RU2013121515A - METHOD FOR CLEANING HYDROGEN HYDROGEN - Google Patents
METHOD FOR CLEANING HYDROGEN HYDROGEN Download PDFInfo
- Publication number
- RU2013121515A RU2013121515A RU2013121515/05A RU2013121515A RU2013121515A RU 2013121515 A RU2013121515 A RU 2013121515A RU 2013121515/05 A RU2013121515/05 A RU 2013121515/05A RU 2013121515 A RU2013121515 A RU 2013121515A RU 2013121515 A RU2013121515 A RU 2013121515A
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- hydrogen
- sodium
- fluoride
- temperature
- cleaning
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- Silicon Compounds (AREA)
- Hydrogen, Water And Hydrids (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Abstract
Способ очистки фтористого водорода от фторидов кремния и фосфора путем пропускания газовой смеси через фторид натрия, отличающийся тем, что смесь контактируют с фторидом натрия при температуре 20-40°С и давлении 100-200 мм рт.ст. до образования полигидрофторидов натрия и комплексных фторидов примесных элементов, после чего повышают температуру до 55-70°С и проводят десорбцию фтористого водорода.The method of purification of hydrogen fluoride from silicon fluorides and phosphorus by passing a gas mixture through sodium fluoride, characterized in that the mixture is contacted with sodium fluoride at a temperature of 20-40 ° C and a pressure of 100-200 mm RT.article until sodium polyhydrofluorides and complex fluorides of impurity elements are formed, after which the temperature is raised to 55-70 ° C and hydrogen fluoride is desorbed.
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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RU2013121515/05A RU2534252C1 (en) | 2013-05-07 | 2013-05-07 | Method of hydrogen fluoride purification |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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RU2013121515/05A RU2534252C1 (en) | 2013-05-07 | 2013-05-07 | Method of hydrogen fluoride purification |
Publications (2)
Publication Number | Publication Date |
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RU2013121515A true RU2013121515A (en) | 2014-11-20 |
RU2534252C1 RU2534252C1 (en) | 2014-11-27 |
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Family Applications (1)
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RU2013121515/05A RU2534252C1 (en) | 2013-05-07 | 2013-05-07 | Method of hydrogen fluoride purification |
Country Status (1)
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RU (1) | RU2534252C1 (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1492808A (en) * | 1965-11-26 | 1967-08-25 | Commissariat Energie Atomique | Process for obtaining very high purity hydrofluoric acid and apparatus for carrying out the process or a similar process |
SU919984A1 (en) * | 1980-05-29 | 1982-04-15 | Иркутский филиал Всесоюзного научно-исследовательского и проектного института алюминиевой, магниевой и электродной промышленности | Method of purifying hydrofluoric acid |
RU2034776C1 (en) * | 1993-03-11 | 1995-05-10 | Всероссийский научно-исследовательский институт химической технологии | Method of hydrogen fluoride purification |
US20040037768A1 (en) * | 2001-11-26 | 2004-02-26 | Robert Jackson | Method and system for on-site generation and distribution of a process gas |
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2013
- 2013-05-07 RU RU2013121515/05A patent/RU2534252C1/en not_active IP Right Cessation
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Publication number | Publication date |
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RU2534252C1 (en) | 2014-11-27 |
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Legal Events
Date | Code | Title | Description |
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TC4A | Change in inventorship |
Effective date: 20150216 |
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MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20190508 |