RU2007144257A - OPTICAL DEVICE FOR MEASURING MOVEMENTS - Google Patents
OPTICAL DEVICE FOR MEASURING MOVEMENTS Download PDFInfo
- Publication number
- RU2007144257A RU2007144257A RU2007144257/28A RU2007144257A RU2007144257A RU 2007144257 A RU2007144257 A RU 2007144257A RU 2007144257/28 A RU2007144257/28 A RU 2007144257/28A RU 2007144257 A RU2007144257 A RU 2007144257A RU 2007144257 A RU2007144257 A RU 2007144257A
- Authority
- RU
- Russia
- Prior art keywords
- interference pattern
- beam splitter
- photodetector
- angle
- screen
- Prior art date
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- Length Measuring Devices By Optical Means (AREA)
Abstract
Оптическое устройство для измерения перемещений, содержащее оптически связанные и последовательно размещенные источник когерентного оптического излучения, оптическую систему, светоделитель, отражатель, закрепленный на поверхности объекта контроля и расположенный под углом к светоделителю, экран с установленным на нем фотоприемным устройством, отличающееся тем, что фотоприемное устройство выполнено в виде прямоугольной матрицы фотоприемников и установлено в плоскости экрана радиально кольцам интерференционной картины в горизонтальном сечении на интервале от края интерференционной картины, противоположного вершине угла между светоделителем и отражателем, до центра интерференционной картины, при этом высота матрицы фотоприемников совпадает с прямолинейным участком окружности центрального максимума интерференционной картины.An optical device for measuring displacement, containing optically coupled and sequentially placed a source of coherent optical radiation, an optical system, a beam splitter, a reflector mounted on the surface of the test object and located at an angle to the beam splitter, a screen with a photodetector installed on it, characterized in that the photodetector made in the form of a rectangular matrix of photodetectors and installed in the plane of the screen radially to the rings of the interference pattern in the horizon is a cross section in the interval from the edge of the interference pattern, opposite the vertex of the angle between the beam splitter and the reflector, to the center of the interference pattern, while the height of the photodetector array coincides with the rectilinear portion of the circle of the central maximum of the interference pattern.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2007144257/28A RU2373492C2 (en) | 2007-11-28 | 2007-11-28 | Optical device for measuring displacements |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2007144257/28A RU2373492C2 (en) | 2007-11-28 | 2007-11-28 | Optical device for measuring displacements |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2007144257A true RU2007144257A (en) | 2009-06-10 |
RU2373492C2 RU2373492C2 (en) | 2009-11-20 |
Family
ID=41024147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2007144257/28A RU2373492C2 (en) | 2007-11-28 | 2007-11-28 | Optical device for measuring displacements |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2373492C2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2473044C1 (en) * | 2011-08-30 | 2013-01-20 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" - Госкорпорация "Росатом" | Device for measuring small displacements or deformations of objects |
RU2502951C1 (en) * | 2012-06-15 | 2013-12-27 | федеральное государственное бюджетное научное учреждение "Научно-исследовательский радиофизический институт" | Nano- and sub-nanometer accuracy apparatus for controlling position of object |
RU2502952C1 (en) * | 2012-06-15 | 2013-12-27 | федеральное государственное бюджетное научное учреждение "Научно-исследовательский радиофизический институт" | Apparatus for nanometer accuracy linear displacements in wide range of possible displacements |
-
2007
- 2007-11-28 RU RU2007144257/28A patent/RU2373492C2/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
RU2373492C2 (en) | 2009-11-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20101129 |