RU2217696C2 - Method for controlling roughness degree of article surface - Google Patents

Method for controlling roughness degree of article surface Download PDF

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Publication number
RU2217696C2
RU2217696C2 RU2002100480/28A RU2002100480A RU2217696C2 RU 2217696 C2 RU2217696 C2 RU 2217696C2 RU 2002100480/28 A RU2002100480/28 A RU 2002100480/28A RU 2002100480 A RU2002100480 A RU 2002100480A RU 2217696 C2 RU2217696 C2 RU 2217696C2
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RU
Russia
Prior art keywords
acoustic
pulse
light
pulses
roughness
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RU2002100480/28A
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Russian (ru)
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RU2002100480A (en
Inventor
Е.В. Леун
В.Е. Загребельный
А.В. Шулепов
С.А. Шевченко
Ю.В. Серкова
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Московский государственный технологический университет "СТАНКИН"
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Priority to RU2002100480/28A priority Critical patent/RU2217696C2/en
Publication of RU2002100480A publication Critical patent/RU2002100480A/en
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Abstract

FIELD: measuring processes and equipment, namely optical methods for controlling roughness of article surface. SUBSTANCE: method comprises steps of illuminating controlled surface by means of light pulse Tl; passing scattered/reflected irradiation through acoustic-optical modulator in which traveling acoustic pulse Tac propagates. Irradiation stopped down by said acoustic pulse is registered by means of photodetector. It provides synchronized pulse modes of illumination and excitement of above mentioned modulator and possibility for realizing controlled slow detailed scanning of investigated scattered irradiation step by step from one cycle to another. Roughness parameters of article surface are evaluated according to fluctuation of measured parameters of light flux of controlled part and of reference sample. EFFECT: enlarged functional possibilities, improved accuracy of measurements. 3 cl, 4 dwg

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Claims (3)

1. Способ контроля шероховатости поверхности изделия, заключающийся в том, что направляют коллимированное световое излучение на контролируемую поверхность, регистрируют с помощью фотодетектора интенсивность отраженного от контролируемой поверхности излучения и определяют шероховатость поверхности изделия, направляют на акустооптический модулятор излучение, рассеянное от контролируемой поверхности, фокусируют с помощью линзы излучения, продифрагированное и непродифрагированное на бегущем акустическом импульсе, производят Фурье-преобразование амплитудного распределения излучения в фокальной плоскости линзы, определяют индикатриссу рассеяния путем установки фотодетектора на первый порядок дифракции и по результатам сравнения ее с эталонной судят о шероховатости поверхности изделия, отличающийся тем, что световое излучение формируют в импульсном режиме, синхронизируют бегущие акустические и световые импульсы.1. The method of controlling the surface roughness of the product, which consists in sending collimated light radiation to the controlled surface, registering the intensity of the radiation reflected from the controlled surface using a photo detector and determining the surface roughness of the product, directing radiation scattered from the controlled surface to the acousto-optical modulator, focusing with using a radiation lens, diffracted and non-diffracted on a traveling acoustic pulse, produce Fourier reobrazovanie amplitude distribution of light at the focal plane of the lens, determined indicatrix of scattering by mounting the photodetector on the first order of diffraction and by comparing it with a reference judge the roughness of surface of the article, characterized in that the light radiation is formed in a pulsed mode, synchronized traveling acoustic and light pulses. 2. Способ по п.1, отличающийся тем, что дополняют бегущий акустический импульс другими акустическими импульсами и формируют для каждого светового импульса импульсную последовательность из нескольких акустических импульсов.2. The method according to claim 1, characterized in that complement the traveling acoustic pulse with other acoustic pulses and form for each light pulse a pulse sequence of several acoustic pulses. 3. Способ по пп.1 и/или 2, отличающийся тем, что управляют параметрами импульсной последовательности акустических импульсов и/или параметрами процесса синхронизации акустических и световых импульсов.3. The method according to claims 1 and / or 2, characterized in that they control the parameters of the pulse sequence of acoustic pulses and / or the parameters of the synchronization process of acoustic and light pulses.
RU2002100480/28A 2002-01-08 2002-01-08 Method for controlling roughness degree of article surface RU2217696C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2002100480/28A RU2217696C2 (en) 2002-01-08 2002-01-08 Method for controlling roughness degree of article surface

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Application Number Priority Date Filing Date Title
RU2002100480/28A RU2217696C2 (en) 2002-01-08 2002-01-08 Method for controlling roughness degree of article surface

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RU2002100480A RU2002100480A (en) 2003-09-27
RU2217696C2 true RU2217696C2 (en) 2003-11-27

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Effective date: 20040109