RU2016130861A - Dynamic solid solution evaporator - Google Patents

Dynamic solid solution evaporator Download PDF

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Publication number
RU2016130861A
RU2016130861A RU2016130861A RU2016130861A RU2016130861A RU 2016130861 A RU2016130861 A RU 2016130861A RU 2016130861 A RU2016130861 A RU 2016130861A RU 2016130861 A RU2016130861 A RU 2016130861A RU 2016130861 A RU2016130861 A RU 2016130861A
Authority
RU
Russia
Prior art keywords
housing
evaporator
ring
protrusions
height
Prior art date
Application number
RU2016130861A
Other languages
Russian (ru)
Other versions
RU2662914C2 (en
RU2016130861A3 (en
Inventor
Всеволод Анатольевич Колпаков
Сергей Васильевич Кричевский
Владимир Владимирович Подлипнов
Original Assignee
федеральное государственное автономное образовательное учреждение высшего образования "Самарский национальный исследовательский университет имени академика С.П. Королева"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by федеральное государственное автономное образовательное учреждение высшего образования "Самарский национальный исследовательский университет имени академика С.П. Королева" filed Critical федеральное государственное автономное образовательное учреждение высшего образования "Самарский национальный исследовательский университет имени академика С.П. Королева"
Priority to RU2016130861A priority Critical patent/RU2662914C2/en
Publication of RU2016130861A publication Critical patent/RU2016130861A/en
Publication of RU2016130861A3 publication Critical patent/RU2016130861A3/ru
Application granted granted Critical
Publication of RU2662914C2 publication Critical patent/RU2662914C2/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Claims (2)

1. Динамический испаритель твердых растворов, содержащий корпус в виде стакана и заслонку в виде крышки, внутренняя часть которой коаксиально входит в полость корпуса и выполнена в виде конуса, установленную с возможностью возвратно-поступательного движения относительно корпуса, нагреватель, размещенный со стороны внешней поверхности корпуса, выходное отверстие образованное кольцевым зазором между стенками заслонки и корпуса, отличающийся тем, что корпус испарителя дополнительно содержит продолжение конструкции в виде кольца высотой 1/3-2/3 высоты конусной части заслонки испарителя и внутренним диаметром, равным внешнему диаметру корпуса испарителя, причем толщина кольца равна толщине стенок корпуса испарителя.1. A dynamic evaporator of solid solutions containing a housing in the form of a glass and a shutter in the form of a cover, the inner part of which coaxially enters the cavity of the housing and is made in the form of a cone, mounted with the possibility of reciprocating motion relative to the housing, a heater placed on the side of the external surface of the housing , an outlet formed by an annular gap between the walls of the shutter and the housing, characterized in that the evaporator housing further comprises a continuation of the design in the form of a ring height 1 / 3-2 / 3 of the height of the evaporator valve cone part and an inner diameter equal to the outer diameter of the evaporator body, the thickness of the ring is equal to the wall thickness of the evaporator housing. 2. Динамический испаритель по п. 1, отличающийся тем, что внутренняя поверхность кольца, взаимодействующая с торцевой поверхностью заслонки, имеет выступы трапециевидной формы сечения с вершиной равной 1-3 мм и основанием 4-7 мм, причем выступы расположены друг от друга на расстоянии 3-5 размеров вершины трапеции, при этом величина зазора между поверхностью заслонки и поверхностью выступов кольца корпуса равна 1,5-3 мм, причем высота трапециевидных выступов не должна превосходить толщину стенки корпуса.2. The dynamic evaporator according to claim 1, characterized in that the inner surface of the ring interacting with the end surface of the damper has trapezoidal protrusions with a vertex of 1-3 mm and a base of 4-7 mm, the protrusions being spaced apart 3-5 dimensions of the apex of the trapezoid, while the gap between the flap surface and the surface of the protrusions of the body ring is 1.5-3 mm, and the height of the trapezoidal protrusions should not exceed the thickness of the body wall.
RU2016130861A 2016-07-26 2016-07-26 Dynamic evaporator of solid solutions RU2662914C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2016130861A RU2662914C2 (en) 2016-07-26 2016-07-26 Dynamic evaporator of solid solutions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2016130861A RU2662914C2 (en) 2016-07-26 2016-07-26 Dynamic evaporator of solid solutions

Publications (3)

Publication Number Publication Date
RU2016130861A true RU2016130861A (en) 2018-01-31
RU2016130861A3 RU2016130861A3 (en) 2018-04-02
RU2662914C2 RU2662914C2 (en) 2018-07-31

Family

ID=61174034

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2016130861A RU2662914C2 (en) 2016-07-26 2016-07-26 Dynamic evaporator of solid solutions

Country Status (1)

Country Link
RU (1) RU2662914C2 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1169517A (en) * 1966-09-30 1969-11-05 Edwards High Vacuum Int Ltd Apparatus for the Vaporisation of Metals or Metalloids.
DE3590269T (en) * 1984-06-12 1986-06-05 Kievskij politechničeskij institut imeni 50-letija Velikoj Oktjabrskoj Socialističeskoj Revoljucii, Kiev Process for applying thin layers by vacuum vapor deposition
SU1600383A1 (en) * 1988-09-28 1996-12-10 А.Т. Буравцев Evaporator
RU2348738C2 (en) * 2007-04-04 2009-03-10 Государственное образовательное учреждение высшего профессионального образования Самарский государственный аэрокосмический университет им. академика С.П. Королева Evaporator of multicomponent solutions

Also Published As

Publication number Publication date
RU2662914C2 (en) 2018-07-31
RU2016130861A3 (en) 2018-04-02

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MM4A The patent is invalid due to non-payment of fees

Effective date: 20180810