RU2006142703A - Модификация электромеханического поведения приборов - Google Patents
Модификация электромеханического поведения приборов Download PDFInfo
- Publication number
- RU2006142703A RU2006142703A RU2006142703/28A RU2006142703A RU2006142703A RU 2006142703 A RU2006142703 A RU 2006142703A RU 2006142703/28 A RU2006142703/28 A RU 2006142703/28A RU 2006142703 A RU2006142703 A RU 2006142703A RU 2006142703 A RU2006142703 A RU 2006142703A
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0035—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS
- B81B7/0038—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Micromachines (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Couplings Of Light Guides (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Cold Cathode And The Manufacture (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Contacts (AREA)
- Casings For Electric Apparatus (AREA)
- Manufacture Of Switches (AREA)
Claims (30)
1. Прибор, содержащий первую поверхность; вторую поверхность, смещенную относительно первой поверхности, чтобы сформировать корпус; по меньшей мере, один подвижный элемент внутри корпуса, имеющий подвижную поверхность, чтобы контактировать с другой поверхностью; и материал управления средой внутри корпуса, предназначенный для того, чтобы воздействовать на работу подвижного элемента.
2. Прибор по п.1, в котором первая поверхность содержит подложку.
3. Прибор по п.2, в котором подложка содержит, по меньшей мере, одно из следующих веществ: стекло, пластмасса, металл, кремний и керамика.
4. Прибор по п.1, в котором вторая поверхность содержит задний щиток.
5. Прибор по п.4, в котором задний щиток содержит, по меньшей мере, одно из следующих веществ: стекло, пластмасса, металл, металлическая фольга, кремний, керамика и текучая среда.
6. Прибор по п.1, дополнительно содержащий соединительный материал, предназначенный для того, чтобы соединять первую поверхность и вторую поверхность.
7. Прибор по п.6, в котором соединительный материал содержит один материал, выбранный из группы, состоящей из следующих: адгезивы на основе эпоксидной смолы, кольцевые уплотнения, PIB, полиуретаны, адгезивы с внедренным цеолитом, тонкопленочные паяные металлические соединения, жидкие покрытия на стекле, полученные методом центрифугирования, припой, выращенные полимеры и выращенные пластиковые слои.
8. Прибор по п.1, в котором материал управления средой содержит один материал, выбранный из группы, состоящей из следующих: цеолиты, ультрафильтры, влагопоглотители, поверхностные адсорбенты или объемные адсорбенты, химические реактивы и физические ограничители.
9. Прибор по п.8, в котором ультрафильтры формируются посредством процесса, выбранного из группы, состоящей из следующих: ультрафильтры в осажденных тонких пленках, ультрафильтры, получаемые методом центрифугирования на полимерах, ультрафильтры, распыленные на поверхности прибора, и регенерированные ультрафильтры, приготовленные заранее.
10. Прибор по п.1, в котором первая поверхность и вторая поверхность смещаются, чтобы сформировать корпус, который содержит первую и вторую поверхности модульного корпуса.
11. Прибор по п.1, в котором материал управления средой содержит материал управления средой, встроенный в подвижный элемент.
12. Прибор по п.1, в котором материал управления средой содержит материал управления средой, встроенный в компонент корпуса.
13. Прибор по п.1, в котором работа подвижного элемента содержит приведение в движение подвижной поверхности.
14. Прибор по п.1, в котором работа подвижного элемента содержит приведение в контакт подвижного элемента и первой поверхности.
15. Прибор по п.1, в котором первая поверхность и вторая поверхность смещены для формирования корпуса, который содержит первую поверхность, имеющую боковые стороны.
16. Прибор по п.1, в котором первая поверхность содержит поверхность, общую как для модульного корпуса, так и для приборного корпуса.
17. Способ монтажа в приборном корпусе, содержащий формирование, по меньшей мере, одного подвижного элемента на подложке; заключение элемента и подложки в корпусе; и включение материала управления средой в корпус, причем материал управления средой выбирается на основе влияния материала на работу элемента.
18. Способ по п.17, в котором формирование, по меньшей мере, одного подвижного элемента содержит формирование интерферометрического модулятора.
19. Способ по п.17, в котором заключение элемента и подложки в корпусе содержит заключение элемента и подложки в приборном корпусе, и в котором включение материала управления средой содержит включение материала управления средой в приборный корпус.
20. Способ по п.17, в котором заключение элемента и подложки в корпусе содержит заключение элемента и подложки в модульном корпусе, и в котором включение материала управления средой содержит включение материала управления средой в модульный корпус.
21. Способ по п.17, в котором формирование, по меньшей мере, одного подвижного элемента на подложке содержит формирование подвижного элемента из тонких пленок, и в котором включение материала управления средой содержит включение материала управления средой, встроенного в одну из тонких пленок.
22. Способ по п.17, в котором включение материала управления средой содержит встраивание материала управления средой в подложку.
23. Способ по п.17, дополнительно содержащий соединение подложки и заднего щитка с помощью соединительного материала.
24. Способ по п.23, в котором соединение подложки и заднего щитка с помощью соединительного материала содержит соединение подложки и заднего щитка с помощью соединительного материала, содержащего материал управления средой.
25. Способ по п.17, в котором включение материала управления средой содержит добавление порошка внутрь корпуса.
26. Способ по п.17, дополнительно содержащий придание материалу управления средой форм и его введение внутрь корпуса.
27. Способ по п.17, в котором включение материала управления средой содержит нанесение материала управления средой в виде распыления.
28. Способ по п.17, в котором включение материала управления средой содержит нанесение материала управления средой в виде покрытия погружением.
29. Способ по п.17, в котором включение материала управления средой содержит нанесение материала управления средой методом трафаретной печати.
30. Способ по п.17, в котором включение материала управления средой содержит распределение материала управления средой в форме жидкости.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/839,307 | 2004-05-04 | ||
| US10/839,307 US7060895B2 (en) | 2004-05-04 | 2004-05-04 | Modifying the electro-mechanical behavior of devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2006142703A true RU2006142703A (ru) | 2008-06-10 |
| RU2378187C2 RU2378187C2 (ru) | 2010-01-10 |
Family
ID=34966802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2006142703/28A RU2378187C2 (ru) | 2004-05-04 | 2005-04-20 | Модификация электромеханического поведения приборов |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7060895B2 (ru) |
| EP (2) | EP2394951A3 (ru) |
| JP (1) | JP4525985B2 (ru) |
| MX (1) | MXPA06012741A (ru) |
| MY (1) | MY138642A (ru) |
| RU (1) | RU2378187C2 (ru) |
| TW (1) | TWI296264B (ru) |
| WO (1) | WO2005110914A1 (ru) |
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-
2004
- 2004-05-04 US US10/839,307 patent/US7060895B2/en active Active
-
2005
- 2005-04-20 RU RU2006142703/28A patent/RU2378187C2/ru not_active IP Right Cessation
- 2005-04-20 EP EP11180092A patent/EP2394951A3/en not_active Ceased
- 2005-04-20 MX MXPA06012741A patent/MXPA06012741A/es active IP Right Grant
- 2005-04-20 EP EP05728364A patent/EP1751051A1/en not_active Withdrawn
- 2005-04-20 WO PCT/US2005/013463 patent/WO2005110914A1/en active Application Filing
- 2005-04-20 JP JP2007511400A patent/JP4525985B2/ja not_active Expired - Fee Related
- 2005-04-27 MY MYPI20051838A patent/MY138642A/en unknown
- 2005-05-04 TW TW094114423A patent/TWI296264B/zh not_active IP Right Cessation
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Also Published As
| Publication number | Publication date |
|---|---|
| US20060219435A1 (en) | 2006-10-05 |
| US7060895B2 (en) | 2006-06-13 |
| RU2378187C2 (ru) | 2010-01-10 |
| US20050247477A1 (en) | 2005-11-10 |
| MXPA06012741A (es) | 2007-02-14 |
| JP4525985B2 (ja) | 2010-08-18 |
| TW200607748A (en) | 2006-03-01 |
| MY138642A (en) | 2009-07-31 |
| US7161094B2 (en) | 2007-01-09 |
| EP2394951A2 (en) | 2011-12-14 |
| TWI296264B (en) | 2008-05-01 |
| EP1751051A1 (en) | 2007-02-14 |
| EP2394951A3 (en) | 2012-06-06 |
| WO2005110914A1 (en) | 2005-11-24 |
| JP2008500564A (ja) | 2008-01-10 |
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