RU93043191A - METHOD OF LOCALIZATION OF THE AREA OF MOVEMENT OF CATHODE STAGES OF A VACUUM ARC ON THE EXTERNAL CATHODE EVAPORATION SURFACE - Google Patents
METHOD OF LOCALIZATION OF THE AREA OF MOVEMENT OF CATHODE STAGES OF A VACUUM ARC ON THE EXTERNAL CATHODE EVAPORATION SURFACEInfo
- Publication number
- RU93043191A RU93043191A RU93043191/10A RU93043191A RU93043191A RU 93043191 A RU93043191 A RU 93043191A RU 93043191/10 A RU93043191/10 A RU 93043191/10A RU 93043191 A RU93043191 A RU 93043191A RU 93043191 A RU93043191 A RU 93043191A
- Authority
- RU
- Russia
- Prior art keywords
- cathode
- localization
- area
- movement
- evaporation surface
- Prior art date
Links
- 238000001704 evaporation Methods 0.000 title claims 4
- 230000004807 localization Effects 0.000 title claims 3
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 230000014759 maintenance of location Effects 0.000 claims 1
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU93043191A RU2046836C1 (en) | 1993-08-31 | 1993-08-31 | Method of localization of area of motion of cathode spots of vacuum arc on surface of evaporation of extended cathode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU93043191A RU2046836C1 (en) | 1993-08-31 | 1993-08-31 | Method of localization of area of motion of cathode spots of vacuum arc on surface of evaporation of extended cathode |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2046836C1 RU2046836C1 (en) | 1995-10-27 |
RU93043191A true RU93043191A (en) | 1996-06-10 |
Family
ID=20147049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU93043191A RU2046836C1 (en) | 1993-08-31 | 1993-08-31 | Method of localization of area of motion of cathode spots of vacuum arc on surface of evaporation of extended cathode |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2046836C1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6103074A (en) * | 1998-02-14 | 2000-08-15 | Phygen, Inc. | Cathode arc vapor deposition method and apparatus |
EP2607517A1 (en) * | 2011-12-22 | 2013-06-26 | Oerlikon Trading AG, Trübbach | Low temperature arc ion plating coating |
-
1993
- 1993-08-31 RU RU93043191A patent/RU2046836C1/en active
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