RU2007132167A - DEVICE FOR PROCESSING MATERIALS IN SUPERCRITICAL FLUIDS AND ITS METHODS - Google Patents

DEVICE FOR PROCESSING MATERIALS IN SUPERCRITICAL FLUIDS AND ITS METHODS Download PDF

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RU2007132167A
RU2007132167A RU2007132167/15A RU2007132167A RU2007132167A RU 2007132167 A RU2007132167 A RU 2007132167A RU 2007132167/15 A RU2007132167/15 A RU 2007132167/15A RU 2007132167 A RU2007132167 A RU 2007132167A RU 2007132167 A RU2007132167 A RU 2007132167A
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capsule
pressure
strength shell
heating device
supercritical fluid
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RU2007132167/15A
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RU2393008C2 (en
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Марк Филип Д`ЭВЕЛИН (US)
Марк Филип Д`ЭВЕЛИН
Роберт Артур ГИДДИНГС (US)
Роберт Артур ГИДДИНГС
Фред ШАРИФИ (US)
Фред ШАРИФИ
Субхраджит ДЕЙ (IN)
Субхраджит ДЕЙ
Хойцун ХУН (US)
Хойцун ХУН
Джозеф Александр КАПП (US)
Джозеф Александр КАПП
Ашок Кумар КХАР (US)
Ашок Кумар КХАР
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Дженерал Электрик Компани (US)
Дженерал Электрик Компани
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/008—Processes carried out under supercritical conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/002—Component parts of these vessels not mentioned in B01J3/004, B01J3/006, B01J3/02 - B01J3/08; Measures taken in conjunction with the process to be carried out, e.g. safety measures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/03—Pressure vessels, or vacuum vessels, having closure members or seals specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/04—Pressure vessels, e.g. autoclaves
    • B01J3/046—Pressure-balanced vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/06—Processes using ultra-high pressure, e.g. for the formation of diamonds; Apparatus therefor, e.g. moulds or dies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2203/00—Processes utilising sub- or super atmospheric pressure
    • B01J2203/06—High pressure synthesis
    • B01J2203/065—Composition of the material produced
    • B01J2203/0665—Gallium nitrides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2203/00—Processes utilising sub- or super atmospheric pressure
    • B01J2203/06—High pressure synthesis
    • B01J2203/0675—Structural or physico-chemical features of the materials processed
    • B01J2203/068—Crystal growth
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00132—Controlling the temperature using electric heating or cooling elements
    • B01J2219/00135—Electric resistance heaters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/0015—Controlling the temperature by thermal insulation means
    • B01J2219/00155—Controlling the temperature by thermal insulation means using insulating materials or refractories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00162—Controlling or regulating processes controlling the pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/54—Improvements relating to the production of bulk chemicals using solvents, e.g. supercritical solvents or ionic liquids
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1092—Shape defined by a solid member other than seed or product [e.g., Bridgman-Stockbarger]

Claims (22)

1. Аппарат, содержащий1. The apparatus containing капсулу, выполненную с возможностью содержать сверхкритическую текучую среду;a capsule configured to contain supercritical fluid; сосуд высокого давления, расположенный вокруг капсулы, причем этот сосуд высокого давления выполнен с возможностью содержать сжатый газ, окружающий капсулу; иa pressure vessel located around the capsule, and this pressure vessel is configured to contain compressed gas surrounding the capsule; and устройство регулирования давления, выполненное с возможностью уравновешивать внутреннее давление внутри капсулы с окружающим давлением сжатого газа внутри сосуда высокого давления в ответ на измеренные условия окружающей среды внутри капсулы или сосуда высокого давления.a pressure control device configured to balance the internal pressure inside the capsule with the ambient pressure of the compressed gas inside the pressure vessel in response to the measured environmental conditions inside the capsule or pressure vessel. 2. Аппарат по п.1, содержащий датчик давления, расположенный внутри капсулы, причем этот датчик давления выполнен с возможностью измерять внутреннее давление.2. The apparatus according to claim 1, containing a pressure sensor located inside the capsule, and this pressure sensor is configured to measure internal pressure. 3. Аппарат по п.1, содержащий устройство измерения смещения, выполненное с возможностью измерять деформацию капсулы вследствие разности давлений между внутренним давлением и окружающим давлением.3. The apparatus according to claim 1, containing a displacement measuring device configured to measure the deformation of the capsule due to the pressure difference between the internal pressure and the ambient pressure. 4. Аппарат по п.1, содержащий по меньшей мере одну перфорированную перегородку, размещенную внутри капсулы разделяющей капсулу на первую камеру и вторую камеру, причем упомянутая по меньшей мере одна перфорированная перегородка содержит центральное отверстие и множество отверстий, расположенных симметрично вокруг центрального отверстия.4. The apparatus according to claim 1, containing at least one perforated partition placed inside the capsule separating the capsule into a first chamber and a second chamber, said at least one perforated partition containing a central hole and a plurality of holes symmetrically around the central hole. 5. Аппарат по п.1, содержащий датчики температуры и давления, расположенные внутри капсулы и/или между сосудом высокого давления и капсулой, причем эти датчики температуры и давления выполнены с возможностью обеспечивать управление на основе обратной связи условиями окружающей среды внутри капсулы и обеспечивать управление на основе обратной связи уравновешиванием внутреннего давления в капсуле и окружающего ее давления. 5. The apparatus according to claim 1, containing temperature and pressure sensors located inside the capsule and / or between the pressure vessel and the capsule, and these temperature and pressure sensors are configured to provide feedback control of environmental conditions inside the capsule and provide control based on feedback by balancing the internal pressure in the capsule and the surrounding pressure. 6. Аппарат по п.1, в котором капсула является деформируемой, химически инертной и по существу непроницаемой для сверхкритической текучей среды.6. The apparatus of claim 1, wherein the capsule is deformable, chemically inert, and substantially impervious to supercritical fluid. 7. Аппарат по п.1, содержащий кристалл нитрида галлия, имеющий пик поглощения в инфракрасной области вблизи 3175 см-1 при спектральной поглощательной способности на единицу толщины между примерно 0,01 и 200 см-1, и при этом кристалл нитрида галлия выращивается в сверхкритическом аммиаке при температуре выше 550°С.7. The apparatus according to claim 1, containing a gallium nitride crystal having an absorption peak in the infrared region near 3175 cm -1 at a spectral absorption capacity per unit thickness between about 0.01 and 200 cm -1 , and wherein the gallium nitride crystal is grown in supercritical ammonia at temperatures above 550 ° C. 8. Аппарат, содержащий8. The apparatus containing высокопрочную оболочку;high strength shell; капсулу, размещенную внутри высокопрочной оболочки, причем эта капсула выполнена с возможностью содержать один или более материалов в окружающей среде со сверхкритической текучей средой;a capsule placed inside a high-strength shell, the capsule being configured to contain one or more materials in a supercritical fluid environment; нагревательное устройство, расположенное между высокопрочной оболочкой и капсулой, причем это нагревательное устройство выполнено с возможностью передавать тепло в окружающую среду внутри капсулы, так что эта окружающая среда нагревается и самопроизвольно повышает свое давление от этого тепла, при этом высокопрочная оболочка выполнена с возможностью окружать и упираться в капсулу для противодействия внутренним давлениям внутри капсулы; и a heating device located between the high-strength shell and the capsule, and this heating device is configured to transfer heat to the environment inside the capsule, so that this environment heats up and spontaneously increases its pressure from this heat, while the high-strength shell is made to surround and abut into a capsule to counter internal pressures inside the capsule; and теплоизоляцию, размещенную между высокопрочной оболочкой и нагревательным устройством, причем эта теплоизоляция выполнена с возможностью удерживать тепло внутри капсулы и уменьшать теплопередачу в высокопрочную оболочку.thermal insulation located between the high-strength shell and the heating device, and this thermal insulation is made with the ability to retain heat inside the capsule and reduce heat transfer to the high-strength shell. 9. Аппарат по п.8, содержащий охлаждающее устройство, выполненное с возможностью охлаждать высокопрочную оболочку.9. The apparatus of claim 8, containing a cooling device configured to cool the high-strength shell. 10. Аппарат по п.8, причем этот аппарат выполнен с возможностью повышать рабочие условия внутри капсулы до давлений, превышающих 1 кбар, и температур, превышающих 550°С, или до давлений, превышающих 5 кбар, и температур, превышающих 300°.10. The apparatus of claim 8, wherein this apparatus is configured to increase operating conditions inside the capsule to pressures exceeding 1 kbar and temperatures exceeding 550 ° C, or to pressures exceeding 5 kbar and temperatures exceeding 300 °. 11. Аппарат по п.8, в котором капсула является механически расширяемой и сжимаемой, химически инертной и непроницаемой для сверхкритической текучей среды.11. The apparatus of claim 8, in which the capsule is mechanically expandable and compressible, chemically inert and impervious to supercritical fluid. 12. Аппарат по п.8, содержащий систему регулирования температуры, выполненную с возможностью управлять нагревательным устройством для регулирования температуры капсулы.12. The apparatus of claim 8, comprising a temperature control system configured to control a heating device for controlling the temperature of the capsule. 13. Аппарат по п.8, содержащий разделительную конструкцию, размещенную внутри капсулы разделяющей капсулу на первую камеру и вторую камеру, причем эта разделительная конструкция содержит центральное отверстие и множество отверстий, расположенных симметрично вокруг центрального отверстия.13. The apparatus of claim 8, comprising a dividing structure disposed within a capsule separating the capsule into a first chamber and a second chamber, the dividing structure comprising a central hole and a plurality of holes symmetrically around the central hole. 14. Аппарат по п.8, содержащий высокотемпературный вкладыш, размещенный между теплоизоляцией и высокопрочной оболочкой.14. The apparatus of claim 8, containing a high-temperature liner located between the insulation and high-strength shell. 15. Аппарат по п.8, содержащий множество радиальных сегментов, размещенных один за другим вокруг периферии капсулы внутри высокопрочной оболочки.15. The apparatus of claim 8, containing many radial segments placed one after another around the periphery of the capsule inside the high-strength shell. 16. Аппарат по п.8, в котором капсула содержит гильзу с более высоким коэффициентом термического расширения, чем у нагревательного элемента.16. The apparatus of claim 8, in which the capsule contains a sleeve with a higher coefficient of thermal expansion than the heating element. 17. Аппарат по п.8, содержащий кристалл нитрида галлия, имеющий пик поглощения в инфракрасной области вблизи 3175 см-1 при спектральной поглощательной способности на единицу толщины между примерно 0,01 и 200 см-1, и при этом кристалл нитрида галлия выращивается в сверхкритическом аммиаке при температуре свыше 550°С.17. The apparatus of claim 8, containing a gallium nitride crystal having an absorption peak in the infrared region near 3175 cm -1 at a spectral absorption capacity per unit thickness between about 0.01 and 200 cm -1 , and the gallium nitride crystal is grown in supercritical ammonia at temperatures above 550 ° C. 18. Аппарат, содержащий18. The apparatus containing сосуд высокого давления, выполненный с возможностью обработки материала, содержащегося в капсуле с самопроизвольным повышением давления, причем этот сосуд высокого давления выполнен с возможностью содержать сжатый газ, окружающий капсулу с самопроизвольным повышением давления; a pressure vessel configured to process the material contained in the capsule with spontaneous pressure increase, and this pressure vessel is configured to contain compressed gas surrounding the capsule with spontaneous pressure increase; устройство измерения смещения, выполненное с возможностью измерять деформацию капсулы с самопроизвольным повышением давления вследствие разности давлений между внутренним давлением и окружающим давлением капсулы с самопроизвольным повышением давления; иa displacement measuring device configured to measure the deformation of the capsule with a spontaneous increase in pressure due to the pressure difference between the internal pressure and the ambient pressure of the capsule with a spontaneous increase in pressure; and устройство регулирования давления, выполненное с возможностью уравновешивать внутреннее давление внутри капсулы с окружающим давлением сжатого газа внутри сосуда высокого давления при минимизации смещения или деформации капсулы с самопроизвольным повышением давления.a pressure control device configured to balance the internal pressure inside the capsule with the surrounding pressure of the compressed gas inside the pressure vessel while minimizing displacement or deformation of the capsule with spontaneous pressure increase. 19. Аппарат, содержащий19. The apparatus containing высокопрочную оболочку;high strength shell; нагревательное устройство, расположенное внутри высокопрочной оболочки и выполненное с возможностью вмещать капсулу, причем это нагревательное устройство выполнено с возможностью передавать тепло в окружающую среду внутри капсулы, так что эта окружающая среда нагревается и самопроизвольно повышает свое давление от этого тепла, при этом высокопрочная оболочка выполнена с возможностью окружать и упираться в капсулу для противодействия внутренним давлениям внутри капсулы без значительного давления газа между нагревательным устройством и капсулой; и a heating device located inside the high-strength shell and configured to hold the capsule, and this heating device is configured to transfer heat to the environment inside the capsule, so that this environment heats up and spontaneously increases its pressure from this heat, while the high-strength shell is made with the ability to surround and abut the capsule to counter internal pressures inside the capsule without significant gas pressure between the heating device PTO and capsule; and теплоизоляцию, размещенную между высокопрочной оболочкой и нагревательным устройством.thermal insulation placed between the high-strength shell and the heating device. 20. Способ эксплуатации аппарата, содержащий20. A method of operating an apparatus comprising идентификацию разности между внутренним давлением внутри капсулы со сверхкритической текучей средой и окружающим давлением между сосудом высокого давления и капсулой со сверхкритической текучей средой, размещенной внутри сосуда высокого давления; иidentifying the difference between the internal pressure inside the supercritical fluid capsule and the ambient pressure between the pressure vessel and the supercritical fluid capsule located inside the pressure vessel; and регулирование внутреннего давления или окружающего давления для по существу уравновешивания разности между внутренним давлением и окружающим давлением.adjusting the internal pressure or ambient pressure to substantially balance the difference between the internal pressure and the ambient pressure. 21. Способ по пункту 20, содержащий измерение смещения капсулы со сверхкритической текучей средой, вызванного разностью между внутренним давлением и окружающим давлением.21. The method of claim 20, comprising measuring the displacement of the supercritical fluid capsule caused by the difference between the internal pressure and the ambient pressure. 22. Способ изготовления аппарата, содержащий22. A method of manufacturing an apparatus comprising обеспечение высокопрочной оболочки;providing a high-strength shell; обеспечение капсулы, выполненной с возможностью размещения внутри высокопрочной оболочки, причем эта капсула выполнена с возможностью содержать вещество, включающее в себя сверхкритическую текучую среду;providing a capsule configured to fit within a high strength shell, the capsule being configured to contain a substance including a supercritical fluid; обеспечение нагревательного устройства, выполненного с возможностью размещения между высокопрочной оболочкой и капсулой; иproviding a heating device configured to be placed between the high-strength shell and the capsule; and обеспечение теплоизоляции, выполненной с возможностью размещения между высокопрочной оболочкой и нагревательным устройством. providing thermal insulation, made with the possibility of placement between the high-strength shell and the heating device.
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CN101163540B (en) 2011-04-13
US7704324B2 (en) 2010-04-27
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