RU93027013A - METHOD FOR STORING HIGH-PURE MINERAL ACIDS - Google Patents

METHOD FOR STORING HIGH-PURE MINERAL ACIDS

Info

Publication number
RU93027013A
RU93027013A RU93027013/26A RU93027013A RU93027013A RU 93027013 A RU93027013 A RU 93027013A RU 93027013/26 A RU93027013/26 A RU 93027013/26A RU 93027013 A RU93027013 A RU 93027013A RU 93027013 A RU93027013 A RU 93027013A
Authority
RU
Russia
Prior art keywords
mineral acids
storing high
pure mineral
porolas
osch
Prior art date
Application number
RU93027013/26A
Other languages
Russian (ru)
Other versions
RU2039007C1 (en
Inventor
Ю.К. Кварацхели
В.В. Якшин
О.М. Вилкова
Д.И. Скороваров
Original Assignee
Всероссийский научно-исследовательский институт химической технологии
Filing date
Publication date
Application filed by Всероссийский научно-исследовательский институт химической технологии filed Critical Всероссийский научно-исследовательский институт химической технологии
Priority to RU93027013A priority Critical patent/RU2039007C1/en
Priority claimed from RU93027013A external-priority patent/RU2039007C1/en
Application granted granted Critical
Publication of RU2039007C1 publication Critical patent/RU2039007C1/en
Publication of RU93027013A publication Critical patent/RU93027013A/en

Links

Claims (1)

Использование: хранение минеральных кислот с уровнем микропримесей 10- 7 - 10- 9 мас.% для использования в качестве травителей при производстве полупроводниковых приборов, в частности волоконной оптики. Сущность изобретения: в высокочистые соляную или азотную кислоты при хранении в полиэтиленовой или фторопластовой таре вводят поглотитель. Поглотитель предварительно очищают. Для соляной кислоты в качестве поглотителя используют графит ОСЧ 8-4, или ионообменную смолу КУ 2х8, или поролас Т. Для азотной - графит ОСЧ 8-4, или фторопластовый порошок, или поролас Т. Положительный эффект: способ позволяет после хранения исключить финишную очистку кислот.Usage: storage of mineral acids with a level of microimpurities of 10 - 7 - 10 - 9 wt.% For use as etchants in the manufacture of semiconductor devices, in particular fiber optics. The inventive in high-purity hydrochloric or nitric acid when stored in a polyethylene or fluoroplastic container, an absorber is introduced. The absorber is pre-cleaned. For hydrochloric acid, graphite OSCH 8-4, or KU 2x8 ion-exchange resin, or porolas T is used. For nitric acid, graphite OSCh 8-4, or fluoroplastic powder, or porolas T. Positive effect: the method allows to exclude the final cleaning after storage acids.
RU93027013A 1993-05-27 1993-05-27 Method of high pure inorganic acids storage RU2039007C1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU93027013A RU2039007C1 (en) 1993-05-27 1993-05-27 Method of high pure inorganic acids storage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU93027013A RU2039007C1 (en) 1993-05-27 1993-05-27 Method of high pure inorganic acids storage

Publications (2)

Publication Number Publication Date
RU2039007C1 RU2039007C1 (en) 1995-07-09
RU93027013A true RU93027013A (en) 1996-10-10

Family

ID=20141776

Family Applications (1)

Application Number Title Priority Date Filing Date
RU93027013A RU2039007C1 (en) 1993-05-27 1993-05-27 Method of high pure inorganic acids storage

Country Status (1)

Country Link
RU (1) RU2039007C1 (en)

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