PL3971998T3 - Sposób przetwarzania pasywacyjnej warstewki krzemu z domieszkowaniem typu n dla ogniwa słonecznego - Google Patents

Sposób przetwarzania pasywacyjnej warstewki krzemu z domieszkowaniem typu n dla ogniwa słonecznego

Info

Publication number
PL3971998T3
PL3971998T3 PL20907093.7T PL20907093T PL3971998T3 PL 3971998 T3 PL3971998 T3 PL 3971998T3 PL 20907093 T PL20907093 T PL 20907093T PL 3971998 T3 PL3971998 T3 PL 3971998T3
Authority
PL
Poland
Prior art keywords
processing
solar cell
passivation film
type doped
doped silicon
Prior art date
Application number
PL20907093.7T
Other languages
English (en)
Inventor
Xiaoye CHEN
Junbing Zhang
Wei Shan
Original Assignee
Ja Solar Technology Yangzhou Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ja Solar Technology Yangzhou Co., Ltd. filed Critical Ja Solar Technology Yangzhou Co., Ltd.
Publication of PL3971998T3 publication Critical patent/PL3971998T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/129—Passivating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • H10D30/6739—Conductor-insulator-semiconductor electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/661—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of silicon contacting the insulator, e.g. polysilicon having vertical doping variation
    • H10D64/662—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of silicon contacting the insulator, e.g. polysilicon having vertical doping variation the conductor further comprising additional layers, e.g. multiple silicon layers having different crystal structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
    • H10F10/146—Back-junction photovoltaic cells, e.g. having interdigitated base-emitter regions on the back side
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/164—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells
    • H10F10/165—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/164—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells
    • H10F10/165—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells
    • H10F10/166—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells the Group IV-IV heterojunctions being heterojunctions of crystalline and amorphous materials, e.g. silicon heterojunction [SHJ] photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/121—The active layers comprising only Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/128—Annealing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/131—Recrystallisation; Crystallization of amorphous or microcrystalline semiconductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/12—Active materials
    • H10F77/122—Active materials comprising only Group IV materials
    • H10F77/1223—Active materials comprising only Group IV materials characterised by the dopants
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/311—Coatings for devices having potential barriers for photovoltaic cells
PL20907093.7T 2019-12-27 2020-07-27 Sposób przetwarzania pasywacyjnej warstewki krzemu z domieszkowaniem typu n dla ogniwa słonecznego PL3971998T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201911380721.9A CN111354838B (zh) 2019-12-27 2019-12-27 太阳能电池及其制备方法、n型掺杂硅膜的处理方法
PCT/CN2020/104771 WO2021128831A1 (zh) 2019-12-27 2020-07-27 太阳能电池及其制备方法、n型掺杂硅膜的处理方法以及半导体器件

Publications (1)

Publication Number Publication Date
PL3971998T3 true PL3971998T3 (pl) 2025-04-22

Family

ID=71197104

Family Applications (1)

Application Number Title Priority Date Filing Date
PL20907093.7T PL3971998T3 (pl) 2019-12-27 2020-07-27 Sposób przetwarzania pasywacyjnej warstewki krzemu z domieszkowaniem typu n dla ogniwa słonecznego

Country Status (7)

Country Link
US (1) US20220238748A1 (pl)
EP (1) EP3971998B1 (pl)
CN (1) CN111354838B (pl)
ES (1) ES3020335T3 (pl)
PL (1) PL3971998T3 (pl)
TW (1) TW202125845A (pl)
WO (1) WO2021128831A1 (pl)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111354838B (zh) * 2019-12-27 2022-07-15 晶澳（扬州）太阳能科技有限公司 太阳能电池及其制备方法、n型掺杂硅膜的处理方法
CN112599618A (zh) * 2020-12-15 2021-04-02 泰州隆基乐叶光伏科技有限公司 一种太阳能电池及其制作方法
CN115692544B (zh) * 2021-07-28 2025-09-23 环晟光伏(江苏)有限公司 一种Topcon电池钝化结构的制备方法
CN116190498B (zh) * 2021-11-26 2024-04-16 通威太阳能(眉山)有限公司 制备隧穿氧化层和非晶硅薄膜的方法及TOPCon电池
GB202119060D0 (en) * 2021-12-29 2022-02-09 Rec Solar Pte Ltd Solar cell and method for forming the same
CN115064606B (zh) * 2022-06-16 2024-09-03 湖南红太阳光电科技有限公司 一种用于提高多晶硅层钝化效果的水汽退火工艺
CN115411150B (zh) * 2022-09-29 2024-07-09 通威太阳能（成都）有限公司 太阳电池及其制备方法
CN115642201A (zh) * 2022-10-11 2023-01-24 三一硅能(株洲)有限公司 一种基于光伏电池的变温扩散工艺
CN118431309B (zh) * 2024-07-05 2024-10-18 天合光能股份有限公司 硅基异质结太阳能电池及其制备方法
CN119907334A (zh) * 2025-01-10 2025-04-29 晶科能源(上饶)有限公司 TOPCon电池的制备方法和TOPCon电池

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JP3545470B2 (ja) * 1994-12-01 2004-07-21 株式会社ルネサステクノロジ 半導体集積回路装置の製造方法
JP2953396B2 (ja) * 1996-09-06 1999-09-27 日本電気株式会社 シリコン薄膜電導素子の製造方法
JP2002231627A (ja) 2001-01-30 2002-08-16 Semiconductor Energy Lab Co Ltd 光電変換装置の作製方法
FR2929755B1 (fr) * 2008-04-03 2011-04-22 Commissariat Energie Atomique Procede de traitement d'un substrat semi-conducteur par activation thermique d'elements legers
US20130048070A1 (en) * 2011-08-26 2013-02-28 Arash Hazeghi Tunnel photovoltaic
CN109075216A (zh) 2016-03-23 2018-12-21 三菱电机株式会社 太阳能电池及太阳能电池的制造方法
WO2018108403A1 (en) 2016-12-12 2018-06-21 Ecole Polytechnique Federale De Lausanne (Epfl) Silicon heterojunction solar cells and methods of manufacture
CN109216499A (zh) * 2017-06-29 2019-01-15 上海神舟新能源发展有限公司 基于单晶perc正面发射结隧穿氧化钝化电池制备方法
CN109216498A (zh) * 2017-06-29 2019-01-15 上海神舟新能源发展有限公司 一种双面隧穿氧化钝化高效n型双面电池的制备方法
CN108336184A (zh) 2018-02-09 2018-07-27 中国科学院宁波材料技术与工程研究所 一种隧穿氧钝化接触晶体硅太阳电池的制备方法
CN109273557B (zh) * 2018-08-10 2021-01-12 晶澳（扬州）太阳能科技有限公司 一种太阳能电池用硅片的处理方法
CN109148647A (zh) * 2018-09-07 2019-01-04 江苏顺风光电科技有限公司 一种TOPCon结构电池的制备方法
CN109585578A (zh) * 2019-01-15 2019-04-05 晶澳（扬州）太阳能科技有限公司 一种背结太阳能电池及其制备方法
CN110571309B (zh) * 2019-03-20 2021-03-16 常州大学 一种去除Poly绕镀清洗方法
CN109962126B (zh) * 2019-04-29 2023-12-05 浙江晶科能源有限公司 N型钝化接触电池的制作系统及方法
CN110197855B (zh) * 2019-05-29 2021-06-15 西安理工大学 用于Topcon电池制作的poly-Si绕镀的去除方法
CN111354838B (zh) * 2019-12-27 2022-07-15 晶澳（扬州）太阳能科技有限公司 太阳能电池及其制备方法、n型掺杂硅膜的处理方法

Also Published As

Publication number Publication date
EP3971998C0 (en) 2025-02-26
CN111354838B (zh) 2022-07-15
EP3971998A4 (en) 2022-08-10
CN111354838A (zh) 2020-06-30
ES3020335T3 (en) 2025-05-22
US20220238748A1 (en) 2022-07-28
EP3971998A1 (en) 2022-03-23
WO2021128831A1 (zh) 2021-07-01
TW202125845A (zh) 2021-07-01
EP3971998B1 (en) 2025-02-26

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