PL2529601T3 - Dające się zminiaturyzować źródło plazmy - Google Patents

Dające się zminiaturyzować źródło plazmy

Info

Publication number
PL2529601T3
PL2529601T3 PL11704740T PL11704740T PL2529601T3 PL 2529601 T3 PL2529601 T3 PL 2529601T3 PL 11704740 T PL11704740 T PL 11704740T PL 11704740 T PL11704740 T PL 11704740T PL 2529601 T3 PL2529601 T3 PL 2529601T3
Authority
PL
Poland
Prior art keywords
miniaturizable
plasma source
plasma
source
miniaturizable plasma
Prior art date
Application number
PL11704740T
Other languages
English (en)
Inventor
Silvio Kuehn
Roland Gesche
Horia-Eugen Porteanu
Original Assignee
Forschungsverbund Berlin Ev
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungsverbund Berlin Ev filed Critical Forschungsverbund Berlin Ev
Publication of PL2529601T3 publication Critical patent/PL2529601T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645—Radiofrequency discharges
    • H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2240/00—Testing
    • H05H2240/10—Testing at atmospheric pressure
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/60—Portable devices

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
PL11704740T 2010-01-29 2011-01-28 Dające się zminiaturyzować źródło plazmy PL2529601T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010001395A DE102010001395B4 (de) 2010-01-29 2010-01-29 Miniaturisierbare Plasmaquelle
EP11704740.7A EP2529601B1 (de) 2010-01-29 2011-01-28 Miniaturisierbare plasmaquelle
PCT/EP2011/051234 WO2011092298A1 (de) 2010-01-29 2011-01-28 Miniaturisierbare plasmaquelle

Publications (1)

Publication Number Publication Date
PL2529601T3 true PL2529601T3 (pl) 2015-08-31

Family

ID=44148923

Family Applications (1)

Application Number Title Priority Date Filing Date
PL11704740T PL2529601T3 (pl) 2010-01-29 2011-01-28 Dające się zminiaturyzować źródło plazmy

Country Status (5)

Country Link
US (1) US8796934B2 (pl)
EP (1) EP2529601B1 (pl)
DE (1) DE102010001395B4 (pl)
PL (1) PL2529601T3 (pl)
WO (1) WO2011092298A1 (pl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010001395B4 (de) 2010-01-29 2013-11-14 Forschungsverbund Berlin E.V. Miniaturisierbare Plasmaquelle
DE102020100872B4 (de) 2020-01-15 2021-08-05 Ferdinand-Braun-Institut gGmbH, Leibniz- Institut für Höchstfrequenztechnik Resonator und Leistungsoszillator zum Aufbau einer integrierten Plasmaquelle sowie deren Verwendung

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3495125A (en) * 1968-03-05 1970-02-10 Atomic Energy Commission Quarter-wave transmission line radio frequency voltage step-up transformer
BE758571A (fr) * 1969-11-06 1971-04-16 Euratom Generateur de plasma a haute frequence
US4797597A (en) * 1986-12-22 1989-01-10 Bostrom Norman A Microwave ion source
US4918031A (en) * 1988-12-28 1990-04-17 American Telephone And Telegraph Company,At&T Bell Laboratories Processes depending on plasma generation using a helical resonator
DE4337119C2 (de) * 1993-10-29 1996-10-24 Forsch Applikationslabor Plasm VHF-Plasmaquelle
US6329757B1 (en) * 1996-12-31 2001-12-11 The Perkin-Elmer Corporation High frequency transistor oscillator system
US6262638B1 (en) * 1998-09-28 2001-07-17 Axcelis Technologies, Inc. Tunable and matchable resonator coil assembly for ion implanter linear accelerator
JP4144095B2 (ja) * 1999-02-04 2008-09-03 ソニー株式会社 粒状体に対するプラズマ処理方法およびプラズマ処理装置
JP4672941B2 (ja) * 1999-07-13 2011-04-20 東京エレクトロン株式会社 誘導結合プラズマを発生させるための高周波電源
US6304036B1 (en) * 2000-08-08 2001-10-16 Archimedes Technology Group, Inc. System and method for initiating plasma production
US7867457B2 (en) * 2003-06-20 2011-01-11 Drexel University Plasma reactor for the production of hydrogen-rich gas
EP1801865A4 (en) * 2004-08-27 2009-11-04 Nat Inst Inf & Comm Tech GALLIUM-NITRIDE FIELD EFFECT TRANSISTOR AND METHOD FOR PRODUCING THE SAME
US7742167B2 (en) * 2005-06-17 2010-06-22 Perkinelmer Health Sciences, Inc. Optical emission device with boost device
US7459899B2 (en) * 2005-11-21 2008-12-02 Thermo Fisher Scientific Inc. Inductively-coupled RF power source
US20080078745A1 (en) * 2006-09-29 2008-04-03 Zyvex Corporation RF Coil Plasma Generation
US8128788B2 (en) * 2008-09-19 2012-03-06 Rf Thummim Technologies, Inc. Method and apparatus for treating a process volume with multiple electromagnetic generators
DE102010001395B4 (de) 2010-01-29 2013-11-14 Forschungsverbund Berlin E.V. Miniaturisierbare Plasmaquelle

Also Published As

Publication number Publication date
US8796934B2 (en) 2014-08-05
EP2529601B1 (de) 2015-03-11
WO2011092298A1 (de) 2011-08-04
EP2529601A1 (de) 2012-12-05
US20120313524A1 (en) 2012-12-13
DE102010001395A1 (de) 2011-08-04
DE102010001395B4 (de) 2013-11-14

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