RU2009121050A - INTERFERENCE METER OF SMALL MOVEMENTS - Google Patents
INTERFERENCE METER OF SMALL MOVEMENTS Download PDFInfo
- Publication number
- RU2009121050A RU2009121050A RU2009121050/28A RU2009121050A RU2009121050A RU 2009121050 A RU2009121050 A RU 2009121050A RU 2009121050/28 A RU2009121050/28 A RU 2009121050/28A RU 2009121050 A RU2009121050 A RU 2009121050A RU 2009121050 A RU2009121050 A RU 2009121050A
- Authority
- RU
- Russia
- Prior art keywords
- plane
- beam splitter
- screen
- reflector mounted
- interference pattern
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims abstract 8
- 230000001427 coherent effect Effects 0.000 claims abstract 2
- 238000006073 displacement reaction Methods 0.000 claims abstract 2
- 238000005259 measurement Methods 0.000 claims abstract 2
- 230000005855 radiation Effects 0.000 claims abstract 2
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Интерференционный измеритель малых перемещений, содержащий оптически связанные и последовательно размещенные источник когерентного оптического излучения, оптическую систему, светоделитель, отражатель, закрепленный на поверхности объекта контроля, жестко скрепленного с опорным основанием, и расположенный под углом к светоделителю, экран с установленным в его плоскости в заданной области интерференционной картины фотоприемным устройством, отличающийся тем, что на опорном основании в области, облучаемой пучком оптического излучения за оптической системой, жестко закреплен имитатор объекта контроля с установленным на его поверхности дополнительным отражателем, причем имитатор выполнен с возможностью регулировки положения дополнительного отражателя, размещенного в одной плоскости с отражателем, закрепленным на поверхности объекта контроля, на экран дополнительно спроецирована интерференционная картина, полученная при совмещении опорного пучка от светоделителя и объектного пучка от дополнительного отражателя, при этом в плоскости экрана в ее области, аналогичной области интерференционной картины, полученной при совмещении опорного пучка от светоделителя и объектного пучка от отражателя, закрепленного на поверхности объекта контроля, установлено дополнительное фотоприемное устройство, а выходы фотоприемных устройств электрически соединены со входами дифференциального усилителя, выход которого связан с устройством регистрации, обработки и отображения результатов измерений. A small displacement interference meter containing optically coupled and sequentially placed a source of coherent optical radiation, an optical system, a beam splitter, a reflector mounted on the surface of the control object, rigidly fastened to the support base, and located at an angle to the beam splitter, a screen with its plane installed in its plane the area of the interference pattern with a photodetector, characterized in that on the support base in the area irradiated by the optical beam the optical system, the simulator of the control object with an additional reflector mounted on its surface is rigidly fixed, and the simulator is configured to adjust the position of the additional reflector located in the same plane as the reflector mounted on the surface of the control object, an interference pattern obtained by combining is additionally projected onto the screen the reference beam from the beam splitter and the object beam from the additional reflector, while in the plane of the screen in its region, is similar the second region of the interference pattern obtained by combining the reference beam from the beam splitter and the object beam from the reflector mounted on the surface of the test object, an additional photodetector is installed, and the outputs of the photodetectors are electrically connected to the inputs of the differential amplifier, the output of which is connected to the recording, processing and display device measurement results.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2009121050/28A RU2410642C1 (en) | 2009-06-02 | 2009-06-02 | Interferential metre of fine movements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2009121050/28A RU2410642C1 (en) | 2009-06-02 | 2009-06-02 | Interferential metre of fine movements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2009121050A true RU2009121050A (en) | 2010-12-10 |
| RU2410642C1 RU2410642C1 (en) | 2011-01-27 |
Family
ID=46306088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2009121050/28A RU2410642C1 (en) | 2009-06-02 | 2009-06-02 | Interferential metre of fine movements |
Country Status (1)
| Country | Link |
|---|---|
| RU (1) | RU2410642C1 (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU794364A1 (en) * | 1978-12-26 | 1981-01-07 | Московский Ордена Трудовогокрасного Знамени Инженерно- Физический Институт | Interference-type linear displacement meter |
| RU2057286C1 (en) * | 1993-07-14 | 1996-03-27 | Колючкин Василий Яковлевич | Photoelectric displacement meter |
| RU2169348C1 (en) * | 1999-09-28 | 2001-06-20 | Научно-исследовательский институт механики и прикладной математики Ростовского государственного университета | Displacement meter with volume hologram |
| JP3919796B2 (en) * | 2005-05-23 | 2007-05-30 | 国立大学法人九州大学 | Displacement measuring device |
| JP4732832B2 (en) * | 2005-08-17 | 2011-07-27 | 株式会社日立製作所 | Displacement measuring method and apparatus, stage apparatus and probe microscope |
-
2009
- 2009-06-02 RU RU2009121050/28A patent/RU2410642C1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| RU2410642C1 (en) | 2011-01-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20110603 |