SU1600383A1 - Evaporator - Google Patents
EvaporatorInfo
- Publication number
- SU1600383A1 SU1600383A1 SU4607219/21A SU4607219A SU1600383A1 SU 1600383 A1 SU1600383 A1 SU 1600383A1 SU 4607219/21 A SU4607219/21 A SU 4607219/21A SU 4607219 A SU4607219 A SU 4607219A SU 1600383 A1 SU1600383 A1 SU 1600383A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- dissector
- cylinder
- steam
- crucible
- truncated cone
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
FIELD: vacuum equipment, particular, devices for application of resist in vacuum. SUBSTANCE: evaporator has additional chamber 18 with reciprocation mechanism 20 of crucible 5 and device for introduction of inert gas 19 and evacuation device 22 communicated with reaction chamber 1 by means of gate 21. Crucible 5 is made of cylinder 6 with sealed cover 7 and steam dissector 11 tightly connected to each other and installed for motion relative to each other. Dissector 11 is made in form of truncated cone with through holes 12. Dissector is connected with locking device engageable with central hole 8 in cover 7 of cylinder 6. Side surface of cylinder 6 has hole 9 to receive plug 10. Steam flow formation device has socket 17 in form of truncated cone to receive steam dissector 11. Located between cylinder 6 and dissector 11 is bellows 13 tightly connected with them. Locking device is made in form of rod with spheres 15 and 16. EFFECT: excluded introduced detects. 3 cl, 1 dwg
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4607219/21A SU1600383A1 (en) | 1988-09-28 | 1988-09-28 | Evaporator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4607219/21A SU1600383A1 (en) | 1988-09-28 | 1988-09-28 | Evaporator |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1600383A1 true SU1600383A1 (en) | 1996-12-10 |
Family
ID=60521507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU4607219/21A SU1600383A1 (en) | 1988-09-28 | 1988-09-28 | Evaporator |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1600383A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2662914C2 (en) * | 2016-07-26 | 2018-07-31 | федеральное государственное автономное образовательное учреждение высшего образования "Самарский национальный исследовательский университет имени академика С.П. Королева" | Dynamic evaporator of solid solutions |
-
1988
- 1988-09-28 SU SU4607219/21A patent/SU1600383A1/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2662914C2 (en) * | 2016-07-26 | 2018-07-31 | федеральное государственное автономное образовательное учреждение высшего образования "Самарский национальный исследовательский университет имени академика С.П. Королева" | Dynamic evaporator of solid solutions |
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