PL399921A1 - Przenosna walizka prózniowa z wziernikiem - Google Patents

Przenosna walizka prózniowa z wziernikiem

Info

Publication number
PL399921A1
PL399921A1 PL399921A PL39992112A PL399921A1 PL 399921 A1 PL399921 A1 PL 399921A1 PL 399921 A PL399921 A PL 399921A PL 39992112 A PL39992112 A PL 39992112A PL 399921 A1 PL399921 A1 PL 399921A1
Authority
PL
Poland
Prior art keywords
sight glass
portable vacuum
vacuum case
case
vacuum chamber
Prior art date
Application number
PL399921A
Other languages
English (en)
Other versions
PL220339B1 (pl
Inventor
Janusz Sobczak
Aleksander Jabłoński
Włodzimierz Kutner
Krzysztof Noworyta
Andreas Glenz
Original Assignee
Instytut Chemii Fizycznej Polskiej Akademii Nauk
Prevac Spółka Z Ograniczoną Opdowiedzialnością
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Instytut Chemii Fizycznej Polskiej Akademii Nauk, Prevac Spółka Z Ograniczoną Opdowiedzialnością filed Critical Instytut Chemii Fizycznej Polskiej Akademii Nauk
Priority to PL399921A priority Critical patent/PL220339B1/pl
Priority to EP13174926.9A priority patent/EP2685490A1/en
Publication of PL399921A1 publication Critical patent/PL399921A1/pl
Publication of PL220339B1 publication Critical patent/PL220339B1/pl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/004—Sight-glasses therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67356—Closed carriers specially adapted for containing chips, dies or ICs

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Packages (AREA)
  • Purses, Travelling Bags, Baskets, Or Suitcases (AREA)

Abstract

Przedmiotem wynalazku jest przenosna walizka prózniowa, obejmujaca mobilna komore prózniowa i pierwszy zawór jako zespól zamykajacy, charakteryzujaca sie tym, ze w obudowie komory prózniowej (1) umieszczony jest wziernik (2) lub/i wzierniki (3).
PL399921A 2012-07-12 2012-07-12 Przenośna walizka próżniowa z wziernikiem PL220339B1 (pl)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PL399921A PL220339B1 (pl) 2012-07-12 2012-07-12 Przenośna walizka próżniowa z wziernikiem
EP13174926.9A EP2685490A1 (en) 2012-07-12 2013-07-03 Portable vacuum case with a sight-glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL399921A PL220339B1 (pl) 2012-07-12 2012-07-12 Przenośna walizka próżniowa z wziernikiem

Publications (2)

Publication Number Publication Date
PL399921A1 true PL399921A1 (pl) 2014-01-20
PL220339B1 PL220339B1 (pl) 2015-10-30

Family

ID=48745784

Family Applications (1)

Application Number Title Priority Date Filing Date
PL399921A PL220339B1 (pl) 2012-07-12 2012-07-12 Przenośna walizka próżniowa z wziernikiem

Country Status (2)

Country Link
EP (1) EP2685490A1 (pl)
PL (1) PL220339B1 (pl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3029428B1 (fr) * 2014-12-04 2016-12-30 Univ Nantes Dispositif pour la synthese et l'etude de composes sous temperatures et pressions controlees

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4969556A (en) * 1988-05-10 1990-11-13 Hajime Ishimaru Vacuum container
US6168364B1 (en) 1999-04-19 2001-01-02 Tdk Corporation Vacuum clean box, clean transfer method and apparatus therefor
JP3619119B2 (ja) * 2000-05-15 2005-02-09 キヤノン株式会社 真空処理方法
US7018517B2 (en) 2002-06-21 2006-03-28 Applied Materials, Inc. Transfer chamber for vacuum processing system
FR2874744B1 (fr) 2004-08-30 2006-11-24 Cit Alcatel Interface sous vide entre une boite de mini-environnement et un equipement

Also Published As

Publication number Publication date
EP2685490A1 (en) 2014-01-15
PL220339B1 (pl) 2015-10-30

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