RU198976U1 - REMOVABLE CONTAINER FOR VACUUM SPRAYING UNIT SUPPORT - Google Patents

Abstract

The removable container for the substrate holder of the vacuum deposition unit belongs to the elements of in-chamber devices and can be used when applying metal and semiconductor films to cover parts used in products of the electronic, instrument-making and optical industries. The device allows you to increase the number of samples without mechanical interference in the sample "body". The technical result of the utility model is an increase in the productivity and quality of the sprayed samples, which is achieved by the fact that in a removable container for the substrate holder of a vacuum deposition unit, consisting of a base with cells for samples and a fixation system , new is that it contains a ring for fixing the substrates along the outer edge and a washer for fastening along the inner, while the cells for positioning the samples are made in the body of the base in the form of a two-level depression, the lower level of which is smaller in size than the upper one. allows for the fastest loading and unloading of samples, reducing the time of their stay in air, which significantly improves the quality of the materials obtained, and the simplicity of the design contributes to an increase in the productivity of the spraying process.

Description

The utility model refers to the elements of in-chamber devices for vacuum deposition installations and can be used in the deposition of metal and semiconductor films to cover parts used in products of the electronic, instrument-making and optical industries. The device allows you to increase the number of samples without mechanical interference in the "body" of the sample.

Known installation vacuum deposition UVN-2M-2 serial production, containing a vacuum chamber, a rotating carousel-type substrate holder, removable containers for placing and fixing the substrates, as well as crucibles with sprayed material [http://www.mosep.ru/ru/news/ branch / 285.html].

The disadvantages of this device are the cumbersomeness of the rotation system, the presence of an error in the positioning of the crucible-substrate system, the large size of the substrates, and the sequence of sputtering of samples. The large size of the substrate entails the presence of inhomogeneities (thickness, structure, texture) over the entire area of the sample, and the alternate passage of the substrate by the place of material spraying will lead to the formation of a layered structure of the samples.

Known multi-seat substrate holder [RU 417542, publ. 11/28/1974], which is a base serving to accommodate substrates, and a fixation system.

The disadvantages of this device is the presence of an elongated shape (rectangle), which leads to inhomogeneity of the obtained samples, prepared even in a single technological cycle, since the substrates are at different distances from the center of the substrate holder and have different conditions for the formation of samples.

Known useful model of a substrate holder for vacuum deposition [RU 173825, publ. 09/13/2017], which makes it possible to obtain conductive coatings with different sectoral formation of conductive layers.

The disadvantages of this substrate holder are the absence of mechanisms that hold the substrate, the deposition in one technological cycle of only one sample, which does not allow for good repeatability for a batch.

Known substrate holder [US 5703493, publ. 12/30/1997], suitable for obtaining thin-film coatings on substrates of various sizes and configurations of films.

The disadvantages of this substrate holder are the absence of a device holding the substrate, as well as the impossibility of using several substrates in a single technological cycle.

The closest technical solution is wafer holder [US 10290524, publ. 05/14/2019], which offers an insert designed for four substrates with a complex system for fixing the substrates.

The disadvantages of this device are the large number of elements that make up the fastening mechanism, which requires significant time spent on assembling and disassembling the mechanism when reloading the substrates and increases the residence time of the sample in the open air, which affects the quality of the samples.

The technical result of the claimed utility model is an increase in productivity and quality of sprayed samples.

This technical result is achieved by the fact that in a removable container for a substrate holder of a vacuum deposition unit, consisting of a base with cells for samples and a fixation system, it is new that it contains a ring for fixing the substrates along the outer edge and a washer for fixing along the inner, while cells for the locations of the samples are made in the body of the base in the form of a two-level depression, the lower level of which is smaller in size than the upper one.

The claimed removable container for the substrate holder of the vacuum deposition unit, consisting of a base with cells for accommodating the substrates, which are clearly fixed on it using two special rings and screws. It should be noted that loading of substrates and unloading of samples is not difficult due to the simplicity of the claimed design. For the process of reloading the substrates, it is enough to unscrew the central screw and remove the central washer, while it is not necessary to remove the outer clamping ring, since the samples are easily removed from the cells without deformations or any other damage, held only at one point. Reducing substrate exposure time reduces surface contamination, which is an important factor in ensuring the quality of the applied films.

Thus, the above-listed features distinguishing from the prototype make it possible to conclude that the proposed technical solution meets the “novelty” criterion. The features that distinguish the claimed technical solution from the prototype are not identified in other technical solutions and, therefore, ensure compliance with the "inventive step" criterion for the claimed solution.

The removable container for the substrate holder of the vacuum deposition unit is illustrated by the following figures:

fig. 1 - “Base of a removable container for a substrate holder of a vacuum deposition unit”;

fig. 2 - "Ring for fixing the container along the outer edge";

fig. 3 - "Washer for fixing the container along the inner edge";

fig. 4 - "An example of a basic substrate holder";

fig. 5 - "Removable container in the assembly, installed in the base substrate holder (top view)".

The removable container for the substrate holder of the vacuum deposition unit is made of stainless and non-magnetic steel and consists of a base 1 with cells 2, a ring for fixing the substrates along the outer edge 3 and a fastening washer 4 for fixing along the inner edge. At the base of the container there are five threaded holes for screws: four holes 5a for fixing the fixing ring and one 5b for the washer. The fixing ring and the fastening washer contain holes 6a and 6b aligned with the holes of the base, which serve to fix the component parts of the container.

An example of a specific implementation of a removable container for a substrate holder of a vacuum deposition unit is presented below.

The base 1 of the container (Fig. 1) is a cylinder ∅ 76.5 mm and a height of 0.9 mm. The base has 4 cells 2, located diametrically opposite to each other. Seen from above, one of the two diagonals of cell 2 coincides with the diagonal of the base 1 of the container. The same condition applies to all cells 2 along the diagonals. Cell 2 is made in the body of base 1 in the form of a two-level depression and is a figure obtained by combining two similar parallelepipeds, at the bases of which there are squares with sides 18.1 × 18.1 and a height of 0.7 mm and 16 × 16 mm and a height 0.2 mm respectively. Moreover, the larger parallelepiped is located at the upper base of the container cylinder, the smaller one - at the lower one. Thus, a cell window of 16 × 16 mm is obtained in the lower base of the container, through which the deposition of the sprayed material on the substrates takes place. A large parallelepiped with dimensions of 18.1 × 18.1 and a depth of 0.7 mm corresponds to the geometric dimensions of the substrates placed inside, which are supposed to be used in the future. This design of the cells does not allow the substrates to move in a plane inside the container. To ensure fixation of the substrates at the base of the container, a fastening ring 3 (Fig. 2) and a fastening washer 4 (Fig. 3) are used.

The fastening ring 3 (Fig. 2) fixes all substrates along the outer edge. The ring thickness is 0.9 mm, the inner diameter ∅ 62.4 mm, and the outer ∅ 76.5 mm, so as not to protrude beyond the boundaries of the container base 1.

Fastening washer 4 (Fig. 3) ∅ 19 mm and 0.9 mm thick provides fixation of the substrates in the cells along a small diameter, covering the inner edges of the substrates.

All parts of the container are fixed with screws fixed in the holes 5a and 5b in the base of the container, aligned with the holes 6a and 6b on the fastening ring and washer, respectively.

The utility model works as follows.

Before starting work, a removable container for a substrate holder is removed from the loading chamber of the installation, which is disassembled into its component parts. Then in cells 2 are placed in advance prepared substrates in the required amount. If the number of substrates used is less than four, then the remaining unfilled cells 2 must be closed with other substrates that are not used in further work (for example, cover glasses), which will play the role of plugs in the process of sample synthesis.

To fix the substrates in the cells, a fastening ring 3 is placed on the base of the container 1 and fixed with four screws, while a washer 4 is placed in the center of the base of the container 1 and fixed with another screw. After the container is equipped with substrates and is completely assembled, it is placed in the base substrate holder 7 of the installation (Fig. 4).

In this form (Fig. 5), the substrate holder is sent to the loading chamber of the installation for further manipulations. After the end of the film synthesis process, the removable container for the substrate holder is removed, the screws are unscrewed, the fastening ring 3 and the washer 4 are removed, the substrates - the samples are removed from the cells 2.

Thus, the claimed utility model allows for the fastest possible loading and unloading of samples, reducing the time of their stay in air, which significantly improves the quality of the materials obtained, and the simplicity of the design contributes to an increase in the productivity of the spraying process.

Claims (1)

A removable container for a substrate holder of a vacuum deposition unit, consisting of a base with cells for samples and a fixation system, characterized in that the fixation system contains a ring for fixing the substrates along the outer edge and a washer for fixing along the inner edge, while cells for positioning samples are made in the body of the base in the form of a two-level depression, the lower level of which is smaller in size than the upper one.

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