RU2001159C1 - Apparatus for applying metallic coatings in vacuum using arc discharges - Google Patents
Apparatus for applying metallic coatings in vacuum using arc dischargesInfo
- Publication number
- RU2001159C1 RU2001159C1 SU5002414A RU2001159C1 RU 2001159 C1 RU2001159 C1 RU 2001159C1 SU 5002414 A SU5002414 A SU 5002414A RU 2001159 C1 RU2001159 C1 RU 2001159C1
- Authority
- RU
- Russia
- Prior art keywords
- vacuum
- sses
- power supply
- metallic coatings
- resistance
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Изобретение относитс к поверхностному упрочнению инструмента и деталей машин, а также дл создани декоративного покрыти на издели х различного назначени Установка содержит установленный в вл ющейс анодом вакуумной камере 2 прот женный расходуемый катод (К) 1 с управл емыми ключами (УК) 11 и 12 на концах Вдоль оси К 1 над поверхностью испарени установлен датчик текущего положени катодного п тна 3. концы которого подключены к одному иэ входов устройства сравнени электрических сигналов (УСЭС) и через резисторы R 4 к положительному полюсу источника питани Второй вход УСЭС подключен к программирующему устройству 9. которое также подключено к входной клемме одного из R 4 Выход УСЭС соединен УК 11 и 12. Св занные между собой выходные клеммы R 4 соединены непосредственно с положительным полюсом источника питани Сопротивление R по меньшей мере, на пор док преалиает сопротивление датчика положени катодного п тна 1 ипThe invention relates to surface hardening of tools and machine parts, as well as for creating a decorative coating on products for various purposes. The installation comprises an extended consumable cathode (K) 1 installed in the anode of the vacuum chamber 2 with controlled keys (UK) 11 and 12 on ends Along the axis K 1 above the surface of the evaporation a sensor is installed for the current position of the cathode spot 3. the ends of which are connected to one of the inputs of the electrical signal comparison device (USES) and through the resistors R 4 to the positive at the power supply pole The second input of the SSES is connected to the programming device 9. which is also connected to the input terminal of one of R 4 The output of the SSES is connected to UK 11 and 12. The output terminals R 4 connected to each other are connected directly to the positive pole of the power supply Resistance R of at least at least the resistance of the cathode spot sensor 1
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU5002414 RU2001159C1 (en) | 1991-09-11 | 1991-09-11 | Apparatus for applying metallic coatings in vacuum using arc discharges |
PCT/RO1992/000095 WO1992019789A1 (en) | 1991-04-29 | 1992-04-28 | Electric arc evaporator of metals |
EP19920911763 EP0586702A4 (en) | 1991-04-29 | 1992-04-28 | Electric arc evaporator of metals |
US08/146,044 US5451308A (en) | 1991-04-29 | 1992-04-28 | Electric arc metal evaporator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU5002414 RU2001159C1 (en) | 1991-09-11 | 1991-09-11 | Apparatus for applying metallic coatings in vacuum using arc discharges |
Publications (1)
Publication Number | Publication Date |
---|---|
RU2001159C1 true RU2001159C1 (en) | 1993-10-15 |
Family
ID=21585279
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU5002414 RU2001159C1 (en) | 1991-04-29 | 1991-09-11 | Apparatus for applying metallic coatings in vacuum using arc discharges |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2001159C1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2708711C1 (en) * | 2019-09-24 | 2019-12-11 | ООО "НПП "Уралавиаспецтехнология" | Method of applying ion-plasma coatings on stator semi-ring with blades and installation for its implementation |
RU2710809C1 (en) * | 2019-08-05 | 2020-01-14 | Общество с ограниченной ответственностью "НПП "Уралавиаспецтехнология" | Apparatus for applying ion-plasma coatings |
-
1991
- 1991-09-11 RU SU5002414 patent/RU2001159C1/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2710809C1 (en) * | 2019-08-05 | 2020-01-14 | Общество с ограниченной ответственностью "НПП "Уралавиаспецтехнология" | Apparatus for applying ion-plasma coatings |
RU2708711C1 (en) * | 2019-09-24 | 2019-12-11 | ООО "НПП "Уралавиаспецтехнология" | Method of applying ion-plasma coatings on stator semi-ring with blades and installation for its implementation |
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