PL395403A1 - Miniaturowe zródlo plazmy jarzeniowej - Google Patents

Miniaturowe zródlo plazmy jarzeniowej

Info

Publication number
PL395403A1
PL395403A1 PL395403A PL39540311A PL395403A1 PL 395403 A1 PL395403 A1 PL 395403A1 PL 395403 A PL395403 A PL 395403A PL 39540311 A PL39540311 A PL 39540311A PL 395403 A1 PL395403 A1 PL 395403A1
Authority
PL
Poland
Prior art keywords
plasma glow
miniature source
miniature
source
glow
Prior art date
Application number
PL395403A
Other languages
English (en)
Other versions
PL223685B1 (pl
Inventor
Jerzy Janiszewski
Original Assignee
Politechnika Poznanska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Poznanska filed Critical Politechnika Poznanska
Priority to PL395403A priority Critical patent/PL223685B1/pl
Publication of PL395403A1 publication Critical patent/PL395403A1/pl
Publication of PL223685B1 publication Critical patent/PL223685B1/pl

Links

PL395403A 2011-06-22 2011-06-22 Miniaturowe źródło plazmy jarzeniowej PL223685B1 (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL395403A PL223685B1 (pl) 2011-06-22 2011-06-22 Miniaturowe źródło plazmy jarzeniowej

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL395403A PL223685B1 (pl) 2011-06-22 2011-06-22 Miniaturowe źródło plazmy jarzeniowej

Publications (2)

Publication Number Publication Date
PL395403A1 true PL395403A1 (pl) 2013-01-07
PL223685B1 PL223685B1 (pl) 2016-10-31

Family

ID=47624632

Family Applications (1)

Application Number Title Priority Date Filing Date
PL395403A PL223685B1 (pl) 2011-06-22 2011-06-22 Miniaturowe źródło plazmy jarzeniowej

Country Status (1)

Country Link
PL (1) PL223685B1 (pl)

Also Published As

Publication number Publication date
PL223685B1 (pl) 2016-10-31

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