 A RU93043191 A RU 93043191A RU 93043191/10 A RU93043191/10 A RU 93043191/10A RU 93043191 A RU93043191 A RU 93043191A RU 93043191 A RU93043191 A RU 93043191A
Authority
RU
Russia
Prior art keywords
cathode
localization
area
movement
evaporation surface
Prior art date
Application number
RU93043191/10A
Other languages
Russian (ru)
Other versions
RU2046836C1 (en
Inventor
Л.П. Саблев
С.Н. Григорьев
Original Assignee
Научно-производственное предприятие "Новатех"
Filing date
Publication date
Application filed by Научно-производственное предприятие "Новатех" filed Critical Научно-производственное предприятие "Новатех"
Priority to RU93043191A priority Critical patent/RU2046836C1/en
Priority claimed from RU93043191A external-priority patent/RU2046836C1/en
Application granted granted Critical
Publication of RU2046836C1 publication Critical patent/RU2046836C1/en
Publication of RU93043191A publication Critical patent/RU93043191A/en

Links

Claims (1)

Использование: в области вакуумно-плазменного нанесения покрытий, преимущественно в машиностроении при нанесении покрытий заданного профиля на изделия. Сущность изобретения: на поверхности испарения катода с помощью системы поджига возбуждают вакуумную дугу и создают в межэлектродном пространстве над областью преимущественно необходимой локализации перемещений катодных пятен зоны с минимальным межэлектродным напряжением горения дуги. Причем при возбуждении вакуумной дуги на поверхности испарения катода формируют по меньшей мере два катодных пятна посредством подбора необходимой величины тока дуги. Это обеспечивает надежное удержание (локализацию) катодных пятен при наличии двух и более катодных пятен на поверхности испарения катода и управление перемещением области катодных пятен в процессе работы.Usage: in the field of vacuum-plasma coating, mainly in engineering when coating a given profile on the product. The essence of the invention: on the surface of the evaporation of the cathode using an ignition system excite a vacuum arc and create in the interelectrode space above the area mainly necessary localization of the movements of the cathode spots of the zone with a minimum interelectrode voltage of the arc. Moreover, when a vacuum arc is excited on the evaporation surface of the cathode, at least two cathode spots are formed by selecting the required value of the arc current. This ensures reliable retention (localization) of cathode spots in the presence of two or more cathode spots on the evaporation surface of the cathode and control of the movement of the area of the cathode spots during operation.
RU93043191A 1993-08-31 1993-08-31 Method of localization of area of motion of cathode spots of vacuum arc on surface of evaporation of extended cathode RU2046836C1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU93043191A RU2046836C1 (en) 1993-08-31 1993-08-31 Method of localization of area of motion of cathode spots of vacuum arc on surface of evaporation of extended cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU93043191A RU2046836C1 (en) 1993-08-31 1993-08-31 Method of localization of area of motion of cathode spots of vacuum arc on surface of evaporation of extended cathode

Publications (2)

Publication Number Publication Date
RU2046836C1 RU2046836C1 (en) 1995-10-27
RU93043191A true RU93043191A (en) 1996-06-10

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
RU93043191A RU2046836C1 (en) 1993-08-31 1993-08-31 Method of localization of area of motion of cathode spots of vacuum arc on surface of evaporation of extended cathode

Country Status (1)

Country Link
RU (1) RU2046836C1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
EP2607517A1 (en) * 2011-12-22 2013-06-26 Oerlikon Trading AG, Trübbach Low temperature arc ion plating coating

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