RU2009118234A - METHOD FOR OPTICAL MEASUREMENTS FOR DETERMINING MATERIAL PROPERTIES - Google Patents
METHOD FOR OPTICAL MEASUREMENTS FOR DETERMINING MATERIAL PROPERTIES Download PDFInfo
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- RU2009118234A RU2009118234A RU2009118234/28A RU2009118234A RU2009118234A RU 2009118234 A RU2009118234 A RU 2009118234A RU 2009118234/28 A RU2009118234/28 A RU 2009118234/28A RU 2009118234 A RU2009118234 A RU 2009118234A RU 2009118234 A RU2009118234 A RU 2009118234A
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- angle
- reflection coefficient
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- radiation
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
1. Способ оптических измерений для определения свойств материалов, заключающийся в том, что посредством модуляционной спектроскопии измеряют спектры, отличающийся тем, что измеряют спектр угла θ1, соответствующего минимуму зависимости коэффициента отражения светового излучения от угла падения, и спектр угла θ2, соответствующего точке перегиба угловой зависимости коэффициента отражения, при этом осуществляют модуляцию угла падения излучения на исследуемый образец с амплитудой, обеспечивающей отсутствие искажений θ1 и θ2, связанных с нелинейностью угловой зависимости коэффициента отражения, или пренебрежимо малое влияние нелинейности угловой зависимости коэффициента отражения. ! 2. Способ по п.1, отличающийся тем, что выбором частоты модуляции f обеспечивают достаточно высокое отношение сигнал/шум для выделения из шума полезного сигнала, необходимого для измерения характеристических углов при отсутствии искажений θ1 и θ2. ! 3. Способ по п.1, отличающийся тем, что при измерении спектров углов используют линейно поляризованное излучение, его р-компоненту. ! 4. Способ по п.1, отличающийся тем, что для модуляции угла падения излучения на исследуемый образец с амплитудой, обеспечивающей отсутствие искажений θ1 и θ2, связанных с нелинейностью угловой зависимости коэффициента отражения, амплитуду выбирают от 0,2 до 2 градусов. ! 5. Способ по п.2, отличающийся тем, что при выборе частоты модуляции f, обеспечивающей достаточно высокое отношение сигнал/шум для выделения из шума полезного сигнала, необходимого для измерения характеристических углов при отсутствии искажений θ1 и θ2, используют значения от 5 до 200 Гц. 1. The method of optical measurements for determining the properties of materials, which consists in the fact that modulation spectroscopy measure spectra, characterized in that they measure the spectrum of the angle θ1 corresponding to the minimum dependence of the reflection coefficient of light radiation on the angle of incidence, and the spectrum of the angle θ2 corresponding to the inflection point of the angle the dependences of the reflection coefficient, while modulating the angle of incidence of radiation on the test sample with an amplitude that ensures the absence of distortions θ1 and θ2 associated with not ineynostyu angular dependence of the reflection coefficient or negligible effect of the nonlinearity of the angular dependence of the reflection coefficient. ! 2. The method according to claim 1, characterized in that the choice of modulation frequency f provides a sufficiently high signal-to-noise ratio for extracting from the noise a useful signal necessary for measuring characteristic angles in the absence of distortions θ1 and θ2. ! 3. The method according to claim 1, characterized in that when measuring the spectra of angles using linearly polarized radiation, its p-component. ! 4. The method according to claim 1, characterized in that for modulating the angle of incidence of radiation on the test sample with an amplitude that ensures the absence of distortions θ1 and θ2 associated with the nonlinearity of the angular dependence of the reflection coefficient, the amplitude is selected from 0.2 to 2 degrees. ! 5. The method according to claim 2, characterized in that when choosing a modulation frequency f that provides a sufficiently high signal-to-noise ratio to extract from the noise a useful signal necessary for measuring characteristic angles in the absence of distortions θ1 and θ2, values from 5 to 200 are used Hz
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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RU2009118234/28A RU2423684C2 (en) | 2009-05-13 | 2009-05-13 | Optical measurement method for material |
Applications Claiming Priority (1)
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RU2009118234/28A RU2423684C2 (en) | 2009-05-13 | 2009-05-13 | Optical measurement method for material |
Publications (2)
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RU2009118234A true RU2009118234A (en) | 2010-11-20 |
RU2423684C2 RU2423684C2 (en) | 2011-07-10 |
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RU2009118234/28A RU2423684C2 (en) | 2009-05-13 | 2009-05-13 | Optical measurement method for material |
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RU (1) | RU2423684C2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020146933A1 (en) * | 2019-01-14 | 2020-07-23 | Общество С Ограниченной Ответственностью "Эссентоптикс" | Spectrophotometer |
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2009
- 2009-05-13 RU RU2009118234/28A patent/RU2423684C2/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020146933A1 (en) * | 2019-01-14 | 2020-07-23 | Общество С Ограниченной Ответственностью "Эссентоптикс" | Spectrophotometer |
CN113544479A (en) * | 2019-01-14 | 2021-10-22 | 伊森特光学公司 | Spectrophotometer |
Also Published As
Publication number | Publication date |
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RU2423684C2 (en) | 2011-07-10 |
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Effective date: 20140514 |