RU47593U1 - MULTI-PROBE DEVICE FOR PERFORMING TECHNOLOGICAL OPERATIONS OF FORMATION OF NANOSTRUCTURES - Google Patents

Abstract

The device relates to the field of engineering, and specifically to devices for performing technological operations of the formation of nanostructures. The utility model is based on the technical task of ensuring high performance. This problem is solved in that the device is equipped with additional piezo drives mounted on a fixed base so that the axis of the piezo drives are parallel, a stepper motor is installed between the piezo drives on a fixed base, the shaft of which is connected to the camomile disk made of dielectric material on the console of each the tip of the “camomile” disk is located the tip of the probe, and the substrate holder with the substrate is connected to the platform by means of a three-coordinate piezostol configured to move I have substrates along the X, Y, Z coordinate axes, the device is equipped with additional three-axis piezostoles installed on the platform coaxially with additional piezodrives, auxiliary technological substrate holders with substrates are installed on the additional three-coordinate piezostolles, the number of all piezodrives being equal to the number of petals of the camomile disk, and the tip the probes are made of various materials and a carbon nanotube doped with zinc, chromium and iron is installed on each tip of the probe, with the possibility of real tion over its conducting state.

Description

The utility model relates to the field of engineering, and specifically to devices for performing technological operations of the formation of nanostructures.

A device is known for performing nanotechnological operations for the formation of nanostructures [Certificate for Utility Model No. 19926, 7 V 81 C 1/00, 06/10/2003. Bull. No. 16], containing a fixed base, a piezoelectric element mounted on it, at the end of which a probe is installed.

The disadvantage of an analogue is low performance.

The closest in technical essence and the achieved result is a device for performing nanotechnological operations for the formation of nanostructures [Certificate for Utility Model No. 30041, 7 Н 02 N 2/00, 06/10/2003. Bull. No. 16], containing a piezo drive rigidly connected to the probe and a fixed guide, a substrate mounted on the coordinate table.

The disadvantage of the prototype is low productivity.

The utility model is based on the technical task of ensuring high performance.

The problem is solved in that the device is equipped with additional piezo drives mounted on a fixed base so that the axis of the piezo drives are parallel, between the piezo drives on a fixed base, a step

the motor shaft, which is connected to the camomile disk made of dielectric material, has a probe tip located on the console of each petal of the camomile disk, and the substrate holder with the substrate is connected to the platform by means of a three-coordinate piezostol made with the possibility of moving the substrate along the X coordinate axes , Y, Z, the device is equipped with additional three-axis piezostoles mounted on the platform coaxially with additional piezoelectric actuators; powerful technological substrate holders with substrates, the number of all piezo drives being equal to the number of petals of the camomile disk, and the tip of the probe made of various materials and a carbon nanotube doped with zinc, chromium and iron mounted on each tip of the probe, with the possibility of realizing it in a superconducting state.

Introduction to the multi-probe device for performing technological operations of the formation of nanostructures of additional piezo drives installed on a fixed base so that the axis of the piezo drives are parallel, a stepper motor between the piezo drives, the shaft of which is connected to a camomile disk made of a dielectric material, three-coordinate piezostoles and carbon nanotubes installed on each tip of the probe leads to a sharp increase in productivity due to the implementation of parallel execution of m ozhestva nanotechnology operations. The essence of the utility model is illustrated in figure 1, figure 2, figure 3. Figure 1 shows a multi-probe device for performing technological operations of the formation of nanostructures.

Figure 2 shows a disk - "daisy", a top view.

Figure 3 shows the appearance of the tip of the probe with a carbon nanotube.

A multi-probe device for performing technological operations of forming nanostructures (Fig. 1) contains a piezoelectric actuator (1) mounted on a fixed base (2), a probe (3) connected to a piezoelectric actuator (1), a substrate holder (4) with a substrate (5), mounted on the platform (6), and the substrate (5) and the probe (3) are electrically connected with each other. The device is equipped with additional piezo drives (7) with probes (8) mounted on a fixed base (2) so that the axis of the piezo drives (1) and (7) are parallel. Between the piezoelectric actuators (1) and (7), a stepper motor (9) is installed on the fixed base (2), the shaft (10) of which is connected to the camomile disk (11) (figure 2) made of dielectric material. On the console (12) (Fig. 2) of each petal (13) (Fig. 2) of the camomile disk (11), the tip (14) (Fig. 3) of the probe (3) and (8) is located, and the substrate holder ( 4) is connected with the substrate (5) to the platform (6) by means of a three-coordinate piezostol (15), configured to move the substrate (5) along the coordinate axes X, Y, Z. The device is equipped with additional three-coordinate piezostoles (16) mounted on the platform ( 6) coaxially with additional piezoelectric actuators (7). On additional three-coordinate piezostoles (16), auxiliary technological substrate holders (17) with substrates (18) are installed, and the number of all piezo drives (1) and (7) is equal to the number of petals (13) of the “camomile” disk (11), and the tip ( 14) probes (3) and (8) are made of various

materials and on each tip (14) of the probe (3) and (8) there is a carbon nanotube (19) (Fig. 3) doped with zinc, chromium and iron, with the possibility of realizing its superconducting state.

. A multi-probe device for performing technological operations of the formation of nanostructures (figure 1, figure 2, figure 3) works as follows.

Using piezoelectric actuators (1) and (7) mounted on a fixed base (2), the probes (3) and (8) are moved relative to the substrates (5) and (18), and the nanostructure on the substrate is realized only at one point. When voltage is applied to the three-coordinate piezostols (15) and (16) installed on the platform (6), the substrate holders (4) and (17) with the substrates (5) and (18) move along the three coordinate axes X, Y, Z, for the formation of a nanostructure on substrates (5) and (18). Using a stepper motor (9) mounted on a fixed base (2), the shaft (10) of which is connected to the camomile disk (11), the tips (14) of the probes (3) and (8) are replaced with those mounted on each of the points (14) of the probes (3) and (8) with carbon nanotubes (19), and the nanoparticle is further formed, but from a different material. Carbon nanotubes (19) serve as guides for the probes (3) and (8) emitted from the tips (14) of the particles preventing their deflection.

The use of the proposed multi-probe device for performing technological operations of nanostructure formation allows several nanotechnological ones to be produced at the same time and thereby ensure high performance.

Claims (1)

A multi-probe device for performing technological operations of forming nanostructures, comprising a piezoelectric actuator mounted on a fixed base, a probe associated with the piezoelectric actuator, a substrate holder with a substrate mounted on a platform, the substrate and the probe being electrically connected to each other, characterized in that the device is equipped with additional piezoelectric actuators installed on a fixed base in such a way that the axis of the piezo drives are parallel, between the piezo drives on a fixed base, step the motor shaft, which is connected to the camomile disk made of dielectric material, has a probe tip located on the console of each petal of the camomile disk, and the substrate holder with the substrate is connected to the platform by means of a three-coordinate piezostol made with the possibility of moving the substrate along the X coordinate axes , Y, Z, the device is equipped with additional three-axis piezostoles mounted on the platform coaxially with the additional piezoelectric actuators; auxiliary technological substrate holders with substrates, moreover, the number of all piezoelectric actuators is equal to the number of petals of the “camomile” disk, and the probe tips are made of various materials and a carbon nanotube doped with zinc, chromium and iron is installed on each probe tip with the possibility of realizing it in a superconducting state.