SU1600383A1 - Evaporator - Google Patents

Evaporator

Info

Publication number
SU1600383A1
SU1600383A1 SU4607219/21A SU4607219A SU1600383A1 SU 1600383 A1 SU1600383 A1 SU 1600383A1 SU 4607219/21 A SU4607219/21 A SU 4607219/21A SU 4607219 A SU4607219 A SU 4607219A SU 1600383 A1 SU1600383 A1 SU 1600383A1
Authority
SU
USSR - Soviet Union
Prior art keywords
dissector
cylinder
steam
crucible
truncated cone
Prior art date
Application number
SU4607219/21A
Other languages
Russian (ru)
Inventor
А.Т. Буравцев
Л.Н. Каплин
Г.Х. Сатаров
Original Assignee
А.Т. Буравцев
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by А.Т. Буравцев filed Critical А.Т. Буравцев
Priority to SU4607219/21A priority Critical patent/SU1600383A1/en
Application granted granted Critical
Publication of SU1600383A1 publication Critical patent/SU1600383A1/en

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  • Physical Vapour Deposition (AREA)

Abstract

FIELD: vacuum equipment, particular, devices for application of resist in vacuum. SUBSTANCE: evaporator has additional chamber 18 with reciprocation mechanism 20 of crucible 5 and device for introduction of inert gas 19 and evacuation device 22 communicated with reaction chamber 1 by means of gate 21. Crucible 5 is made of cylinder 6 with sealed cover 7 and steam dissector 11 tightly connected to each other and installed for motion relative to each other. Dissector 11 is made in form of truncated cone with through holes 12. Dissector is connected with locking device engageable with central hole 8 in cover 7 of cylinder 6. Side surface of cylinder 6 has hole 9 to receive plug 10. Steam flow formation device has socket 17 in form of truncated cone to receive steam dissector 11. Located between cylinder 6 and dissector 11 is bellows 13 tightly connected with them. Locking device is made in form of rod with spheres 15 and 16. EFFECT: excluded introduced detects. 3 cl, 1 dwg
SU4607219/21A 1988-09-28 1988-09-28 Evaporator SU1600383A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4607219/21A SU1600383A1 (en) 1988-09-28 1988-09-28 Evaporator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4607219/21A SU1600383A1 (en) 1988-09-28 1988-09-28 Evaporator

Publications (1)

Publication Number Publication Date
SU1600383A1 true SU1600383A1 (en) 1996-12-10

Family

ID=60521507

Family Applications (1)

Application Number Title Priority Date Filing Date
SU4607219/21A SU1600383A1 (en) 1988-09-28 1988-09-28 Evaporator

Country Status (1)

Country Link
SU (1) SU1600383A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2662914C2 (en) * 2016-07-26 2018-07-31 федеральное государственное автономное образовательное учреждение высшего образования "Самарский национальный исследовательский университет имени академика С.П. Королева" Dynamic evaporator of solid solutions

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2662914C2 (en) * 2016-07-26 2018-07-31 федеральное государственное автономное образовательное учреждение высшего образования "Самарский национальный исследовательский университет имени академика С.П. Королева" Dynamic evaporator of solid solutions

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