RU2074575C1 - MAGNETRON OF THE CYLINDRICAL TYPE FOR SPRAYING OF THE INTERNAL SURFACE OF BODIES - Google Patents
MAGNETRON OF THE CYLINDRICAL TYPE FOR SPRAYING OF THE INTERNAL SURFACE OF BODIES Download PDFInfo
- Publication number
- RU2074575C1 RU2074575C1 RU94039365/02A RU94039365A RU2074575C1 RU 2074575 C1 RU2074575 C1 RU 2074575C1 RU 94039365/02 A RU94039365/02 A RU 94039365/02A RU 94039365 A RU94039365 A RU 94039365A RU 2074575 C1 RU2074575 C1 RU 2074575C1
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- RU
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- Prior art keywords
- thickness
- spraying
- magnetron
- bodies
- internal surface
- Prior art date
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Abstract
Магнетрон цилиндрического типа для напыления внутренней поверхности тела, состоящий из вакуумной камеры, проходного высоковольтного изолятора, катода-мишени, элементов магнитной системы и источников питания, отличающийся тем, что каждый элемент магнитной системы выполнен из набора кольцевых постоянных магнитов со встречными полюсами с соотношением толщины магнитов 1:4: 1, состыкованных через шайбы-концентраторы магнитного поля, выполненные из ферромагнитного материала и толщиной, определяемой из соотношения6 < h/h< 7,где h- толщина шайбы-концентратора магнитного поля;h- толщина единичного кольцевого магнита,а на концах каждого элемента магнитной системы установлены шайбы-полюсные наконечники толщиной hиз ферромагнитного материала.A cylindrical magnetron for spraying the inner surface of the body, consisting of a vacuum chamber, a high-voltage bushing, a target cathode, elements of a magnetic system and power sources, characterized in that each element of the magnetic system is made of a set of ring permanent magnets with opposing poles with a ratio of the thickness of the magnets 1: 4: 1, joined through washers-concentrators of the magnetic field, made of ferromagnetic material and the thickness determined from the ratio 6 <h / h <7, where h is the thickness of the washer-k the center of the magnetic field; h is the thickness of a single ring magnet, and at the ends of each element of the magnetic system washers and pole pieces are installed with a thickness h of ferromagnetic material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU94039365/02A RU2074575C1 (en) | 1994-10-20 | 1994-10-20 | MAGNETRON OF THE CYLINDRICAL TYPE FOR SPRAYING OF THE INTERNAL SURFACE OF BODIES |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU94039365/02A RU2074575C1 (en) | 1994-10-20 | 1994-10-20 | MAGNETRON OF THE CYLINDRICAL TYPE FOR SPRAYING OF THE INTERNAL SURFACE OF BODIES |
Publications (2)
Publication Number | Publication Date |
---|---|
RU94039365A RU94039365A (en) | 1997-02-27 |
RU2074575C1 true RU2074575C1 (en) | 1997-02-27 |
Family
ID=48432665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU94039365/02A RU2074575C1 (en) | 1994-10-20 | 1994-10-20 | MAGNETRON OF THE CYLINDRICAL TYPE FOR SPRAYING OF THE INTERNAL SURFACE OF BODIES |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2074575C1 (en) |
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1994
- 1994-10-20 RU RU94039365/02A patent/RU2074575C1/en active
Also Published As
Publication number | Publication date |
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RU94039365A (en) | 1997-02-27 |
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