PL395405A1 - Miniaturowe zródlo plazmy jarzeniowej - Google Patents

Miniaturowe zródlo plazmy jarzeniowej

Info

Publication number
PL395405A1
PL395405A1 PL395405A PL39540511A PL395405A1 PL 395405 A1 PL395405 A1 PL 395405A1 PL 395405 A PL395405 A PL 395405A PL 39540511 A PL39540511 A PL 39540511A PL 395405 A1 PL395405 A1 PL 395405A1
Authority
PL
Poland
Prior art keywords
plasma glow
miniature source
miniature
source
glow
Prior art date
Application number
PL395405A
Other languages
English (en)
Other versions
PL223682B1 (pl
Inventor
Jerzy Janiszewski
Original Assignee
Politechnika Poznanska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Poznanska filed Critical Politechnika Poznanska
Priority to PL395405A priority Critical patent/PL223682B1/pl
Publication of PL395405A1 publication Critical patent/PL395405A1/pl
Publication of PL223682B1 publication Critical patent/PL223682B1/pl

Links

PL395405A 2011-06-22 2011-06-22 Miniaturowe źródło plazmy jarzeniowej PL223682B1 (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL395405A PL223682B1 (pl) 2011-06-22 2011-06-22 Miniaturowe źródło plazmy jarzeniowej

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL395405A PL223682B1 (pl) 2011-06-22 2011-06-22 Miniaturowe źródło plazmy jarzeniowej

Publications (2)

Publication Number Publication Date
PL395405A1 true PL395405A1 (pl) 2013-01-07
PL223682B1 PL223682B1 (pl) 2016-10-31

Family

ID=47624634

Family Applications (1)

Application Number Title Priority Date Filing Date
PL395405A PL223682B1 (pl) 2011-06-22 2011-06-22 Miniaturowe źródło plazmy jarzeniowej

Country Status (1)

Country Link
PL (1) PL223682B1 (pl)

Also Published As

Publication number Publication date
PL223682B1 (pl) 2016-10-31

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