PL364510A1 - Sposób i układ do kierunkowej detekcji elektronóww skaningowym mikroskopie elektronowym - Google Patents
Sposób i układ do kierunkowej detekcji elektronóww skaningowym mikroskopie elektronowymInfo
- Publication number
- PL364510A1 PL364510A1 PL04364510A PL36451004A PL364510A1 PL 364510 A1 PL364510 A1 PL 364510A1 PL 04364510 A PL04364510 A PL 04364510A PL 36451004 A PL36451004 A PL 36451004A PL 364510 A1 PL364510 A1 PL 364510A1
- Authority
- PL
- Poland
- Prior art keywords
- electrons
- electron microscope
- scanning electron
- system designed
- directional detection
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2443—Scintillation detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24435—Microchannel plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2446—Position sensitive detectors
- H01J2237/24465—Sectored detectors, e.g. quadrants
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24495—Signal processing, e.g. mixing of two or more signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
- H01J2237/2814—Measurement of surface topography
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL364510A PL210038B1 (pl) | 2004-01-21 | 2004-01-21 | Sposób i układ do kierunkowej detekcji elektronów w skaningowym mikroskopie elektronowym |
PCT/PL2004/000080 WO2005071710A1 (en) | 2004-01-21 | 2004-10-06 | Method and system for the directional detection of electrons in a scanning electron microscope |
EP04775186A EP1706887B1 (en) | 2004-01-21 | 2004-10-06 | Method and system for the directional detection of electrons in a scanning electron microscope |
US11/410,208 US7531812B2 (en) | 2003-10-27 | 2006-04-25 | Method and system for the directional detection of electrons in a scanning electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL364510A PL210038B1 (pl) | 2004-01-21 | 2004-01-21 | Sposób i układ do kierunkowej detekcji elektronów w skaningowym mikroskopie elektronowym |
Publications (2)
Publication Number | Publication Date |
---|---|
PL364510A1 true PL364510A1 (pl) | 2005-07-25 |
PL210038B1 PL210038B1 (pl) | 2011-11-30 |
Family
ID=34806253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL364510A PL210038B1 (pl) | 2003-10-27 | 2004-01-21 | Sposób i układ do kierunkowej detekcji elektronów w skaningowym mikroskopie elektronowym |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1706887B1 (pl) |
PL (1) | PL210038B1 (pl) |
WO (1) | WO2005071710A1 (pl) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4588890A (en) * | 1984-12-31 | 1986-05-13 | International Business Machines Corporation | Apparatus and method for composite image formation by scanning electron beam |
JPS62184752A (ja) * | 1986-02-07 | 1987-08-13 | Jeol Ltd | 荷電粒子ビ−ム測長機 |
JP2678059B2 (ja) * | 1989-04-17 | 1997-11-17 | 富士通株式会社 | 電子ビーム装置 |
-
2004
- 2004-01-21 PL PL364510A patent/PL210038B1/pl unknown
- 2004-10-06 EP EP04775186A patent/EP1706887B1/en not_active Ceased
- 2004-10-06 WO PCT/PL2004/000080 patent/WO2005071710A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP1706887A1 (en) | 2006-10-04 |
PL210038B1 (pl) | 2011-11-30 |
EP1706887B1 (en) | 2012-09-26 |
WO2005071710A1 (en) | 2005-08-04 |
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