PT798552E - Detector de gases fotoacustico - Google Patents
Detector de gases fotoacusticoInfo
- Publication number
- PT798552E PT798552E PT97104373T PT97104373T PT798552E PT 798552 E PT798552 E PT 798552E PT 97104373 T PT97104373 T PT 97104373T PT 97104373 T PT97104373 T PT 97104373T PT 798552 E PT798552 E PT 798552E
- Authority
- PT
- Portugal
- Prior art keywords
- microphone
- gas
- cell
- fotoacustic
- gas detector
- Prior art date
Links
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract 2
- 210000004027 cell Anatomy 0.000 abstract 2
- 239000012528 membrane Substances 0.000 abstract 2
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract 1
- 239000001569 carbon dioxide Substances 0.000 abstract 1
- 210000002421 cell wall Anatomy 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP96104689A EP0801296A1 (de) | 1996-03-25 | 1996-03-25 | Photoakustischer Gassensor |
Publications (1)
Publication Number | Publication Date |
---|---|
PT798552E true PT798552E (pt) | 2004-10-29 |
Family
ID=8222596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PT97104373T PT798552E (pt) | 1996-03-25 | 1997-03-14 | Detector de gases fotoacustico |
Country Status (7)
Country | Link |
---|---|
US (1) | US5841017A (pt) |
EP (1) | EP0801296A1 (pt) |
AT (1) | ATE268472T1 (pt) |
CA (1) | CA2200137A1 (pt) |
DE (1) | DE59711679D1 (pt) |
ES (1) | ES2222489T3 (pt) |
PT (1) | PT798552E (pt) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NO300078B1 (no) * | 1995-02-10 | 1997-04-01 | Sinvent As | Fotoakustisk gassdetektor |
ES2268716T3 (es) * | 1997-01-25 | 2007-03-16 | Siemens Schweiz Ag | Detector optoacustico de gases. |
DE10063151B4 (de) * | 2000-12-18 | 2004-03-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zur Analyse der qualitativen und/oder quantitativen Zusammensetzung von Fluiden |
US6662627B2 (en) | 2001-06-22 | 2003-12-16 | Desert Research Institute | Photoacoustic instrument for measuring particles in a gas |
US6651481B1 (en) | 2001-10-12 | 2003-11-25 | The United States Of America As Represented By The United States National Aeronautics And Space Administration | Method and apparatus for characterizing pressure sensors using modulated light beam pressure |
ATE396820T1 (de) * | 2002-08-01 | 2008-06-15 | Trumpf Werkzeugmaschinen Gmbh | Laserbearbeitungsmaschine |
US7228724B2 (en) * | 2002-10-17 | 2007-06-12 | Advanced Technology Materials, Inc. | Apparatus and process for sensing target gas species in semiconductor processing systems |
US20040163445A1 (en) * | 2002-10-17 | 2004-08-26 | Dimeo Frank | Apparatus and process for sensing fluoro species in semiconductor processing systems |
US7080545B2 (en) * | 2002-10-17 | 2006-07-25 | Advanced Technology Materials, Inc. | Apparatus and process for sensing fluoro species in semiconductor processing systems |
US7296458B2 (en) * | 2002-10-17 | 2007-11-20 | Advanced Technology Materials, Inc | Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same |
US7106445B2 (en) * | 2003-08-06 | 2006-09-12 | Mine Safety Appliances Company | Photoacoustic gas sensor utilizing diffusion |
WO2005072161A2 (en) * | 2004-01-16 | 2005-08-11 | Advanced Technology Materials, Inc. | Apparatus and process for sensing target gas species in semiconductor processing systems |
US20060211253A1 (en) * | 2005-03-16 | 2006-09-21 | Ing-Shin Chen | Method and apparatus for monitoring plasma conditions in an etching plasma processing facility |
DE102006048839B4 (de) * | 2006-10-16 | 2010-01-07 | Eads Deutschland Gmbh | Photoakustische Gassensor-Vorrichtung mit mehreren Messzellen |
US8939006B2 (en) * | 2011-05-04 | 2015-01-27 | Honeywell International Inc. | Photoacoustic detector with long term drift compensation |
US20130174645A1 (en) * | 2012-01-06 | 2013-07-11 | Martin Willett | Photoacoustic method for oxygen sensing |
CN102539331B (zh) * | 2012-02-13 | 2014-12-10 | 上海交通大学 | 用于无创血糖检测的单腔光声池及检测方法 |
US8848191B2 (en) | 2012-03-14 | 2014-09-30 | Honeywell International Inc. | Photoacoustic sensor with mirror |
DE102015106373B4 (de) * | 2015-04-24 | 2023-03-02 | Infineon Technologies Ag | Photoakustisches gassensormodul mit lichtemittereinheit und einer detektoreinheit |
US11105738B2 (en) | 2016-11-28 | 2021-08-31 | Kyocera Corporation | Sensor wiring substrate, sensor package, and sensor device |
US10620165B2 (en) * | 2016-12-29 | 2020-04-14 | Infineon Technologies Ag | Photoacoustic gas analyzer for determining species concentrations using intensity modulation |
CN107505264B (zh) * | 2017-08-18 | 2020-08-18 | 浙江中浩应用工程技术研究院有限公司 | 一种建筑内部气体传感器 |
US10551356B2 (en) * | 2017-10-23 | 2020-02-04 | Infineon Technologies Ag | Photoacoustic gas sensor and method |
AT520428B1 (de) * | 2017-11-23 | 2019-04-15 | Avl List Gmbh | Verfahren und Vorrichtung zur Messung eines in einem Rohgas |
DE102017128526B4 (de) * | 2017-12-01 | 2019-06-19 | Infineon Technologies Ag | Photoakustischer Sensor, Verfahren zum Prüfen einer Gasdichtheit und System |
DE102018112341B4 (de) | 2018-05-23 | 2023-03-30 | Infineon Technologies Ag | Photoakustischer gassensor und verfahren zum betreiben eines photoakustischen gassensors |
CN109900644B (zh) * | 2019-04-11 | 2024-04-16 | 南京无书化工有限公司 | 一种少组分变压器油气在线监测装置和方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4740086A (en) * | 1984-02-07 | 1988-04-26 | Oskar Oehler | Apparatus for the photoacoustic detection of gases |
DK247786D0 (da) * | 1986-05-27 | 1986-05-27 | Brueel & Kjaer As | Fotoakustisk gasanalysator |
DE3705900A1 (de) * | 1987-02-24 | 1988-09-01 | Siemens Ag | Verfahren zur selbstueberwachung von messwertaufnehmern |
JPH0621861B2 (ja) * | 1987-09-28 | 1994-03-23 | 株式会社日立製作所 | 光音響分光装置 |
US5463893A (en) * | 1994-05-16 | 1995-11-07 | General Electric Company | Sensor matching through real-time output compensation |
US5402669A (en) * | 1994-05-16 | 1995-04-04 | General Electric Company | Sensor matching through source modeling and output compensation |
-
1996
- 1996-03-25 EP EP96104689A patent/EP0801296A1/de not_active Withdrawn
-
1997
- 1997-03-14 AT AT97104373T patent/ATE268472T1/de not_active IP Right Cessation
- 1997-03-14 ES ES97104373T patent/ES2222489T3/es not_active Expired - Lifetime
- 1997-03-14 DE DE59711679T patent/DE59711679D1/de not_active Expired - Fee Related
- 1997-03-14 PT PT97104373T patent/PT798552E/pt unknown
- 1997-03-17 CA CA002200137A patent/CA2200137A1/en not_active Abandoned
- 1997-03-24 US US08/828,837 patent/US5841017A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0801296A1 (de) | 1997-10-15 |
ATE268472T1 (de) | 2004-06-15 |
US5841017A (en) | 1998-11-24 |
DE59711679D1 (de) | 2004-07-08 |
CA2200137A1 (en) | 1997-09-25 |
ES2222489T3 (es) | 2005-02-01 |
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