JPS5269552A - Vacuum breaking equipment - Google Patents

Vacuum breaking equipment

Info

Publication number
JPS5269552A
JPS5269552A JP14511475A JP14511475A JPS5269552A JP S5269552 A JPS5269552 A JP S5269552A JP 14511475 A JP14511475 A JP 14511475A JP 14511475 A JP14511475 A JP 14511475A JP S5269552 A JPS5269552 A JP S5269552A
Authority
JP
Japan
Prior art keywords
vacuum breaking
vacuum
breaking equipment
breaking
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14511475A
Other languages
Japanese (ja)
Inventor
Sadao Terakado
Tsutomu Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14511475A priority Critical patent/JPS5269552A/en
Publication of JPS5269552A publication Critical patent/JPS5269552A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: The magnetic adsorber is installed to valve breaking plate which performs vacuum breaking between vacuum chambers of electronic microscope, etc. As a result, vacuum breaking can be secured assuredly between two chambers through simple action, thus obtained highly reliable operation.
COPYRIGHT: (C)1977,JPO&Japio
JP14511475A 1975-12-08 1975-12-08 Vacuum breaking equipment Pending JPS5269552A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14511475A JPS5269552A (en) 1975-12-08 1975-12-08 Vacuum breaking equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14511475A JPS5269552A (en) 1975-12-08 1975-12-08 Vacuum breaking equipment

Publications (1)

Publication Number Publication Date
JPS5269552A true JPS5269552A (en) 1977-06-09

Family

ID=15377699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14511475A Pending JPS5269552A (en) 1975-12-08 1975-12-08 Vacuum breaking equipment

Country Status (1)

Country Link
JP (1) JPS5269552A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49132976A (en) * 1973-04-06 1974-12-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49132976A (en) * 1973-04-06 1974-12-20

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