JP2000275107A5 - - Google Patents
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- JP2000275107A5 JP2000275107A5 JP1999084789A JP8478999A JP2000275107A5 JP 2000275107 A5 JP2000275107 A5 JP 2000275107A5 JP 1999084789 A JP1999084789 A JP 1999084789A JP 8478999 A JP8478999 A JP 8478999A JP 2000275107 A5 JP2000275107 A5 JP 2000275107A5
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Description
【発明の名称】レーザ周波数測定方法、レーザ周波数制御方法、レーザ周波数測定装置及びレーザ光発生装置Patent application title: Laser frequency measuring method, laser frequency control method, laser frequency measuring device and laser light generator
【０００１】
【発明の属する技術分野】
本発明は、周波数間隔一定の側帯波をもつレーザ光からなる光周波数コムを利用したレーザ周波数測定方法、レーザ周波数制御方法、レーザ周波数測定装置及びレーザ光発生装置に関する。[0001]
Field of the Invention
The present invention relates to a laser frequency measurement method, a laser frequency control method, a laser frequency measurement apparatus, and a laser light generation apparatus using an optical frequency comb made of laser light having sideband waves with constant frequency intervals.
【０００４】
本発明の目的は、このような従来の問題点に鑑み、光周波数コムと被測定レーザ光をヘテロダイン検波してその差周波数を測定あるいは制御するに当たり、ＳＮ比を改善して十分な測定精度を確保し、広範囲に亘ってレーザ周波数を測定あるいは制御することができるようにしたレーザ周波数測定方法、レーザ周波数制御方法、レーザ周波数測定装置及びレーザ光発生装置を提供することにある。[0004]
In view of such conventional problems, an object of the present invention is to heterodyne detection of an optical frequency comb and a laser beam to be measured and measure or control the difference frequency thereof. A laser frequency measuring method, a laser frequency control method, a laser frequency measuring device, and a laser light generator capable of securing and measuring or controlling a laser frequency over a wide range.
【０００５】
【課題を解決するための手段】
本発明に係るレーザ周波数測定方法は、基準レーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを生成し、上記光周波数コムから光第２高調波発生により得られる光第２高調波成分と被測定レーザ光とのヘテロダイン成分を検出し、 上記ヘテロダイン成分の検出出力に基づいて上記被測定レーザ光の周波数を測定することを特徴とする。
また、本発明に係るレーザ周波数測定方法は、第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを生成し、上記光周波数コムと第２のレーザ光との光混合により得られる上記光周波数コムと被測定レーザ光の和周波数成分と、上記光周波数コムから光第２高調波発生により得られる光第２高調波成分とのヘテロダイン成分を検出し、 上記ヘテロダイン成分の検出出力に基づいて上記第１のレーザ光又は第２のレーザ光の周波数を測定することを特徴とする。[0005]
[Means for Solving the Problems]
The laser frequency measuring method according to the present invention generates an optical frequency comb composed of laser light having a side band with a constant frequency interval based on a reference laser light, and light obtained by the second harmonic generation of light from the optical frequency comb. A heterodyne component of the second harmonic component and the laser light to be measured is detected, and the frequency of the laser light to be measured is measured based on the detection output of the heterodyne component.
Further, according to the laser frequency measuring method of the present invention, an optical frequency comb comprising laser light having a side band having a constant frequency interval is generated based on the first laser light, and the optical frequency comb and the second laser light A heterodyne component of the sum frequency component of the optical frequency comb and the laser light to be measured obtained by the light mixing of the second light component and the second light harmonic component of the light obtained by the second light harmonic generation from the light frequency comb; The frequency of the first laser beam or the second laser beam is measured based on the detection output of the heterodyne component.
【０００６】
本発明に係るレーザ周波数制御方法は、第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを生成し、上記光周波数コムから光第２高調波発生により得られる光第２高調波成分と第２のレーザ光とのヘテロダイン成分を検出し、 上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御することを特徴とする。
また、本発明に係るレーザ周波数制御方法は、第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを生成し、 上記光周波数コムと第２のレーザ光との光混合により得られる上記光周波数コムと第２のレーザ光の和周波数成分と、上記光周波数コムから光第２高調波発生により得られる光第２高調波成分とのヘテロダイン成分を検出し、 上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御することを特徴とする。[0006]
The laser frequency control method according to the present invention generates an optical frequency comb composed of laser light having a side band with a constant frequency interval based on the first laser light, and is obtained from the above optical frequency comb by the generation of the second harmonic. The heterodyne component of the second optical light component and the second laser light, and making the difference frequency of the first laser light and the second laser light constant based on the detection output of the heterodyne component It is characterized by feedback control.
Further, according to the laser frequency control method of the present invention, an optical frequency comb composed of laser light having a side band with a constant frequency interval is generated based on the first laser light, and the above optical frequency comb and the second laser light Detecting a heterodyne component of a sum frequency component of the optical frequency comb and the second laser light obtained by the light mixing of the second aspect and an optical second harmonic component obtained by the optical second harmonic generation from the optical frequency comb; It is characterized in that feedback control is performed based on the detection output of the heterodyne component so as to make the difference frequency between the first laser beam and the second laser beam constant.
【０００７】
本発明に係るレーザ周波数測定装置は、基準レーザ光を出射する基準レーザ光源と、上記基準レーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、上記光周波数コムが入射される非線形光学結晶素子と、上記非線形光学結晶素子により得られる上記光周波数コムの光第２高調波成分と被測定レーザ光を混合する光学系と、上記光学系により混合された光第２高調波成分と被測定レーザ光とのヘテロダイン成分を検出するヘテロダイン検波手段とを備え、 上記ヘテロダイン成分の検出出力に基づいて上記被測定レーザ光の周波数を測定することを特徴とする。
また、本発明に係るレーザ周波数測定装置は、基準レーザ光を出射する基準レーザ光源と、上記基準レーザ光源から出射された基準レーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、上記光周波数コム発生手段により発生された光周波数コムと被測定レーザ光を混合する光学系と、上記光学系により混合された上記光周波数コムと被測定レーザ光の混合光が入射される非線形光学結晶素子と、上記非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と光第２高調波成分のヘテロダイン成分を検出するヘテロダイン検波手段とを備え、 上記ヘテロダイン成分の検出出力に基づいて上記被測定レーザ光の周波数を測定することを特徴とする。
さらに、本発明に係るレーザ周波数測定装置は、基準レーザ光を出射する基準レーザ光源と、上記基準レーザ光源から出射された基準レーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、上記光周波数コム発生手段により発生された光周波数コムと被測定レーザ光を混合する光学系と、上記光学系により混合された上記光周波数コムと被測定レーザ光の混合光から上記光周波数コムと被測定レーザ光の和周波数成分を生成する第１の非線形光学結晶素子と、上記混合光から光第２高調波成分を生成する第２の非線形光学結晶素子と、上記第１の非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と上記第２の非線形光学結晶素子により得られる光第２高調波成分のヘテロダイン成分を検出するヘテロダイン検波手段とを備え、上記ヘテロダイン成分の検出出力に基づいて上記被測定レーザ光の周波数を測定することを特徴とする。[0007]
The laser frequency measuring apparatus according to the present invention is an optical frequency comb generating an optical frequency comb comprising a reference laser light source for emitting a reference laser beam and a laser beam having a side band having a constant frequency interval based on the reference laser beam. Means, a nonlinear optical crystal element on which the optical frequency comb is incident, an optical system for mixing the second harmonic component of the optical frequency comb obtained by the nonlinear optical crystal element and the laser light to be measured, the optical system Measuring heterodyne detection means for detecting heterodyne components of the second harmonic wave component mixed by the system and the laser light to be measured, and measuring the frequency of the laser light to be measured based on the detection output of the heterodyne component It is characterized by
A laser frequency measuring apparatus according to the present invention is a light comprising a reference laser light source for emitting a reference laser beam, and a laser beam having a side band having a constant frequency interval based on the reference laser beam emitted from the reference laser source. Optical frequency comb generation means for generating a frequency comb, an optical system for mixing the optical frequency comb generated by the optical frequency comb generation means and the laser beam to be measured, and the optical frequency comb and object mixed by the optical system A nonlinear optical crystal element into which mixed light of measurement laser light is incident, a heterodyne component of the sum frequency component of the above-mentioned optical frequency comb and the measured laser light obtained by the above-mentioned nonlinear optical crystal element and the second harmonic component of light Heterodyne detection means, and measuring the frequency of the laser light to be measured based on the detection output of the heterodyne component. Do.
Furthermore, the laser frequency measuring device according to the present invention is a light comprising a reference laser light source for emitting a reference laser beam and a laser beam having a side band having a constant frequency interval based on the reference laser beam emitted from the reference laser source. Optical frequency comb generation means for generating a frequency comb, an optical system for mixing the optical frequency comb generated by the optical frequency comb generation means and the laser beam to be measured, and the optical frequency comb and object mixed by the optical system A first nonlinear optical crystal element that generates a sum frequency component of the optical frequency comb and the measured laser beam from a mixed light of measurement laser light, and a second nonlinear optical that generates a second harmonic component of light from the mixed light A crystal element, the optical frequency comb obtained by the first nonlinear optical crystal element, a sum frequency component of the laser light to be measured, and the second nonlinear optical crystal element And a heterodyne detection means for detecting a heterodyne component of the resulting optical second harmonic wave component, and measuring the frequency of the measuring laser light on the basis of the detection output of the heterodyne component.
【０００８】
本発明に係るレーザ光発生装置は、第１のレーザ光を出射する第１のレーザ光源と、上記第１のレーザ光源から出射された第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、第２のレーザ光を出射する第２のレーザ光源と、上記光周波数コムが入射される非線形光学結晶素子と、上記非線形光学結晶素子により得られる上記光周波数コムの光第２高調波成分と上記第２のレーザ光源から出射された第２のレーザ光を混合する光学系と、上記光学系により混合された光第２高調波成分と第２のレーザ光とのヘテロダイン成分を検出するヘテロダイン検波手段と、上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御する制御手段とを備えることを特徴とする。
また、本発明に係るレーザ光発生装置は、第１のレーザ光を出射する第１のレーザ光源と、上記第１のレーザ光源から出射された第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、第２のレーザ光を出射する第２のレーザ光源と、上記光周波数コム発生手段により発生された光周波数コムと上記第２のレーザ光源から出射された第２のレーザ光を混合する光学系と、上記光学系により混合された上記光周波数コムと第２のレーザ光の混合光が入射される非線形光学結晶素子と、上記非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と光第２高調波成分のヘテロダイン成分を検出するヘテロダイン検波手段と、上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御する制御手段とを備えることを特徴とする。
さらに、本発明に係るレーザ光発生装置は、第１のレーザ光を出射する第１のレーザ光源と、上記第１のレーザ光源から出射された第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、第２のレーザ光を出射する第２のレーザ光源と、上記第２のレーザ光源から出射された第２のレーザ光と上記光周波数コム発生手段により発生された光周波数コムを混合する光学系と、上記光学系により混合された上記光周波数コムと第２のレーザ光の混合光から上記光周波数コムと被測定レーザ光の和周波数成分を生成する第１の非線形光学結晶素子と、上記混合光から光第２高調波成分を生成する第２の非線形光学結晶素子と、上記第１の非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と上記第２の非線形光学結晶素子により得られる光第２高調波成分のヘテロダイン成分を検出するヘテロダイン検波手段と、 上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御する制御手段とを備えることを特徴とする。[0008]
A laser light generator according to the present invention comprises a first laser light source for emitting a first laser light, and a side band having a constant frequency interval based on the first laser light emitted from the first laser light source. Optical frequency comb generating means for generating an optical frequency comb comprising laser light, a second laser light source for emitting a second laser light, a nonlinear optical crystal element on which the optical frequency comb is incident, and the nonlinear optical An optical system for mixing the second harmonic component of the optical frequency comb obtained by the crystal element and the second laser light emitted from the second laser light source, and a second harmonic of the light mixed by the optical system The difference frequency of the first laser beam and the second laser beam is set to one on the basis of heterodyne detection means for detecting the heterodyne component of the wave component and the second laser beam, and the detection output of the heterodyne component. And a controlling means for feedback control so that the.
Further, according to the present invention, there is provided a laser light generation apparatus comprising: a first laser light source for emitting a first laser light; and a side having a constant frequency interval based on the first laser light emitted from the first laser light source. Optical frequency comb generation means for generating an optical frequency comb comprising laser light having a band, a second laser light source for emitting a second laser light, optical frequency comb generated by the optical frequency comb generation means, and An optical system for mixing the second laser light emitted from the second laser light source; and a nonlinear optical crystal element to which the mixed light of the optical frequency comb and the second laser light mixed by the optical system is incident; Heterodyne detection means for detecting heterodyne components of the sum frequency component of the optical frequency comb obtained by the nonlinear optical crystal element, the laser light to be measured, and the second harmonic component of the light; Based on the detection output of the down component, characterized in that it comprises a control means for feedback control so that a constant difference frequency of the first laser beam and the second laser beam.
Further, according to the present invention, there is provided a laser light generator including: a first laser light source for emitting a first laser light; and a side having a constant frequency interval based on the first laser light emitted from the first laser light source. Optical frequency comb generating means for generating an optical frequency comb comprising laser light having a band, a second laser light source for emitting a second laser light, and the second laser light emitted from the second laser light source And an optical system for mixing the optical frequency comb generated by the optical frequency comb generating means, and the mixed light of the optical frequency comb and the second laser light mixed by the optical system, the optical frequency comb and the measured laser Obtained by a first nonlinear optical crystal element generating a sum frequency component of light, a second nonlinear optical crystal element generating a second harmonic optical component from the mixed light, and the first nonlinear optical crystal element Heterodyne detection means for detecting heterodyne components of the optical frequency comb, the sum frequency component of the laser light to be measured, and the second harmonic optical component obtained by the second nonlinear optical crystal element; and detection output of the heterodyne component And control means for performing feedback control so as to make the difference frequency between the first laser light and the second laser light constant.
【００３９】
【発明の効果】
本発明に係るレーザ周波数測定方法では、基準レーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを生成し、上記光周波数コムから光第２高調波発生により得られる光第２高調波成分と被測定レーザ光とのヘテロダイン成分を検出することにより、 高いＳＮ比でヘテロダイン成分を検出することができ、上記ヘテロダイン成分の検出出力に基づいて高い測定精度を確保して広範囲に亘って上記被測定レーザ光の周波数を測定することができる。
また、本発明に係るレーザ周波数測定方法では、第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを生成し、上記光周波数コムと第２のレーザ光との光混合により得られる上記光周波数コムと被測定レーザ光の和周波数成分と、上記光周波数コムから光第２高調波発生により得られる光第２高調波成分とのヘテロダイン成分を検出することにより、高いＳＮ比でヘテロダイン成分を検出することができ、上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光又は第２のレーザ光の周波数を高い測定精度を確保して広範囲に亘って測定することができる。
本発明に係るレーザ周波数制御方法では、第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを生成し、上記光周波数コムから光第２高調波発生により得られる光第２高調波成分と第２のレーザ光とのヘテロダイン成分を検出することにより、高いＳＮ比でヘテロダイン成分を検出することができ、上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御することにより、上記差周波数を広範囲に亘って高精度に制御することができる。
また、本発明に係るレーザ周波数制御方法では、第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを生成し、上記光周波数コムと第２のレーザ光との光混合により得られる上記光周波数コムと第２のレーザ光の和周波数成分と、上記光周波数コムから光第２高調波発生により得られる光第２高調波成分とのヘテロダイン成分を検出することにより、高いＳＮ比でヘテロダイン成分を検出することができ、上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御することにより、上記差周波数を広範囲に亘って高精度に制御することができる。[0039]
【Effect of the invention】
In the laser frequency measuring method according to the present invention, an optical frequency comb composed of laser light having a side band with a constant frequency interval is generated based on the reference laser light, and light obtained by the optical second harmonic generation from the optical frequency comb By detecting the heterodyne component between the second harmonic component and the laser light to be measured, the heterodyne component can be detected at a high SN ratio, and high measurement accuracy is ensured based on the detection output of the heterodyne component. The frequency of the measured laser light can be measured.
Further, in the laser frequency measuring method according to the present invention, an optical frequency comb comprising laser light having a side band having a constant frequency interval is generated based on the first laser light, and the optical frequency comb and the second laser light By detecting the heterodyne component of the sum frequency component of the light frequency comb and the measured laser light obtained by light mixing of the light and the light second harmonic component obtained by light second harmonic generation from the light frequency comb The heterodyne component can be detected with a high SN ratio, and based on the detection output of the heterodyne component, the frequency of the first laser beam or the second laser beam can be maintained over a wide range by securing high measurement accuracy It can be measured.
In the laser frequency control method according to the present invention, an optical frequency comb composed of laser light having a side band with a constant frequency interval is generated based on the first laser light, and the optical frequency comb obtained from the optical frequency comb is generated. The heterodyne component can be detected at a high S / N ratio by detecting the heterodyne component of the second optical harmonic component and the second laser light, and based on the detection output of the heterodyne component, the first By performing feedback control so that the difference frequency between the laser beam and the second laser beam is constant, it is possible to control the difference frequency over a wide range with high accuracy.
Further, in the laser frequency control method according to the present invention, an optical frequency comb composed of laser light having a side band with a constant frequency interval is generated based on the first laser light, and the above optical frequency comb and the second laser light Detecting a heterodyne component of the sum frequency component of the optical frequency comb and the second laser light obtained by the light mixing of the second embodiment and the optical second harmonic component obtained by the optical second harmonic generation from the optical frequency comb Can detect the heterodyne component with a high SN ratio, and feedback control is performed to make the difference frequency between the first laser beam and the second laser beam constant based on the detection output of the heterodyne component. Thus, the difference frequency can be controlled with high accuracy over a wide range.
【００４０】
本発明に係るレーザ周波数測定装置では、基準レーザ光源から出射された基準レーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを光周波数コム発生手段により発生し、上記光周波数コムが入射される非線形光学結晶素子により得られる上記光周波数コムの光第２高調波成分と被測定レーザ光を光学系で混合し、上記光学系により混合された光第２高調波成分と被測定レーザ光とのヘテロダイン成分をヘテロダイン検波手段で検出することにより、高いＳＮ比でヘテロダイン成分を検出することができ、上記ヘテロダイン成分の検出出力に基づいて高い測定精度を確保して広範囲に亘って上記被測定レーザ光の周波数を測定することができる。
また、本発明に係るレーザ周波数測定装置では、基準レーザ光源から出射された基準レーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを光周波数コム発生手段により発生し、上記光周波数コム発生手段により発生された光周波数コムと被測定レーザ光と光学系で混合し、上記光学系により混合された上記光周波数コムと被測定レーザ光の混合光が入射される非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と光第２高調波成分のヘテロダイン成分をヘテロダイン検波手段で検出することにより、高いＳＮ比でヘテロダイン成分を検出することができ、上記ヘテロダイン成分の検出出力に基づいて高い測定精度を確保して広範囲に亘って上記被測定レーザ光の周波数を測定することができる。
さらに、本発明に係るレーザ周波数測定装置では、基準レーザ光源から出射された基準レーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを光周波数コム発生手段により発生し、上記光周波数コム発生手段により発生された光周波数コムと被測定レーザ光を光学系で混合し、上記光学系により混合された上記光周波数コムと被測定レーザ光の混合光から上記光周波数コムと被測定レーザ光の和周波数成分を第１の非線形光学結晶素子により生成するとともに、上記混合光から光第２高調波成分を第２の非線形光学結晶素子におり生成し、上記第１の非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と上記第２の非線形光学結晶素子により得られる光第２高調波成分のヘテロダイン成分をヘテロダイン検波手段で検出することにより、高いＳＮ比でヘテロダイン成分を検出することができ、上記ヘテロダイン成分の検出出力に基づいて高い測定精度を確保して広範囲に亘って上記被測定レーザ光の周波数を測定することができる。[0040]
In the laser frequency measuring apparatus according to the present invention, an optical frequency comb comprising laser light having a side band having a constant frequency interval is generated by the optical frequency comb generating means based on the reference laser light emitted from the reference laser light source. The optical second harmonic component of the optical frequency comb obtained by the non-linear optical crystal element to which the frequency comb is incident and the laser light to be measured are mixed by the optical system, and the optical second harmonic component mixed by the optical system The heterodyne component can be detected with a high SN ratio by detecting the heterodyne component with the laser light to be measured by the heterodyne detection means, and high measurement accuracy is ensured based on the detection output of the heterodyne component to cover a wide range. The frequency of the laser light to be measured can be measured.
In the laser frequency measuring apparatus according to the present invention, the optical frequency comb generating means generates an optical frequency comb comprising laser light having a side band with a constant frequency interval based on the reference laser light emitted from the reference laser light source, Non-linear optical system in which mixed light of the optical frequency comb and the laser light to be measured mixed by the optical system and the laser light to be measured and the laser light to be measured is mixed by the optical system. The heterodyne component can be detected with a high SN ratio by detecting the heterodyne component of the sum frequency component of the optical frequency comb obtained by the crystal element, the laser light to be measured, and the second harmonic component of light by the heterodyne detection means. The frequency of the measured laser beam over a wide range by securing high measurement accuracy based on the detection output of the heterodyne component It can be measured.
Further, in the laser frequency measuring apparatus according to the present invention, the optical frequency comb generating means generates an optical frequency comb comprising laser light having a side band having a constant frequency interval based on the reference laser light emitted from the reference laser light source, The optical frequency comb generated by the optical frequency comb generating means and the laser beam to be measured are mixed by an optical system, and the mixed light of the optical frequency comb and laser beam to be measured mixed by the optical system A sum frequency component of the laser light to be measured is generated by the first nonlinear optical crystal element, and a second harmonic optical component is generated from the mixed light in the second nonlinear optical crystal element, and the first nonlinear optical element is generated. A sum frequency component of the optical frequency comb obtained by the crystal element, the laser light to be measured, and an optical second harmonic component obtained by the second nonlinear optical crystal element The heterodyne component can be detected with a high SN ratio by detecting the terrodyne component by the heterodyne detection means, and high measurement accuracy is ensured based on the detection output of the heterodyne component, and the measured laser beam is measured over a wide range Frequency can be measured.
【００４１】
本発明に係るレーザ光発生装置では、第１のレーザ光源から出射された第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを光周波数コム発生手段により発生し、上記光周波数コムが入射される非線形光学結晶素子により得られる上記光周波数コムの光第２高調波成分と上記第２のレーザ光源から出射された第２のレーザ光を光学系で混合し、上記光学系により混合された光第２高調波成分と第２のレーザ光とのヘテロダイン成分をヘテロダイン検波手段で検出することにより、高いＳＮ比でヘテロダイン成分を検出することができ、上記ヘテロダイン成分の検出出力に基づいて、制御手段により上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように広い周波数範囲に亘って極めて安定に帰還制御することができる。
また、本発明に係るレーザ光発生装置では、第１のレーザ光源から出射された第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを光周波数コム発生手段により発生し、上記光周波数コム発生手段により発生された光周波数コムと第２のレーザ光源から出射された第２のレーザ光を光学系で混合し、上記光学系により混合された上記光周波数コムと第２のレーザ光の混合光が入射される非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と光第２高調波成分のヘテロダイン成分をヘテロダイン検波手段で検出することにより、高いＳＮ比でヘテロダイン成分を検出することができ、上記ヘテロダイン成分の検出出力に基づいて、制御手段により上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように広い周波数範囲に亘って極めて安定に帰還制御することができる。
さらに、本発明に係るレーザ光発生装置では、第１のレーザ光源から出射された第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを光周波数コム発生手段により発生し、第２のレーザ光源から出射された第２のレーザ光と上記光周波数コム発生手段により発生された光周波数コムを光学系で混合し、上記光学系により混合された上記光周波数コムと第２のレーザ光の混合光から上記光周波数コムと被測定レーザ光の和周波数成分を第１の非線形光学結晶素子により生成するとともに、上記混合光から光第２高調波成分を第２の非線形光学結晶素子に生成し、上記第１の非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と上記第２の非線形光学結晶素子により得られる光第２高調波成分のヘテロダイン成分を検出するヘテロダイン検波手段で検出することにより、高いＳＮ比でヘテロダイン成分を検出することができ、上記ヘテロダイン成分の検出出力に基づいて、制御手段により上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように広い周波数範囲に亘って極めて安定に帰還制御することができる。[0041]
In the laser light generating apparatus according to the present invention, the light frequency comb generating means generates an optical frequency comb comprising laser light having a side band having a constant frequency interval based on the first laser light emitted from the first laser light source. And the second laser beam emitted from the second laser light source and the second harmonic light component of the second light beam obtained by the non-linear optical crystal element to which the first optical frequency comb is incident mixed with the optical system The heterodyne component can be detected at a high SN ratio by detecting the heterodyne component of the second harmonic component of light and the second laser light mixed by the optical system by the heterodyne detection means, and the heterodyne component can be detected. Based on the detection output of the light source, the control means makes the difference frequency between the first laser light and the second laser light constant over a wide frequency range. It can be feedback-controlled to a constant.
Further, in the laser light generating apparatus according to the present invention, an optical frequency comb generating means comprising an optical frequency comb comprising a laser light having a side band having a constant frequency interval based on the first laser light emitted from the first laser light source. The optical frequency comb generated by the optical frequency comb generated by the optical frequency comb generating means and the second laser light emitted from the second laser light source are mixed by the optical system, and the Heterodyne components of the sum frequency component of the optical frequency comb and the measured laser beam and the second harmonic component of light obtained by the non-linear optical crystal element to which mixed light of the laser beam and the second laser beam is incident Thus, the heterodyne component can be detected at a high SN ratio, and the first laser can be detected by the control means based on the detection output of the heterodyne component. If it is possible to extremely stable feedback control over the difference frequency of the second laser beam in a wide frequency range such that a constant.
Furthermore, in the laser light generating apparatus according to the present invention, an optical frequency comb generating means comprising an optical frequency comb comprising a laser light having a side band having a constant frequency interval based on the first laser light emitted from the first laser light source. And the optical frequency comb generated by the second laser light source and the optical frequency comb generated by the optical frequency comb generating means by the optical system and mixed by the optical system. A sum frequency component of the optical frequency comb and the laser beam to be measured is generated by the first nonlinear optical crystal element from the mixed light of the second laser light and the second laser light, and the second harmonic light component of the second mixed light is The optical frequency comb produced by the first nonlinear optical crystal element generated in the nonlinear optical crystal element, the sum frequency component of the laser light to be measured, and the second nonlinear optical crystal element The heterodyne component can be detected with a high SN ratio by detecting the heterodyne component of the second optical harmonic component to be detected by the heterodyne detection unit. Based on the detection output of the heterodyne component, the control unit The feedback control can be performed extremely stably over a wide frequency range so as to make the difference frequency between the 1st laser light and the 2nd laser light constant.
Claims (16)
上記光周波数コムから光第２高調波発生により得られる光第２高調波成分と被測定レーザ光とのヘテロダイン成分を検出し、
上記ヘテロダイン成分の検出出力に基づいて上記被測定レーザ光の周波数を測定することを特徴とするレーザ周波数測定方法。Generating an optical frequency comb comprising laser light having a side band with a constant frequency interval based on the reference laser light,
Detecting a heterodyne component of an optical second harmonic component obtained by optical second harmonic generation from the optical frequency comb and a laser beam to be measured;
And measuring the frequency of the laser light to be measured based on the detection output of the heterodyne component.
上記光周波数コムの光第２高調波成分と被測定レーザ光を混合し、
上記光第２高調波成分と被測定レーザ光の混合光から上記ヘテロダイン成分を検出することを特徴とする請求項１のレーザ周波数測定方法。The second harmonic component of light is obtained from the above optical frequency comb through the nonlinear optical crystal element,
Mixing the second harmonic component of the optical frequency comb and the laser light to be measured,
2. A laser frequency measuring method according to claim 1, wherein said heterodyne component is detected from the mixed light of the second harmonic component of light and the laser light to be measured.
上記光周波数コムと第２のレーザ光との光混合により得られる上記光周波数コムと被測定レーザ光の和周波数成分と、上記光周波数コムから光第２高調波発生により得られる光第２高調波成分とのヘテロダイン成分を検出し、
上記ヘテロダイン成分の検出出力に基づいて上記第１のレーザ光又は第２のレーザ光の周波数を測定することを特徴とするレーザ周波数測定方法。Generating an optical frequency comb comprising laser light having a side band with a constant frequency interval based on the first laser light,
Sum frequency component of the light frequency comb and the measured laser light obtained by light mixing of the light frequency comb and the second laser light, and light second harmonic obtained by the light second harmonic generation from the light frequency comb Detect heterodyne components with wave components,
And measuring the frequency of the first laser beam or the second laser beam based on the detection output of the heterodyne component.
上記光周波数コムから光第２高調波発生により得られる光第２高調波成分と第２のレーザ光とのヘテロダイン成分を検出し、
上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御することを特徴とするレーザ周波数制御方法。Generating an optical frequency comb comprising laser light having a side band with a constant frequency interval based on the first laser light,
Detecting a heterodyne component of an optical second harmonic component obtained by optical second harmonic generation from the optical frequency comb and the second laser light;
8. A laser frequency control method comprising feedback control so as to make constant the difference frequency between the first laser beam and the second laser beam based on the detection output of the heterodyne component.
上記光周波数コムの光第２高調波成分と被測定レーザ光を混合し、
上記光第２高調波成分と被測定レーザ光の混合光から上記ヘテロダイン成分を検出することを特徴とする請求項６のレーザ周波数制御方法。The second harmonic component of light is obtained from the above optical frequency comb through the nonlinear optical crystal element,
Mixing the second harmonic component of the optical frequency comb and the laser light to be measured,
7. A laser frequency control method according to claim 6, wherein the heterodyne component is detected from the mixed light of the second harmonic component of light and the laser light to be measured.
上記光周波数コムと第２のレーザ光との光混合により得られる上記光周波数コムと第２のレーザ光の和周波数成分と、上記光周波数コムから光第２高調波発生により得られる光第２高調波成分とのヘテロダイン成分を検出し、
上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御することを特徴とするレーザ周波数制御方法。Generating an optical frequency comb comprising laser light having a side band with a constant frequency interval based on the first laser light,
Sum frequency component of the light frequency comb and the second laser light obtained by light mixing of the light frequency comb and the second laser light, and a second light generated by the light second harmonic generation from the light frequency comb Detect heterodyne components with harmonic components,
8. A laser frequency control method comprising feedback control so as to make constant the difference frequency between the first laser beam and the second laser beam based on the detection output of the heterodyne component.
上記基準レーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、
上記光周波数コムが入射される非線形光学結晶素子と、
上記非線形光学結晶素子により得られる上記光周波数コムの光第２高調波成分と被測定レーザ光を混合する光学系と、
上記光学系により混合された光第２高調波成分と被測定レーザ光とのヘテロダイン成分を検出するヘテロダイン検波手段とを備え、
上記ヘテロダイン成分の検出出力に基づいて上記被測定レーザ光の周波数を測定することを特徴とするレーザ周波数測定装置。A reference laser light source for emitting a reference laser beam;
An optical frequency comb generating means for generating an optical frequency comb composed of laser light having a side band having a constant frequency interval based on the reference laser light;
A non-linear optical crystal element on which the optical frequency comb is incident;
An optical system for mixing the second harmonic component of light of the optical frequency comb obtained by the nonlinear optical crystal element and the laser light to be measured;
And heterodyne detection means for detecting heterodyne components of the second harmonic component of light mixed by the optical system and the laser light to be measured,
A laser frequency measuring apparatus, which measures the frequency of the laser light to be measured based on the detection output of the heterodyne component.
上記基準レーザ光源から出射された基準レーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、
上記光周波数コム発生手段により発生された光周波数コムと被測定レーザ光とレーザ光を混合する光学系と、
上記光学系により混合された上記光周波数コムと被測定レーザ光の混合光が入射される非線形光学結晶素子と、
上記非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と光第２高調波成分のヘテロダイン成分を検出するヘテロダイン検波手段とを備え、
上記ヘテロダイン成分の検出出力に基づいて上記被測定レーザ光の周波数を測定することを特徴とするレーザ周波数測定装置。A reference laser light source for emitting a reference laser beam;
An optical frequency comb generating means for generating an optical frequency comb comprising a laser beam having a side band having a constant frequency interval based on a reference laser beam emitted from the reference laser light source;
An optical frequency comb generated by the optical frequency comb generating means, and an optical system for mixing the measured laser light and the laser light;
A nonlinear optical crystal element into which mixed light of the optical frequency comb mixed by the optical system and the laser light to be measured is incident;
The optical frequency comb obtained by the nonlinear optical crystal element, heterodyne detection means for detecting the heterodyne component of the sum frequency component of the laser light to be measured and the second harmonic component of light;
A laser frequency measuring apparatus, which measures the frequency of the laser light to be measured based on the detection output of the heterodyne component.
上記基準レーザ光源から出射された基準レーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、
上記光周波数コム発生手段により発生された光周波数コムと被測定レーザ光を混合する光学系と、
上記光学系により混合された上記光周波数コムと被測定レーザ光の混合光から上記光周波数コムと被測定レーザ光の和周波数成分を生成する第１の非線形光学結晶素子と、
上記混合光から光第２高調波成分を生成する第２の非線形光学結晶素子と、
上記第１の非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と上記第２の非線形光学結晶素子により得られる光第２高調波成分のヘテロダイン成分を検出するヘテロダイン検波手段とを備え、
上記ヘテロダイン成分の検出出力に基づいて上記被測定レーザ光の周波数を測定することを特徴とするレーザ周波数測定装置。A reference laser light source for emitting a reference laser beam;
An optical frequency comb generating means for generating an optical frequency comb comprising a laser beam having a side band having a constant frequency interval based on a reference laser beam emitted from the reference laser light source;
An optical system for mixing the optical frequency comb generated by the optical frequency comb generation means and the laser light to be measured;
A first nonlinear optical crystal element that generates a sum frequency component of the light frequency comb and the laser light to be measured from the mixed light of the light frequency comb and the laser light to be measured mixed by the optical system;
A second nonlinear optical crystal element for generating an optical second harmonic component from the mixed light;
Heterodyne detection for detecting heterodyne components of the optical frequency comb obtained by the first nonlinear optical crystal device, the sum frequency component of the laser light to be measured and the second harmonic optical component obtained by the second nonlinear optical crystal device Equipped with
A laser frequency measuring apparatus, which measures the frequency of the laser light to be measured based on the detection output of the heterodyne component.
上記第１のレーザ光源から出射された第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、
第２のレーザ光を出射する第２のレーザ光源と、
上記光周波数コムが入射される非線形光学結晶素子と、
上記非線形光学結晶素子により得られる上記光周波数コムの光第２高調波成分と上記第２のレーザ光源から出射された第２のレーザ光を混合する光学系と、
上記光学系により混合された光第２高調波成分と第２のレーザ光とのヘテロダイン成分を検出するヘテロダイン検波手段と、
上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御する制御手段とを備える
ことを特徴とするレーザ光発生装置。A first laser light source for emitting a first laser beam;
An optical frequency comb generating means for generating an optical frequency comb composed of laser light having a side band having a constant frequency interval based on the first laser light emitted from the first laser light source;
A second laser light source for emitting a second laser beam;
A non-linear optical crystal element on which the optical frequency comb is incident;
An optical system for mixing the second harmonic component of the second harmonic light component of the optical frequency comb obtained by the nonlinear optical crystal element and the second laser light source from the second laser light source;
Heterodyne detecting means for detecting a heterodyne component of the second laser light and the second harmonic light mixed by the optical system;
And a control means for performing feedback control so as to make the difference frequency between the first laser light and the second laser light constant based on the detection output of the heterodyne component.
上記第１のレーザ光源から出射された第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、
第２のレーザ光を出射する第２のレーザ光源と、
上記光周波数コム発生手段により発生された光周波数コムと上記第２のレーザ光源から出射された第２のレーザ光を混合する光学系と、
上記光学系により混合された上記光周波数コムと第２のレーザ光の混合光が入射される非線形光学結晶素子と、
上記非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と光第２高調波成分のヘテロダイン成分を検出するヘテロダイン検波手段と、
上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御する制御手段とを備える
ことを特徴とするレーザ光発生装置。A first laser light source for emitting a first laser beam;
An optical frequency comb generating means for generating an optical frequency comb composed of laser light having a side band having a constant frequency interval based on the first laser light emitted from the first laser light source;
A second laser light source for emitting a second laser beam;
An optical system for mixing the optical frequency comb generated by the optical frequency comb generation means and the second laser light emitted from the second laser light source;
A non-linear optical crystal element on which mixed light of the light frequency comb and the second laser light mixed by the optical system is incident;
Heterodyne detection means for detecting a heterodyne component of the sum frequency component of the laser light to be measured and the second harmonic component of the light beam obtained by the nonlinear optical crystal element;
And a control means for performing feedback control so as to make the difference frequency between the first laser light and the second laser light constant based on the detection output of the heterodyne component.
上記第１のレーザ光源から出射された第１のレーザ光に基づいて周波数間隔一定のサイドバンドを持つレーザ光からなる光周波数コムを発生する光周波数コム発生手段と、
第２のレーザ光を出射する第２のレーザ光源と、
上記第２のレーザ光源から出射された第２のレーザ光と上記光周波数コム発生手段により発生された光周波数コムを混合する光学系と、
上記光学系により混合された上記光周波数コムと第２のレーザ光の混合光から上記光周波数コムと被測定レーザ光の和周波数成分を生成する第１の非線形光学結晶素子と、
上記混合光から光第２高調波成分を生成する第２の非線形光学結晶素子と、
上記第１の非線形光学結晶素子により得られる上記光周波数コムと被測定レーザ光の和周波数成分と上記第２の非線形光学結晶素子により得られる光第２高調波成分のヘテロダイン成分を検出するヘテロダイン検波手段と、
上記ヘテロダイン成分の検出出力に基づいて、上記第１のレーザ光と第２のレーザ光の差周波数を一定にするように帰還制御する制御手段とを備える
ことを特徴とするレーザ光発生装置。A first laser light source for emitting a first laser beam;
An optical frequency comb generating means for generating an optical frequency comb composed of laser light having a side band having a constant frequency interval based on the first laser light emitted from the first laser light source;
A second laser light source for emitting a second laser beam;
An optical system for mixing the second laser light emitted from the second laser light source and the optical frequency comb generated by the optical frequency comb generating means;
A first nonlinear optical crystal element that generates a sum frequency component of the optical frequency comb and the laser light to be measured from the mixed light of the optical frequency comb and the second laser light mixed by the optical system;
A second nonlinear optical crystal element for generating an optical second harmonic component from the mixed light;
Heterodyne detection for detecting heterodyne components of the optical frequency comb obtained by the first nonlinear optical crystal device, the sum frequency component of the laser light to be measured and the second harmonic optical component obtained by the second nonlinear optical crystal device Means,
And a control means for performing feedback control so as to make the difference frequency between the first laser light and the second laser light constant based on the detection output of the heterodyne component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08478999A JP3805555B2 (en) | 1999-03-26 | 1999-03-26 | Laser frequency measurement method, laser frequency control method, laser frequency measurement device, and laser light generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08478999A JP3805555B2 (en) | 1999-03-26 | 1999-03-26 | Laser frequency measurement method, laser frequency control method, laser frequency measurement device, and laser light generator |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000275107A JP2000275107A (en) | 2000-10-06 |
| JP2000275107A5 true JP2000275107A5 (en) | 2005-03-17 |
| JP3805555B2 JP3805555B2 (en) | 2006-08-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP08478999A Expired - Fee Related JP3805555B2 (en) | 1999-03-26 | 1999-03-26 | Laser frequency measurement method, laser frequency control method, laser frequency measurement device, and laser light generator |
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| JP (1) | JP3805555B2 (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7881620B2 (en) * | 2005-05-04 | 2011-02-01 | Ofs Fitel, Llc | Stabilized optical fiber continuum frequency combs using post-processed highly nonlinear fibers |
| JP5836739B2 (en) * | 2011-09-29 | 2015-12-24 | 株式会社ミツトヨ | Optical frequency measurement device |
| JP5963080B2 (en) * | 2012-07-11 | 2016-08-03 | 国立大学法人福井大学 | Electromagnetic wave detection method and electromagnetic wave detection device |
| CN103398786B (en) * | 2013-08-13 | 2015-09-09 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of wavemeter measuring method and device using femtosecond laser frequency comb |
| WO2017004656A1 (en) * | 2015-07-03 | 2017-01-12 | The University Of Adelaide | System and method for generating an optical frequency standard |
| CN107727058B (en) * | 2017-09-28 | 2020-06-19 | 清华大学 | Optical frequency comb six-degree-of-freedom measuring method and measuring system |
| US11296483B2 (en) * | 2019-09-20 | 2022-04-05 | Intel Corporation | Methods and apparatus to control the optical frequency of a laser |
| CN111146670A (en) * | 2019-12-11 | 2020-05-12 | 中国科学院福建物质结构研究所 | Ultraviolet pulse laser |
| CN111146679A (en) * | 2019-12-18 | 2020-05-12 | 中国科学院福建物质结构研究所 | Laser sum frequency device |
| JP7376917B2 (en) | 2020-01-27 | 2023-11-09 | 国立研究開発法人産業技術総合研究所 | Optical frequency swept laser light source |
| JP2022127514A (en) * | 2021-02-19 | 2022-08-31 | 国立研究開発法人情報通信研究機構 | Wavelength control device, wavelength control method, and differential absorption lidar device |
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1999
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