RU2568147C1 - Gyro accelerometer with rotor electrostatic suspension and complete primary info - Google Patents

Abstract

FIELD: instrumentation.

SUBSTANCE: claimed invention can be used in the systems of orientation, navigation and control over moving objects. Proposed device comprises extra metering circuits, electrodes, phase-sensitive rectifiers, adders and scaling elements.

EFFECT: determination of three angles of orientation and three coordinated on moving object location.

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Description

The invention relates to the field of instrumentation and can be used in orientation systems, navigation and control of such moving objects as an airplane, ship, car, microrobot and others, where information about angular velocities and apparent accelerations is required. A feature of the device is that it is a micromechanical rotary type.

Known micromechanical gyroscope developed in the laboratory. Draper, Massachusetts Institute of Technology, USA (Barbour Ν., Conelly J., Gilmore J., ea "Micro-Electromechanical Instrument and Systems Development at Draper Laboratory" // 3 ^rd Saint Petersburg International Conference on Integrated Navigation Systems. Part 1, May 1996, pp3-10.). It is a tuning fork type gyroscope and consists of two vibrating masses suspended on two flexible supports. This is a tuning fork with upper and lower legs (torsion bars). The fixed masses vibrate under the action of electrostatic sensors of the comb structure in reciprocal directions, i.e. perform flat antiphase oscillations. In the presence of a measured angular velocity around the axis of the torsion bars, the frame with sensitive masses under the influence of Coriolis forces begins to make angular oscillations relative to the body, as well as around the axis of the torsion bars. These vibrations are measured using capacitive displacement sensors located under sensitive masses. The amplitude of the measured oscillations is proportional to the magnitude of the measured angular velocity, and the phase determines the sign of this velocity.

Also known is the design of a micromechanical gyroscope (Severov L.A., Ponomarev V.K., Pankratov A.I. and others. Micromechanical gyroscopes: designs, characteristics, technologies, development paths. // Izv. Universities of the Russian Federation - Instrument Making. 1998, No. 1-2, p. 57.) with a sensing element in the form of a ring fixed with stretch marks on a central strut connected to the housing through elastic elements. Using electrostatic force sensors, the ring is driven into oscillatory motion around the axis of the stretch marks. A capacitive converter is used to retrieve information.

The disadvantage of both micromechanical gyroscopes is not high enough accuracy due to the small magnitude of the kinetic moment, which is explained by the fact that the sensitive elements perform not rotational, but oscillatory movements. Due to this, the amplitude value of the kinetic moment is 10 ^-3 -10 ^-4 gf · cm · s.

Known "Levitating micromotor" (accelerometer) (Pat. US 5187399, William N. Carr, Hong Yu, Dong-Il D. Cho, pabl. Date 02.16.1993), which indicates the use of this micromotor as an accelerometer.

The disadvantage is that this design does not provide a measurement of the angular velocity of a moving object (ON).

Closest to the claimed technical solution is a gyroscope accelerometer with electrostatic suspension of the rotor (Pat. RF No. 2158903, IPC G01C 19/24, G01P 15/14, 2000, authors Chebotarevsky Yu.V., Melnikov A.V., Plotnikov P.K.), containing a statically and dynamically balanced rotor in the form of a circular plate with holes, having electrically conductive parts and surrounded by stators, which include the end, lower and upper planar suspension stators, as well as the lower and upper torque stators. At the same time, the suspension end stator consists of an even number of flat electrodes located in the equatorial plane of the rotor around the circumference and fixed in the side walls of the lower electrically insulating sleeve, mounted in the housing. The design also includes the lower and upper identical planar suspension stators, each made in the form of an even number of flat electrodes located around the circumference and fixed in the lower and upper electrically insulating bushings, the latter being fixed in the cover of the gyroscope-accelerometer, and each of two adjacent flat electrodes of any from the suspension stators, together with a high-frequency voltage source and a choke connected in series with them, they form a measuring chain. In addition, the lower and upper planar torque stators, fixed in the lower and upper electrically insulating sleeves, consisting of flat electrodes, are connected in three sections, so that each section includes electrodes located through two adjacent to the third, sections connected to three phases of the source alternating current, the device includes an information processing circuit containing measuring chains. The circuit includes reference resistors, phase-sensitive rectifiers (PCFs), adders, subtractors, scaling elements, so that each measuring chain is supplemented by a reference resistor by connecting it in series with a high-frequency voltage source, a choke and a pair of electrodes, as well as a PSF, the first and second inputs which is connected in parallel with a high-frequency voltage source and a reference resistor, respectively, and its output is the output of the measuring chain. In this case, the outputs of the measuring chains with positive and negative coordinates of the end electrodes of the suspension of the first measuring axis are connected to the first and second inputs of the first subtraction device, the output of which is connected to the input of the first scaling element, its output is the output of the W component ₍ apparent acceleration, the outputs of the measuring chains end electrodes of the suspension with positive and negative coordinates respectively connected along the second measuring axis with the first and second inputs respectively, of the second subtraction device, its output is connected to the input of the second scaling device, the output of which is the output of the W component ₍ apparent acceleration, the outputs of two measuring chains of the upper flat electrodes of the suspension stators with positive and negative coordinates along the first measuring axis are connected to the first and second inputs, respectively of the third subtraction device, its output is connected to the input of the third scaling element, the output of which is the output along the component ω _ξ angularly th speed. In turn, the outputs of the measuring chains with positive and negative coordinates of the upper flat electrodes of the suspension stators along the second measuring axis are connected to the first and second inputs of the first adder, the output of which is connected to the first input of the fourth subtraction device, and the output of the second is connected to the second input of the fourth subtraction device the adder, the first input of the second adder is connected to the output of the measuring chain with positive flat electrodes of the lower suspension stator along the second measuring and a second input of the second adder connected to the output of the measuring chain with negative coordinates lower electrodes of the lower stator suspension along a second measuring axis, the fourth subtractor output coupled to an input of the fourth scaling element which is the output of the component W _ζ apparent acceleration, and first and second inputs the second adder connected to the first and second inputs of the fifth subtraction device, the output of which is connected to the input of the fifth scaling element, its output is the output to component ω _{η of} absolute angular velocity.

The disadvantage of the prototype device is the inability to measure the angular velocity by the third component of the angular velocity of the object, and therefore, the inability to determine the orientation of the moving object.

The objective of the invention is the provision of measuring the angular velocity of the third component of the angular velocity of the object.

The technical result of the invention is that for the first time in one gyroscope-accelerometer in the form of a rotor with three degrees of freedom, three components of the apparent acceleration and three components of the absolute angular velocity of the software are measured, that is, the complete primary inertial information. Only with its availability is it possible to solve the problem of determining three orientation angles and three coordinates of the software location.

The problem is solved in that a gyroscope-accelerometer with an electrostatic suspension of the rotor and complete primary information, containing a dynamically and statically balanced rotor in the form of a round plate with holes, having electrically conductive parts and surrounded by stators, which include the end, lower and upper planar suspension stators as well as the lower and upper torque stators, while the suspension end stator consists of an even number of flat electrodes located in the equatorial plane of the roto and around the circumference and fixed in the side walls of the lower electrical insulating sleeve, mounted in the housing, the lower and upper identical planar suspension stators, each made in the form of an even number of flat electrodes located around the circumference and mounted on the lower and upper electrical insulating bushings, the latter being fixed in the lid gyroscope-accelerometer, in addition, the lower and upper planar torque stators, mounted in the lower and upper electrically insulating sleeves, consisting of flat electrodes, are divided into three sections so that each section includes electrodes located through two adjacent to the third, the sections are connected to three phases of the AC source, in addition, each pair of adjacent flat electrodes and a reference resistor connected in series with a high-frequency voltage source, a choke, and also a phase-sensitive rectifier, form a measuring chain, while the first and second inputs of the phase-sensitive rectifier are connected in parallel with a high-frequency voltage source and a reference resistor ohm, respectively, and its output is the output of the measuring chain, while the outputs of the measuring chains with positive and negative coordinates of the end electrodes of the suspension of the first measuring axis are connected to the first and second inputs of the first adder, the output of which is connected to the input of the first scaling element, its output is the output component W _ξ apparent acceleration, the outputs of the measuring chains suspension end electrodes with positive and negative coordinates, respectively, Torah measuring axis are connected by means of measuring chains with first and second inputs respectively of the second adder and its output connected to the input of the second scaler, the output of which is the output of the component W _η the apparent acceleration, according to the claimed technical solution further comprises a measuring chain comprising two pairs of diametrically located end electrodes in the positive and negative direction of the third measuring axis, a pair of electrodes in the positive direction the second measuring axis, the reference resistor in the positive direction of the second measuring axis, the distributed resistance of this chain in the positive direction of the second measuring axis, the low-pass filter in the positive direction of the second measuring axis, the inputs of which are connected to the filter, the third scaling element, the output of which serves to collect information on the third component ω _{ζ of the} angular velocity of the moving object. Measuring chains along the third measuring axis are also introduced, made with the possibility of evaluating the gaps between the rotor and the upper and lower flat stator electrodes offset in the negative direction along the second measuring axis, the outputs of these measuring chains are connected to the inputs of the fourth voltage adder, the output of which is connected to the first input the first subtraction device, the output of the fifth voltage adder is connected to its second inverting input, the inputs of which are connected to the outputs of two measuring circuits pens on the third measuring axis, made with the possibility of evaluating the gaps between the rotor and the upper and lower flat electrodes of the stators, offset along the second measuring axis in the positive direction, while the output of the first subtractor is connected to the input of the fourth scaling element, the output of which is the output along the ω component _ξ angular velocity of software. The outputs of two measuring chains, made with the possibility of evaluating the gaps on the third measuring axis between the rotor and the upper and lower flat electrodes of the stators, offset in the negative direction of the first measuring axis, are connected to the inputs of the sixth adder, the outputs of two measuring chains, made with the possibility of evaluating the gaps of the third the measuring axis between the rotor and the upper and lower flat electrodes of the stators, offset in the positive direction of the first measuring axis, are connected to the inputs and the seventh voltage adder, the outputs of the sixth and seventh voltage adders are connected to the input of the ninth adder, the output of which is connected to the input of the sixth scaling element, the output of which is the apparent acceleration of the software component W _ζ . Also, the outputs of the sixth and seventh adders are connected to the first and second inputs of the second subtraction device, the output of which is connected to the input of the fifth scaling element, its output being the output of the absolute angular velocity component ω _η .

The invention is illustrated by drawings: FIG. 1-7.

In FIG. 1 shows a structural diagram of a gyroscope-accelerometer with an electrostatic suspension of the rotor and complete primary information.

In FIG. 2 shows a part of the electrical circuit connecting the elements of the device.

In FIG. Figure 3 presents an explanatory diagram of the separation of the apparent acceleration signal from two components perpendicular to the axis of symmetry of the rotor (W _ξ , W _η ), as well as the component W _{ζ of} absolute angular velocity.

In FIG. Figure 4 shows a functional electric circuit for extracting signals of apparent acceleration from the components W _ζ , W _η and the component of the absolute angular velocity ω _ζ .

In FIG. 5 is a diagram explaining the selection of signals by the third component of the apparent acceleration and by two components of the absolute angular velocity (ω _ξ , ω _η ) perpendicular to the axis of symmetry of the rotor.

In FIG. Figure 6 shows a functional electric circuit for extracting the signals of the apparent acceleration W _ζ and the absolute angular velocities ω _ζ , ω _η and the gap δ.

In FIG. 7 is a diagram of rotations of coordinate trihedrons and rotations of rotor rotations relative to the housing.

и

между ротором по положительному и отрицательному направлениям оси ζ по отношению к верхним и нижним электродам, смещенным по второй оси (в отрицательном направлении; 48, 49 - восьмой и девятый ФЧВ для выделения сигналов о текущих зазорах

и

между ротором по положительному и отрицательному направлениям оси ζ по отношению к верхним и нижним электродам, смещенным по оси ξ в отрицательном направлении; 50, 51 - десятый и одиннадцатый ФЧВ для выделения систематических сигналов о текущих зазорах

между ротором по положительному и отрицательному направлениям оси ζ по отношению к верхним и нижним электродам, смещенным по оси η в положительном направлении; 52, 53 - двенадцатый и тринадцатый ФЧВ для выделения систематических сигналов о текущих зазорах

между ротором по положительному и отрицательному направлениям оси (по отношению к верхним и нижним электродам, смещенным по оси (в положительном направлении, 54, 55, 56, 58, 59, 60, 67 - соответственно с третьего по девятый сумматоры напряжений; 57, 61, 65 - соответственно с первого по третий устройства вычитания, 62 - четвертый масштабирующий элемент для сигнала

63 - пятый масштабирующий элемент для сигнала

64 - шестой масштабирующий элемент для сигнала

66 - седьмой масштабирующий элемент для сигнала

0ζηξ - правая ортогональная система координат, связанная с корпусом 4 устройства; 0ξ - первая измерительная ось, 0η - вторая измерительная ось, 0ζ - третья измерительная ось, W_ς, W_η, W_ξ - компоненты вектора кажущегося ускорения точки 0 центра тяжести ротора 1, направленные по соответствующим осям системы координат Οζηξ; Ο₁ - точка центра подвеса ротора, ω_ξ - абсолютная угловая скорость ПО вокруг оси ξ; ω_η - абсолютная угловая скорость вокруг оси η; ω_ζ - абсолютная угловая скорость вокруг оси ζ; U, U_T - выходные напряжения с эталонного резистора статора подвеса и эталонного резистора торцевых электродов соответственно; I⁺, I^- - контуры электроники по положительному и отрицательному направлениям оси ξ; ΙΙ⁺, ΙI^- - контуры электроники по положительному и отрицательному направлениям оси η; а, в, з, ж - зажимы источников напряжения; 3ξ_-, 3ξ₊- торцевые электроды для измерения перемещений ротора вдоль оси ξ с отрицательной и положительной координатой расположения по оси η; 3′ξ_-, 3′ξ₊ - торцевые электроды для измерения перемещений ротора вдоль оси ξ с отрицательной и положительной координатой расположения по оси η;

- дополнительно введенные торцевые электроды для измерения перемещений ротора вдоль оси ξ с положительной координатой вдоль оси ξ; 3η_-, 3η₊ - торцевые электроды для измерения перемещений ротора вдоль оси η с отрицательной и положительной координатой расположения по оси η; 3′η_-, 3′η₊ - торцевые электроды для измерения перемещений ротора вдоль оси η с отрицательной и положительной координатой расположения по оси

- дополнительно введенные торцевые электроды для измерения перемещений ротора вдоль оси (с положительной координатой вдоль оси ξ; R_ξ+, R_ξ- - эталонные резисторы, расположенные в цепи измерений по положительному и отрицательному направлениям оси ξ; R_η+, R_η- - эталонные резисторы, расположенные в цепи измерений по положительному и отрицательному направлениям оси η; U_η+, U_η- - выходные напряжения по положительному и отрицательному направлениям оси η; U_ξ+, U_ξ- - выходные напряжения по положительному и отрицательному направлениям оси ξ, xyz - система координат, жестко связанная с ротором; α, β - углы поворота ротора;

- угловые скорости поворота ротора, Ω - угловая скорость собственного вращения ротора;

- электроды правого нижнего и верхнего соответственно статоров, расположенные по отрицательному направлению оси ζ;

- электроды левого нижнего и верхнего соответственно статоров, расположенные по положительному направлению оси ζ;

- зазоры между ротором по оси положительному и отрицательному направлениям оси (по отношению к верхним и нижним электродам, смещенным по оси (в положительном направлении;

- зазоры между ротором по оси положительному и отрицательному направлениям оси ζ по отношению к верхним и нижним электродам, смещенным по оси ξ в отрицательном направлении;

- зазоры между ротором по оси положительному и отрицательному направлениям оси ζ по отношению к верхним и нижним электродам, смещенным по оси η в положительном направлении;

- зазоры между ротором по оси положительному и отрицательному направлениям оси ζ по отношению к верхним и нижним электродам, смещенным по оси η в отрицательном направлении,The following notation is used in the drawings: 1 - dynamically symmetric rotor, 2 - end suspension stator, 3 - end electrodes, 4 - housing, 5 - cover, 6 - mounting surfaces, 7 - alignment groove, 8 - lower insulating sleeve, 9 - upper insulating sleeve, 10 - lower planar suspension stator, 10 ′ - upper planar suspension stator, 11 - lower torque stator, 11 ′ - upper torque stator, 12 - electrodes of the lower suspension stator, 12 ′ - electrodes of the upper suspension stator, 13a, 13c, 13c - electrodes of the lower stator torque nta, 14 - rotor holes, 15 - three-phase voltage source, 16 - suspension stator inductor, 17 - suspension stator resistor, 18 - high-frequency suspension stator resistor, 19 - equivalent resistor of the suspension stator, 20 - end electrode choke, 21 - reference resistor of the end electrodes, 22 - source of high-frequency voltage of the end electrodes, 23 - equivalent resistor of the distributed resistance of the end electrodes, 24 - information processing device, 25 - the first phase sensor a rectifier (PCF) connected in the positive direction of the ξ axis, 26 is the second PCF connected in the negative direction of the ξ axis, 27 is the third PCV connected in the positive direction of the η axis, 28 is the fourth PCF connected in the negative direction of the η axis, 29 - the first voltage adder connected along the ξ axis, 30 - the first scaling element connected along the ξ axis, 31 - the second voltage adder connected along the η axis, 32 - the second scaling element connected along the η axis, 33 - low-frequency voltage source U _H , 34 - distribution the green resistance of the circuit in the positive direction of the ξ axis, 35 is the reference resistor in the positive direction of the ξ axis, 36 is the filter in the positive direction of the ξ axis, 37 is the voltage stabilizer in the positive direction of the ξ axis, 38 is the distributed resistance of the circuit in the negative direction of the ξ axis, 39 - reference resistor in the positive direction of the η axis, 40 - distributed resistance of the circuit in the positive direction of the η axis, 41 - fifth PCF in the positive direction of the η axis, 42 - third scaling element, 43 - reference the resistor in the negative direction of the η axis, 44 is the source of high-frequency voltage in the negative direction of the η axis, 45 is the distributed resistance of the circuit in the negative direction of the η axis; 46, 47 - the sixth and seventh PSF for the allocation of systematic signals about the current gaps

and

between the rotor in the positive and negative directions of the ζ axis with respect to the upper and lower electrodes offset along the second axis (in the negative direction; 48, 49 - the eighth and ninth PSF for highlighting signals about current gaps

and

between the rotor in the positive and negative directions of the ζ axis with respect to the upper and lower electrodes offset along the ξ axis in the negative direction; 50, 51 - the tenth and eleventh PSF for the allocation of systematic signals about the current gaps

between the rotor in the positive and negative directions of the ζ axis with respect to the upper and lower electrodes offset along the η axis in the positive direction; 52, 53 - the twelfth and thirteenth PSF for the allocation of systematic signals about the current gaps

between the rotor in the positive and negative directions of the axis (with respect to the upper and lower electrodes offset along the axis (in the positive direction, 54, 55, 56, 58, 59, 60, 67 - respectively, from the third to the ninth voltage adders; 57, 61 , 65 - respectively, from the first to the third subtraction device, 62 - the fourth scaling element for the signal

63 - fifth scaling element for the signal

64 is the sixth scaling element for the signal

66 - the seventh scaling element for the signal

0ζηξ is the right orthogonal coordinate system associated with the housing 4 of the device; 0ξ is the first measuring axis, 0η is the second measuring axis, 0ζ is the third measuring axis, W _ς , W _η , W _ξ are the components of the apparent acceleration vector of the point 0 of the center of gravity of the rotor 1, directed along the corresponding axes of the coordinate system ηζηξ; Ο ₁ is the point of the center of suspension of the rotor, ω _ξ is the absolute angular velocity of PO around the axis ξ; ω _η is the absolute angular velocity around the axis η; ω _ζ is the absolute angular velocity around the ζ axis; U, U _T are the output voltages from the reference stator resistor of the suspension and the reference resistor of the end electrodes, respectively; I ⁺ , I ^- are the contours of the electronics along the positive and negative directions of the ξ axis; ΙΙ ⁺ , ΙI ^- are the contours of the electronics along the positive and negative directions of the η axis; a, c, s, g - clamps of voltage sources; 3ξ _- , 3ξ ₊ - end electrodes for measuring rotor movements along the ξ axis with a negative and positive location coordinate along the η axis; 3′ξ _- , 3′ξ ₊ - end electrodes for measuring rotor movements along the ξ axis with a negative and positive location coordinate along the η axis;

- additionally introduced end electrodes for measuring rotor movements along the ξ axis with a positive coordinate along the ξ axis; 3η _- , 3η ₊ - end electrodes for measuring rotor movements along the η axis with a negative and positive location coordinate along the η axis; 3′η _- , 3′η ₊ - end electrodes for measuring rotor movements along the η axis with a negative and positive coordinate along the axis

- additionally introduced end electrodes for measuring rotor movements along the axis (with a positive coordinate along the ξ axis; R _{ξ +} , R _ξ- are reference resistors located in the measurement chain along the positive and negative directions of the ξ axis; R _{η +} , R _η- - reference resistors located in the measurement circuit in the positive and negative directions of the η axis; U _{η +} , U _η- are the output voltages in the positive and negative directions of the η axis; U _{ξ +} , U _ξ- are output voltages in the positive and negative directions of the ξ axis , xyz - systems and coordinates rigidly connected with the rotor; α, β - rotation angles of the rotor;

- the angular velocity of rotation of the rotor, Ω is the angular velocity of the own rotation of the rotor;

- electrodes of the right lower and upper stators, respectively, located in the negative direction of the ζ axis;

- electrodes of the left lower and upper stators, respectively, located in the positive direction of the ζ axis;

- gaps between the rotor along the axis of the positive and negative directions of the axis (with respect to the upper and lower electrodes offset along the axis (in the positive direction;

- gaps between the rotor along the axis of the positive and negative directions of the ζ axis with respect to the upper and lower electrodes offset along the ξ axis in the negative direction;

- gaps between the rotor along the axis of the positive and negative directions of the ζ axis with respect to the upper and lower electrodes offset along the η axis in the positive direction;

- gaps between the rotor along the axis of the positive and negative directions of the ζ axis with respect to the upper and lower electrodes offset along the η axis in the negative direction,

A gyroscope accelerometer (Fig. 1) with an electrostatic suspension of the rotor and complete primary information contains a dynamically and statically balanced symmetric rotor 1, partially or completely made of an electrically conductive material, for example polysilicon. The rotor 1 is flat, made in the form of a statically and dynamically balanced round plate with holes, its diameter can range from several tens of micrometers to units of millimeters with a thickness of from units to tens of micrometers. The rotor 1 is surrounded by stators, which include the end, lower and upper planar suspension stators, as well as the lower and upper torque stators. A suspension stator 2 is located in the equatorial plane of the rotor, consisting of an even number of identical flat end electrodes 3 located around the circumference and configured to create electrostatic forces to hold the rotor 1 along the axes 0ξ and 0η associated with the housing 4 of the device. A cover 5 is mounted on the housing 4. The surfaces 6, together with the adjustment groove 7, provide the alignment of the measuring axes 0ζ, 0η, 0ξ of the device with the corresponding building axes of the moving object 0ζηξ on which the device is mounted. The housing 4 and the cover 5 are made, for example, of pyrex or other electrically insulating material. The flat end electrodes 3 of the suspension stator 2 are fixed in the side walls of the lower insulating sleeve 8 located at the base of the housing 4. The cover 5 has an upper electrically insulating sleeve 9 having the same inner diameter with the diameter of the lower sleeve 8. In the description of the utility model, there are electrical leads, and also connecting wires and terminals, fasteners not shown. The lower and upper 10 and 10 ′, respectively, of the planar suspension stators, as well as the lower and upper 11 and 11 ′, respectively, of the torque stators are connected to the inner flat parts of the lower and upper bushings 8, 9. The stators have the same planar design, consist of an even number of electrodes - electrodes 12 of the lower stator of the suspension 10 and the same electrodes 12 ′ of the upper stator 10 ′ (not shown in plan view (BB section)), and also of electrodes 13 (13a, 13b , 13c, ...) of the lower stator 11 of the torque. The same electrodes, which are mirror images of the lower ones relative to the plane 0ξη, are part of the upper torque stator 11 ′. The stators 10, 10 ′, 11, 11 ′ can be made by the photolithographic method on the electrically insulating lower and upper bushings 8 and 9, respectively. In the same way, the end electrodes 3 of the suspension stator 2 can be made. The holes 14 are made on the rotor 1, which are necessary to ensure the conditions for creating a torque.

In FIG. 2 shows a part of the inclusion circuit of a gyroscope-accelerometer with an electrostatic suspension of the rotor. The three-phase voltage source 15, where the first electrode 13a of the lower torque stator 11 is connected to the first phase V _f1 , as well as all other electrodes 13a through two to the third lower and upper torque stators 11 and 11 ′, with the second phase V _f2 13b connected to the first electrode and all the other electrodes 13b through the third two of it, with the phase V _f3 first electrode 13c is connected to all the other two electrodes 13c through the third. A pair of adjacent adjacent electrodes 12 of both the lower and upper 10 and 10 ′ of the suspension stators are connected through a suspension stator choke 16 and a suspension stator reference resistor 17 to a high-frequency voltage source 18 (~ V ₂ ). In this case, the electrodes 12, the equivalent resistor 19, which is the equivalent of the active distributed resistance of the inductor 16, the high-frequency voltage source 18, and the capacitors formed by the spaces of the rotor 1, enter the closed circuit. Similar connections are made for the plates 12 ′ of the upper suspension stator. Similar connections for adjacent end electrodes 3 of stator 2 are shown in FIG. 2. They are connected through the inductor of the end electrodes 20 and the reference resistor 21 of the end electrodes to the high-frequency voltage source 22, the reference resistor 23 is the equivalent of the active resistance of the resonant circuit. Voltages U, U _T are output: the clamps of the reference resistors 17 and 21 are connected to the corresponding inputs of the PCF 25, 26, 27 and 28 of the information processing device 24.

Parts of the circuitry of FIG. 2-6, each of which consists of two end electrodes 3 (adjacent or interleaved), connected in series with a reference resistor 21, an end electrode choke 20, an equivalent resistor 23, a high-frequency voltage source 22, PSF 25, 26, 27, and 28, we will call measuring chains (for end electrodes along the оси axis (numbers 17, 16, 19, 18, respectively; in the text, the first numbering indicated above, i.e. 21, 20, 23, 22, is used. In this case, one input of each PSF is parallel connected terminals of the high-frequency voltage source 22 end O electrodes to the other input - terminals of the reference resistor 21, end electrodes, and its output is the output of the measuring chain.

Compared with the prototype, three measuring chains are additionally introduced in this device. Each measuring chain is assigned a number 3, 3 ′ for the end and 12, 12 ′ for the lower and upper planar electrodes, respectively. To the right of the number is the Greek letter, which means the direction of the measurement axis (ξ, η, ζ), to the right of it is the “+” or “-” sign - the gap sign in the positive or negative direction of the corresponding measurement axis, respectively. The lower Greek letters α, β, or Russian n, in mean the angle for the determination of which the measurement is made and it is made below or above the rotor, respectively.

элементов 26, 20, 21 и 22, выполнена с возможностью измерения перемещения ротора 1 по оси ξ. Вторая цепочка, состоящая из электродов

элементов 20, 21, 22, 27, выполнена с возможностью измерения перемещений ротора 1 вдоль оси η. Третья измерительная и силовая цепочка, состоящая из электродов

, элементов 33, 34, 35 и 37, выполнена с возможностью возбуждения низкочастотных колебаний ротора 1 с круговой частотой Ω_Β и измерения параметров этих колебаний с выделением посредством фильтра 36 постоянной составляющей перемещения по оси ξ. Дополнительные электроды выполнены одинаковой конструкции с основными.The first chain consisting of additional electrodes

elements 26, 20, 21 and 22, is configured to measure the movement of the rotor 1 along the axis ξ. The second chain consisting of electrodes

elements 20, 21, 22, 27, is configured to measure the movements of the rotor 1 along the axis η. The third measuring and power circuit, consisting of electrodes

, elements 33, 34, 35 and 37, is configured to excite low-frequency vibrations of the rotor 1 with a circular frequency Ω _Β and measure the parameters of these vibrations with the allocation of a constant component of displacement along the ξ axis through the filter 36. Additional electrodes are made of the same design with the main ones.

In FIG. Figure 4 shows the contours I ⁺ and I ^- are measuring chains for measuring gaps in end electrodes with positive and negative coordinates of their location along the ξ axis.

Similarly, 3η + and 3′η + electrodes with positive coordinates along the second measuring axis (i.e., the 0η axis) are connected to their ΙΙ + measuring chain, 3η– and 3′η- electrodes with negative coordinates along the measuring axis 0η are connected to your measuring chain II-.

In FIG. 4, six measurement chains stand out.

два электрода:

два электрода

Кроме того, введена схема задания гармонического низкочастотного напряжения U_H на пластины-электроды

являющаяся первой дополнительно введенной измерительной цепочкой. Она предназначена для возбуждения колебаний ротора 1 по оси Οξ и состоит из источника 33 указанного низкочастотного напряжения, из распределенного сопротивления цепи 34 по положительному направлению оси ξ, эталонного резистора 35 по положительному направлению оси ξ, фильтра 36 по положительному направлению оси ξ, стабилизатора напряжения 37 по положительному направлению оси ξ. В нее входит схема компенсации постоянного смещения ротора 1 вдоль оси Οξ, состоящая из зажимов а и в, связанных с выходами а и в, фильтра 36 по положительному направлению оси ξ, распределенного сопротивления 34 по положительному направлению оси ξ, эталонного резистора 35 по положительному направлению оси ξ и торцевых электродов

In the device, as indicated above, 6 power end electrodes 3 are additionally introduced on the body and rotor (Fig. 4) - two electrodes:

two electrodes:

two electrodes

In addition, a scheme is introduced for setting the harmonic low-frequency voltage U _H on the plate-electrodes

which is the first additionally introduced measuring chain. It is designed to excite oscillations of the rotor 1 along the Οξ axis and consists of a source 33 of the indicated low-frequency voltage, from the distributed resistance of the circuit 34 in the positive direction of the ξ axis, reference resistor 35 in the positive direction of the ξ axis, filter 36 along the positive direction of the ξ axis, voltage stabilizer 37 in the positive direction of the ξ axis. It includes a compensation scheme for the constant displacement of the rotor 1 along the Οξ axis, consisting of clamps a and b connected to the outputs a and b, a filter 36 in the positive direction of the ξ axis, distributed resistance 34 in the positive direction of the ξ axis, and a reference resistor 35 in the positive direction axis ξ and end electrodes

введены электроды (с возможностью создания постоянной силы, компенсирующей ее от воздействия U_H)

распределенное сопротивление цепи 38 по положительному направлению оси ξ, зажимы а, в схемы I^-. При этом выходы этих измерительных цепочек с положительными и отрицательными координатами торцевых электродов подвеса первой измерительной оси 0ξ соединены с первым и вторым входами соответственно первого сумматора, 29 выход которого соединен с входом первого масштабирующего элемента 30, выход которого является выходом по компоненту W_ξ кажущегося ускорения.Similarly, by the negative value of the coordinate of the first measuring axis 0ξ, diametrically located to the additionally introduced electrodes

introduced electrodes (with the possibility of creating a constant force that compensates for it from exposure to U _H )

distributed resistance of circuit 38 in the positive direction of the ξ axis, terminals a , in circuit I ^- . The outputs of these measuring chains with positive and negative coordinates of the end electrodes of the suspension of the first measuring axis 0ξ are connected to the first and second inputs of the first adder, 29, the output of which is connected to the input of the first scaling element 30, the output of which is the output of the apparent acceleration component W _ξ .

The output of the third PCF 27 connected in the positive direction of the η axis, and the output of the fourth PCF 28 connected in the negative direction of the η axis, which are the outputs of the measuring chains of the suspension end electrodes with positive and negative coordinates, respectively, along the second measuring axis, are connected to the first and second inputs of the second voltage adder 31, the output of which is connected to the input of the second scaling element 32, the output of which is the output of the apparent acceleration component W _η in the form of an estimate

по третьему компоненту угловой скорости ПО, содержащая две пары диаметрально расположенных торцевых электродов 3′ξ-,

и 3′ξ+,

пару электродов

с подключенным к ним эталонным резистором 39 по положительному направлению оси η, распределенное сопротивление 40 этой цепочки по положительному направлению оси η, пятый ФЧВ 41 по положительному направлению оси η, входы которого соединены с фильтром 36, а выход с третьим масштабирующим элементом 42, выход которого служит для съема информации по третьему компоненту

угловой скорости подвижного объекта.A measuring chain ΙI + has also been introduced, made with the possibility of measuring rotor vibrations along the second measuring axis Οη and evaluating the output signal

the third component of the angular velocity PO containing two pairs of diametrically located end electrodes 3′ξ-,

and 3′ξ +,

a pair of electrodes

with a reference resistor 39 connected to them in the positive direction of the η axis, distributed resistance 40 of this chain in the positive direction of the η axis, fifth PCF 41 in the positive direction of the η axis, the inputs of which are connected to the filter 36, and the output with the third scaling element 42, the output of which serves to retrieve information on the third component

angular velocity of a moving object.

In FIG. 5, 6, 8 measuring chains are presented, similar in structure. Each consists of a pair of plate-electrodes 12ζ with corresponding indices, an inductor 20, a reference resistor 43 in the negative direction of the η axis, a high-frequency voltage source 44 in the negative direction of the η axis, and a distributed resistance 45 in the negative direction of the η axis. The terminals 0, II of the reference resistor 43 and the terminals 0, I of the high-frequency voltage source 44 are connected to the first and second inputs of the corresponding phase-sensitive rectifiers 46-53 (PCF). Numbers are indicated for elements of only one measuring chain, in the rest - the same element numbers. The outputs of the measuring chains are the outputs of the PCF 46-53.

и

между ротором по оси положительному и отрицательному направлениям оси ξ по отношению к верхним и нижним электродам, смещенным по оси η в отрицательном направлении, подключены к входам четвертого сумматора напряжений 55. Выходы восьмого и девятого ФЧВ 48 и 49 для выделения систематических сигналов о текущих зазорах

и

по положительному и отрицательному направлениям оси ζ между ротором и верхним и нижним электродами, смещенными по оси ξ в отрицательном направлении, подключены к входам шестого и восьмого сумматоров напряжений 58 и 60. Выходы десятого и одиннадцатого ФЧВ 50 и 51 для выделения систематических сигналов о текущих зазорах

по оси положительному и отрицательному направлениям оси ζ между ротором и верхним и нижним электродами, смещенными по оси η в положительном направлении, подключены к пятому сумматору напряжений 56. Выходы двенадцатого и тринадцатого ФЧВ 52 и 53 для выделения систематических сигналов о текущих зазорах

по положительному и отрицательному направлениям оси ζ между ротором и верхним и нижним электродами, смещенными по оси ξ в положительном направлении, подключены к седьмому сумматору напряжений 59. При этом одновременно выходы девятого и тринадцатого ФЧВ 49 и 53 подключены к двум входам третьего сумматора напряжений 54.The outputs of the sixth and seventh PSF 46 and 47 to highlight systematic signals about the current gaps

and

between the rotor along the axis of the positive and negative directions of the ξ axis with respect to the upper and lower electrodes offset along the η axis in the negative direction, are connected to the inputs of the fourth voltage adder 55. The outputs of the eighth and ninth PSFs 48 and 49 to highlight systematic signals about the current gaps

and

in the positive and negative directions of the ζ axis between the rotor and the upper and lower electrodes offset along the ξ axis in the negative direction, are connected to the inputs of the sixth and eighth voltage combiners 58 and 60. The outputs of the tenth and eleventh PCFs 50 and 51 to highlight systematic signals about current gaps

along the axis of the positive and negative directions of the ζ axis between the rotor and the upper and lower electrodes offset along the η axis in the positive direction, are connected to the fifth voltage adder 56. The outputs of the twelfth and thirteenth PSFs 52 and 53 to highlight systematic signals about the current gaps

in the positive and negative directions of the ζ axis between the rotor and the upper and lower electrodes offset along the ξ axis in the positive direction, are connected to the seventh voltage adder 59. At the same time, the outputs of the ninth and thirteenth PCFs 49 and 53 are connected to two inputs of the third voltage adder 54.

компонента

угловой скорости ПО.The outputs of the fourth and fifth voltage adders 55 and 56 are connected to the inputs of the first subtractor 57, so that the signal of the fifth voltage adder 56 is subtracted from the signal of the fourth voltage adder 55. The output of the first subtractor 57 is connected to the input of the fourth scaling element 62, the output of which is the estimate

component

angular velocity software.

The outputs of the sixth and seventh voltage combiners 58 and 59 are connected to the input of the ninth voltage combiner 67, the output of which is connected to the input of the sixth scaling element 64, the output of which is the estimate

угловой скорости ПО.The output of the seventh voltage adder 59 is connected to the input of the second subtractor 61, the inverting input of which is connected to the output of the sixth voltage adder 58. The output of the fifth scaling device 63, the input of which is connected to the output of the second subtractor 61, is proportional to the estimate

angular velocity software.

The input of the third subtractor 65 is connected to the output of the third voltage adder 54, the inverting input is connected to the output of the eighth voltage adder 60. The output of the third subtractor 65 is connected to the input of the seventh scaling device 66, the output of which is a voltage proportional to the gap estimate

A gyroscope accelerometer with an electrostatic suspension of the rotor operates as follows. Before turning on the power, the device is installed on the software housing, orientated with the help of mounting surfaces 6 and the adjustment groove 7, then fixed with screws through the holes of the rotor 14. When turning on the power sources of high-frequency voltage, the stators 18 (22) of the suspension 2, 3, 10, 10 ′, 12 and 12 ′ set the rotor 1 to its original position, i.e. rotor 1 begins to levitate (soar) relative to the stators under the action of establishing electrostatic forces. The cover 5 together with the housing 4 and the lower and upper insulating sleeves 8, 9 ensure the tightness of the internal cavity of the device. After that, the information processing device 24 connects the three-phase supply voltage to the upper 11 ′ and lower 11 torque stators. Under the influence of tangential electrostatic forces from the electrodes 13a, 13b, 13c of the lower suspension stator and holes 14, the rotor 1 accelerates and acquires an angular velocity Ω and a kinetic moment H equal to H = JΩ, where J is the polar moment of inertia of the rotor 1. When the PO moves, accelerations W _ζ , W _η , W _ξ and absolute angular velocities ω _ζ , ω _η , ω _ξ , which are measured by the claimed device.

When moving software with accelerations W_ξ, W_ηinertial forces arise, which in steady state are balanced by the resulting forces F_ξ, Fη electrostatic suspension. As a result, we get:

where m is the mass of the rotor.

On the one hand, the forces F _ξ , F _{η are} proportional to the voltage increments between the electrodes of the stator and rotor Ι _ξ , Ι _η flowing through the suspension electrodes in each corresponding pair. On the other hand, these currents are proportional to the linearity of the suspension characteristic, which occurs for small displacements, displacements (and η:

where Κ _ξ , Κ _η are the stiffness coefficients of the suspension along the corresponding axes.

From (1) and (2) we have:

Formulas (3) form an algorithm for converting signals about the corresponding displacements ξ and η of the rotor 1 relative to the initial position into signals of apparent accelerations. Below they are expressed through stress.

From FIG. 4 and FIG. 6 it follows that signals about movements along the coordinate ξ are received by the voltage U _{ξ +} at the output of the PCF 25 along the positive direction of the axis ξ of the measuring chain Ι +, including electrodes 3ξ + and 3′ξ + and consisting of elements 20, 21, 22 of the end stator suspension 3, as well as the voltage U _ζ- from the output of the PCF 26 of a similar measuring chain, including similar elements 20, 21, 22, 23 (in Fig. 2, 16, 17, 18, 19 are indicated). At the output of the voltage adder 29, the inputs of which receive signals from the first and second PCFs 25 and 26, there is a voltage U _ξ equal to:

кажущегося ускоренияAfter the first scaling element 30, a component estimate is obtained.

apparent acceleration

where χ _ξ is the transmission coefficient of the measuring chain along the Οξ axis of the rotor.

компонента W_η кажущегося ускорения:Measuring chains II + and II- react to acceleration W _η . Similarly, from the output of the second voltage adder 31, the input of which receives signals from the third and fourth PCFs 27 and 28, there is a voltage U _η equal to U _η = U _η- -U _{η +} , which is converted to the estimate at the output of the second scaling element 32

component W _{η of} apparent acceleration:

where χ _η is the transmission coefficient of the measuring chain along the Ο axis (of the rotor.

Let us explain the process of determining the signal about the angular velocity ω _ζ (Fig. 4) (The theoretical premise is described in the article - V. Zhuravlev. Inertial pendulum-type inertial navigation system (SINS MT) // Izv. - RAS. MTT., 2014, No. 1, p. 6-17.). To do this, from a source 33 of harmonic low-frequency voltage U _H , the amplitude of which is stabilized by a voltage stabilizer 37, through an distributed resistance 34 in the positive direction of the ξ axis and reference resistor 35 in the positive direction of the ξ axis, an alternating voltage signal is supplied to the end electrodes 3ξ + and 3′ξ + , which excites the oscillations of the rotor 1 along the Οξ axis through the electrostatic interaction forces F _ξ .

When applying voltage U _H = U _a sinΩ _to t to the indicated electrodes, rotor vibrations arise due to electrostatic forces, which follows from the equation of motion

In the steady state, the rotor motion is determined by the formulas

where u_a - amplitude; Ω_Β - frequency of the excitation voltage; C is the capacitance between two successively connected adjacent electrodes with electrode-rotor gaps; l_o - initial end clearance; Ω₀ - the frequency of the intrinsic undamped rotor vibrations along the Οξ axis; h is the attenuation index; kξ - suspension stiffness coefficient; φ is the phase shift between the coordinate of the oscillations of the rotor along the Οξ axis and the voltage U_H, n is the damping coefficient.

создающие постоянную электростатическую компенсирующую силу.The presence of a constant displacement of the rotor 1 is eliminated by a part of the circuit containing the filter 36 along the positive direction of the ξ axis, clamps a, b and the distributed resistance 38 connected in series and also the electrodes

creating a constant electrostatic compensating force.

The Coriolis force arising from the interaction of the relative velocity ξ and the angular velocity ω _ζ and the rotor mass m is equal to:

периодической и вызывает колебания ротора вдоль второй измерительной оси Οη, воспринимаемые электродами. Амплитуда колебаний пропорциональна величине, а сдвиг фазы несет информацию о знаке этой скорости. Амплитуда и фазовый сдвиг φ колебаний по ξ определяют с помощью сигналов электродов

с помощью второго ФЧВ 26.She is due

periodic and causes oscillations of the rotor along the second measuring axis Οη, perceived by the electrodes. The amplitude of the oscillations is proportional to the value, and the phase shift carries information about the sign of this speed. The amplitude and phase shift φ of oscillations in ξ are determined using the signals of the electrodes

using the second PSF 26.

и

через эталонный резистор 39 и распределенное сопротивление 40 по положительному направлению оси η подводят к одним входам, а опорное напряжение U_H от зажимов ж, з - к другим входам пятого ФЧВ 41. Его выход соединен со входом третьего масштабирующего элемента 42, выходом которого является оценка

соответствующего компонента ω_ζ угловой скорости ПО.Signals from the electrodes

and

through the reference resistor 39 and the distributed resistance 40 along the positive direction of the η axis, lead to one input, and the reference voltage U _H from the terminals w, s to the other inputs of the fifth PCF 41. Its output is connected to the input of the third scaling element 42, the output of which is the estimate

corresponding component ω _{ζ of the} angular velocity of PO.

прикладывающим постоянную силу, компенсирующую противоположно направленную силу от электродов:

The filter 36 along the positive direction of the axis ξ generates a constant voltage, which through the terminals a , b and the distributed resistance 38 is supplied to the electrodes

applying a constant force compensating for the oppositely directed force from the electrodes:

The principle of signal extraction by acceleration W _ζ , angular velocities ω _ξ , ω _{η is} illustrated in FIG. 5 and FIG. 6, 7.

The acceleration of the object along the 0ζ axis leads to the appearance of an inertial force, which is balanced by electrostatic forces, so that we have

where Κ _ζ is the stiffness coefficient of the electrostatic suspension of rotor 1 along the 0 _ζ axis. If the object, and therefore the body 4 rotates with angular velocities ω _ξ , ω _η , then the gyroscopic moments that arise as a result of this are balanced by the moments of forces Μ ₍ and Μ ₍ electrostatic suspension:

where k _α , k _β are the stiffness coefficients of the suspension at the corresponding deflection angles of the rotor 1 from the initial position, as can be seen from FIG. 5, 6, 7.

до

включенных последовательно с элементами 42, 43, 44, 45. Сигналы с их выходов подают на ФЧВ с 46 по 53.The implementation of the above relationships is illustrated based on FIG. 5 and FIG. 6 using eight measuring chains containing eight pairs of electrodes from

before

connected in series with elements 42, 43, 44, 45. The signals from their outputs are fed to the PCF from 46 to 53.

The signals of the pairs of electrodes 12 and 12 ′ of the lower and upper stators of the suspension 10 and 10 ′, respectively, symmetric with respect to the axes 0ζ and 0η, contain information on the displacements ζ and the rotation angles of the rotor α and β and, therefore, on the measured motion parameters ω _ξ , ω _η , W _ζ . By calculating the sums and differences of the signals from the outputs of the measuring chains containing pairs of electrodes located with positive and negative coordinates 0 _ζ and 0η, we obtain the necessary information about ω _ξ , ω _η , W _ζ .

Changes due to the displacement of the rotor ξ along the axis οζ and the rotations α, β between the movable electrodes of the rotor and the stationary lower and upper electrodes of the stators at points A, A ₁ , B, B _{1, the} gaps are described by the following relationships:

- for the lower electrodes (Fig. 7)

- for the upper electrodes (Fig. 7)

(формула 4d) между зазором и соответствующей парой верхних плоских электродов

смещенных от ПО вдоль оси οη, поступает на вход О, II шестого ФЧВ 46, а на вход О, I поступает опорное напряжение от источника высокочастотного напряжения 22. С выхода шестого ФЧВ 46 выпрямленное напряжение поступает на один из входов четвертого сумматора 55. На его второй вход поступает выпрямляющее напряжение с седьмого ФЧВ 47, на вход О, II которого подают напряжение с эталонного резистора 43, пропорциональное переменному зазору

(формула 3d). В свою очередь, напряжение с эталонных резисторов, сигналы которых пропорциональны

и

поступают на входы О, II десятого и одиннадцатого ФЧВ 50 и 51 соответственно, а сигналы с их входов суммируются в пятом сумматоре напряжений 56. Сигнал с выхода четвертого сумматора напряжений 55 поступает на основной, а сигнал с выхода пятого сумматора 56 поступает на инвертирующий вход первого устройства вычитания 57, с выхода которого напряжение подводят к четвертому масштабирующему элементу 62 в соответствии с алгоритмом:Consider the operation of the circuit elements of FIG. 6 used to determine the acceleration W _ζ . In view of the circuitry of FIG. 7 movements and rotations of the rotor 1, as well as formulas (11), (12), we note that the voltage from the reference resistor 21 is proportional to the changing gap

(formula 4d) between the gap and the corresponding pair of upper flat electrodes

offset from the PO along the οη axis, it goes to the input O, II of the sixth PSF 46, and the input O, I receives the reference voltage from the high-frequency voltage source 22. From the output of the sixth PSF 46, the rectified voltage is supplied to one of the inputs of the fourth adder 55. At its the second input receives the rectifying voltage from the seventh PCF 47, to the input O, II of which voltage is supplied from the reference resistor 43, proportional to the variable gap

(3d formula). In turn, the voltage from the reference resistors whose signals are proportional

and

arrive at inputs O, II of the tenth and eleventh PSFs 50 and 51, respectively, and the signals from their inputs are summed in the fifth voltage adder 56. The signal from the output of the fourth voltage adder 55 is fed to the main one, and the signal from the output of the fifth adder 56 is fed to the inverting input of the first a subtraction device 57, the output of which the voltage is applied to the fourth scaling element 62 in accordance with the algorithm:

- оценка угла α; R - радиус неподвижных электродов.Where

- estimate of the angle α; R is the radius of the stationary electrodes.

компонента ω_ξ угловой скорости ПО по алгоритму, следующему из уравнений (10):In the fourth scaling element 62, an estimate is calculated

the component ω _{ξ of the} angular velocity of the software according to the algorithm following from equations (10):

является оценкой абсолютных угловых скоростей объекта по компоненту ω_ξ.where K _α is the stiffness coefficient of the electrostatic suspension along the angle α. Signal

is an estimate of the absolute angular velocities of the object with respect to the component ω _ξ .

смещенные вдоль оси οξ относительно центра подвеса в положительном и отрицательном направлениях на величину R. Напряжения с эталонных резисторов, пропорциональные указанным выше зазорам, подаются на входы О, II пар восьмого и девятого ФЧВ 48, 49, а также двенадцатого и тринадцатого ФЧВ 52,53. Напряжения выходов восьмого и девятого ФЧВ 48, 49 поступают на входы шестого сумматора напряжений 58, а сигнал с его выхода поступает на инвертирующий вход второго устройства вычитания 61. Выходы пары двенадцатого и тринадцатого ФЧВ 52, 53 поступают на входы седьмого сумматора напряжений 59, а его выходной сигнал поступает на прямой вход второго устройства вычитания 61. На его выходе сигнал пропорционален оценке угла

определяемой по алгоритму:In the work of the device to determine the component of the angular velocity ω _η , electrodes are used to measure variable gaps

offset along the οξ axis relative to the center of the suspension in the positive and negative directions by R. The voltages from the reference resistors, proportional to the above gaps, are applied to the inputs O, II of the pairs of the eighth and ninth PSF 48, 49, as well as the twelfth and thirteenth PSF 52.53 . The output voltages of the eighth and ninth PSFs 48, 49 are fed to the inputs of the sixth voltage combiner 58, and the signal from its output is fed to the inverting input of the second subtractor 61. The outputs of the twelfth and thirteenth PSFs 52, 53 are fed to the inputs of the seventh voltage combiner 59, and its the output signal goes to the direct input of the second subtraction device 61. At its output, the signal is proportional to the angle estimate

determined by the algorithm:

а на выходе пятого масштабирующего элемента 63 напряжение, пропорциональное оценке

определяемой на основе уравнений (10) по алгоритму:From the output of the second subtraction device 61 remove the voltage according to the assessment

and at the output of the fifth scaling element 63, the voltage is proportional to the estimate

determined on the basis of equations (10) according to the algorithm:

является оценкой абсолютной угловой скорости по компоненту ω_η.Signal

is an estimate of the absolute angular velocity from the component ω _η .

эталонные резисторы 43, напряжения которых пропорциональны указанным зазорам и поступающие на пары восьмого и девятого ФЧВ 48,49, а также двенадцатого и тринадцатого ФЧВ 52,53. Сигналы шестого и седьмого сумматоров напряжений 58 и 59 складывают в девятом сумматоре 67 по алгоритму:In the work of the device to determine the component ω _{ζ, the} apparent acceleration of the object involves electrodes measuring variable gaps

reference resistors 43, the voltages of which are proportional to the indicated gaps and supplied to the pairs of the eighth and ninth PSF 48.49, as well as the twelfth and thirteenth PSF 52.53. The signals of the sixth and seventh adders voltage 58 and 59 add in the ninth adder 67 according to the algorithm:

- оценка перемещения центра тяжести ротора относительно центра подвеса. Выходной сигнал девятого сумматора напряжений 67 поступает на вход шестого масштабирующего элемента 64, в котором по следующему алгоритму (вида (9)) определяют оценку компонента

кажущегося ускорения ПО.Where

- assessment of the displacement of the center of gravity of the rotor relative to the center of the suspension. The output signal of the ninth voltage adder 67 is fed to the input of the sixth scaling element 64, in which, according to the following algorithm (of the form (9)), the component estimate

apparent software acceleration.

не являющейся выходной информацией, а используемой в технологических целях.This signal is the sixth output of the device. Elements 54, 60, 65, 66 define the initial clearance (Fig. 7) in the device as an estimate

not being output, but used for technological purposes.

Moreover, the complete primary inertial information is such that it contains three components of the absolute angular velocity vector and three components of the apparent acceleration vector of the moving object. It is necessary and sufficient for the complete solution of the problems of determining three orientation angles and three coordinates of an object’s location in space according to the differential equations of the strapdown inertial navigation system.

The technical result of the utility model is that for the first time in one gyroscope - an accelerometer in the form of a rotor with three degrees of freedom, three components of the apparent acceleration and three components of the absolute angular velocity of the software are measured, that is, the complete primary inertial information. Only with its availability is it possible to solve the problem of determining three orientation angles and three coordinates of the software location. Previously, to determine the complete primary inertial information, it was necessary to use two devices, i.e. two gyroscopes - an accelerometer based on the prototype of this utility model. From the foregoing, it is clear that, in addition, the mass and dimensions of the device for determining the complete primary information are reduced.

Claims (1)

A gyroscope-accelerometer with an electrostatic suspension of the rotor and complete primary information, containing a dynamically and statically balanced rotor in the form of a round plate with holes, having electrically conductive parts and surrounded by stators, which include the end, lower and upper planar suspension stators, as well as the lower and upper stators of torque, while the end stator of the suspension consists of an even number of flat electrodes located in the equatorial plane of the rotor around the circumference and fixed in side the walls of the lower electrically insulating sleeve, mounted in the housing, the lower and upper identical planar suspension stators, each made in the form of an even number of flat electrodes arranged in a circle and mounted on the lower and upper electrically insulating bushings, the latter being mounted in the cover of the gyroscope-accelerometer, in addition , the lower and upper planar torque stators, fixed in the lower and upper electrically insulating sleeves, consisting of flat electrodes, are connected in three sections so that in every sec The electrodes are located in two adjacent to the third, sections are connected to three phases of the AC source, in addition, each pair of adjacent flat electrodes and a reference resistor connected in series with a high-frequency voltage source, inductor, and phase-sensitive rectifier form a measuring chain, the first and second inputs of the phase-sensitive rectifier are connected in parallel with the high-frequency voltage source and the reference resistor, respectively, and its output is I output the measuring chain,
the outputs of the measuring chains with positive and negative coordinates of the end electrodes of the suspension of the first measuring axis are connected to the first and second inputs of the first adder, the output of which is connected to the input of the first scaling element, its output is the output of the apparent acceleration component W _ξ ,
the outputs of the measuring chains of the end electrodes of the suspension with positive and negative coordinates, respectively, along the second measuring axis are connected using measuring chains with the first and second inputs, respectively, of the second adder, its output is connected to the input of the second scaling device, the output of which is the output of the apparent acceleration component W _η ,
characterized in that
additionally introduced measuring chains containing two pairs of diametrically located end electrodes in the positive and negative direction of the third measuring axis, a pair of electrodes in the positive direction of the second measuring axis, a reference resistor in the positive direction of the second measuring axis, the distributed resistance of this chain in the positive direction of the second measuring axis, PSF in the positive direction of the second measuring axis, the inputs of which are connected to the filter, t its scaling element, the output of which serves to retrieve information on the third component ω _{ζ of the} angular velocity of the moving object,
measuring chains along the third measuring axis are also introduced, made with the possibility of evaluating the gaps between the rotor and the upper and lower flat electrodes of the stators, offset along the second measuring axis in the negative direction, the outputs of these measuring chains are connected to the inputs of the fourth voltage adder, the output of which is connected to the first input the first subtraction device, the output of the fifth voltage adder is connected to its second inverting input, the inputs of which are connected to the outputs of two measuring circuits pens on the third measuring axis, made with the possibility of evaluating the gaps between the rotor and the upper and lower flat electrodes of the stators, offset along the second measuring axis in the positive direction, while the output of the first subtractor is connected to the input of the fourth scaling element, the output of which is the output along the ω component _ξ angular velocity
the outputs of two measuring chains made with the possibility of evaluating the gaps on the third measuring axis between the rotor and the upper and lower flat electrodes of the stators offset in the negative direction of the first measuring axis are connected to the inputs of the sixth adder, the outputs of two measuring chains made with the possibility of evaluating the gaps of the third the measuring axis between the rotor and the upper and lower flat electrodes of the stators, offset in the positive direction of the first measuring axis, are connected to the inputs and the seventh voltage adder, the outputs of the sixth and seventh voltage adders are connected to the input of the ninth adder, the output of which is connected to the input of the sixth scaling element, the output of which is the apparent software acceleration component W _ζ ,
also the outputs of the sixth and seventh adders are connected to the first and second inputs of the second subtraction device, the output of which is connected to the input of the fifth scaling element, its output is the output along the component ω _{η of} absolute angular velocity.

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